7/5/2012	9:59:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	9:59:51 AM	Recipe started at 9:59 AM
7/5/2012	9:59:51 AM	Helium valve closed
7/5/2012	9:59:51 AM	H2 valve closed
7/5/2012	9:59:51 AM	BCl3 valve closed
7/5/2012	9:59:51 AM	PH3 valve closed
7/5/2012	9:59:51 AM	SiCl4 pre valve closed
7/5/2012	9:59:51 AM	SiCl4 post valve closed
7/5/2012	9:59:51 AM	Main Vac valve closed
7/5/2012	9:59:51 AM	Bypass valve closed
7/5/2012	9:59:51 AM	Bubbler valve closed
7/5/2012	9:59:51 AM	Helium MFC set to  0.000000
7/5/2012	9:59:51 AM	H2 MFC set to  0.000000
7/5/2012	9:59:51 AM	BCl3 MFC set to  0.000000
7/5/2012	9:59:51 AM	PH3 MFC set to  0.000000
7/5/2012	9:59:51 AM	SiCl4 MFC set to  0.000000
7/5/2012	9:59:51 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:59:52 AM	Tube furnace set to 0
7/5/2012	9:59:55 AM	H2 valve closed
7/5/2012	9:59:55 AM	BCl3 valve closed
7/5/2012	9:59:55 AM	PH3 valve closed
7/5/2012	9:59:55 AM	SiCl4 pre valve closed
7/5/2012	9:59:55 AM	SiCl4 post valve closed
7/5/2012	9:59:55 AM	Main Vac valve closed
7/5/2012	9:59:55 AM	Bypass valve closed
7/5/2012	9:59:55 AM	Bubbler valve closed
7/5/2012	9:59:55 AM	Helium valve opened
7/5/2012	9:59:55 AM	Helium MFC set to  500.000000
7/5/2012	9:59:55 AM	H2 MFC set to  0.000000
7/5/2012	9:59:55 AM	BCl3 MFC set to  0.000000
7/5/2012	9:59:55 AM	PH3 MFC set to  0.000000
7/5/2012	9:59:55 AM	SiCl4 MFC set to  0.000000
7/5/2012	9:59:55 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:59:55 AM	Tube furnace set to 0
7/5/2012	10:01:07 AM	Helium valve closed
7/5/2012	10:01:07 AM	H2 valve closed
7/5/2012	10:01:07 AM	BCl3 valve closed
7/5/2012	10:01:07 AM	PH3 valve closed
7/5/2012	10:01:07 AM	SiCl4 pre valve closed
7/5/2012	10:01:07 AM	SiCl4 post valve closed
7/5/2012	10:01:07 AM	Main Vac valve closed
7/5/2012	10:01:07 AM	Bypass valve closed
7/5/2012	10:01:07 AM	Bubbler valve closed
7/5/2012	10:01:07 AM	Helium MFC set to  0.000000
7/5/2012	10:01:07 AM	H2 MFC set to  0.000000
7/5/2012	10:01:07 AM	BCl3 MFC set to  0.000000
7/5/2012	10:01:07 AM	PH3 MFC set to  0.000000
7/5/2012	10:01:07 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:01:07 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:01:08 AM	Tube furnace set to 0
7/5/2012	10:01:09 AM	Run finished at 10:01 AM
7/5/2012	10:01:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	10:08:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	10:08:01 AM	Recipe started at 10:08 AM
7/5/2012	10:08:01 AM	Helium valve closed
7/5/2012	10:08:01 AM	H2 valve closed
7/5/2012	10:08:01 AM	BCl3 valve closed
7/5/2012	10:08:01 AM	PH3 valve closed
7/5/2012	10:08:01 AM	SiCl4 pre valve closed
7/5/2012	10:08:01 AM	SiCl4 post valve closed
7/5/2012	10:08:01 AM	Main Vac valve closed
7/5/2012	10:08:01 AM	Bubbler valve closed
7/5/2012	10:08:01 AM	Bypass valve opened
7/5/2012	10:08:01 AM	Helium MFC set to  0.000000
7/5/2012	10:08:01 AM	H2 MFC set to  0.000000
7/5/2012	10:08:01 AM	BCl3 MFC set to  0.000000
7/5/2012	10:08:01 AM	PH3 MFC set to  0.000000
7/5/2012	10:08:01 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:08:01 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:08:02 AM	Tube furnace set to 0
7/5/2012	10:09:10 AM	Helium valve closed
7/5/2012	10:09:10 AM	H2 valve closed
7/5/2012	10:09:10 AM	BCl3 valve closed
7/5/2012	10:09:10 AM	PH3 valve closed
7/5/2012	10:09:10 AM	SiCl4 pre valve closed
7/5/2012	10:09:10 AM	SiCl4 post valve closed
7/5/2012	10:09:10 AM	Main Vac valve closed
7/5/2012	10:09:10 AM	Bubbler valve closed
7/5/2012	10:09:10 AM	Bypass valve opened
7/5/2012	10:09:10 AM	Helium MFC set to  0.000000
7/5/2012	10:09:10 AM	H2 MFC set to  0.000000
7/5/2012	10:09:10 AM	BCl3 MFC set to  0.000000
7/5/2012	10:09:10 AM	PH3 MFC set to  0.000000
7/5/2012	10:09:10 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:09:10 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:09:10 AM	Tube furnace set to 0
7/5/2012	10:10:10 AM	Helium valve closed
7/5/2012	10:10:10 AM	H2 valve closed
7/5/2012	10:10:10 AM	BCl3 valve closed
7/5/2012	10:10:10 AM	PH3 valve closed
7/5/2012	10:10:10 AM	SiCl4 pre valve closed
7/5/2012	10:10:10 AM	SiCl4 post valve closed
7/5/2012	10:10:10 AM	Bypass valve closed
7/5/2012	10:10:10 AM	Bubbler valve closed
7/5/2012	10:10:10 AM	Main Vac valve opened
7/5/2012	10:10:10 AM	Helium MFC set to  0.000000
7/5/2012	10:10:10 AM	H2 MFC set to  0.000000
7/5/2012	10:10:10 AM	BCl3 MFC set to  0.000000
7/5/2012	10:10:10 AM	PH3 MFC set to  0.000000
7/5/2012	10:10:10 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:10:10 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:10:10 AM	Tube furnace set to 0
7/5/2012	10:10:11 AM	Run finished at 10:10 AM
7/5/2012	10:10:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	10:10:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	10:10:34 AM	Recipe started at 10:10 AM
7/5/2012	10:10:34 AM	Helium valve closed
7/5/2012	10:10:34 AM	H2 valve closed
7/5/2012	10:10:34 AM	BCl3 valve closed
7/5/2012	10:10:34 AM	PH3 valve closed
7/5/2012	10:10:34 AM	SiCl4 pre valve closed
7/5/2012	10:10:34 AM	SiCl4 post valve closed
7/5/2012	10:10:34 AM	Main Vac valve closed
7/5/2012	10:10:34 AM	Bypass valve closed
7/5/2012	10:10:34 AM	Bubbler valve closed
7/5/2012	10:10:34 AM	Helium MFC set to  0.000000
7/5/2012	10:10:34 AM	H2 MFC set to  0.000000
7/5/2012	10:10:34 AM	BCl3 MFC set to  0.000000
7/5/2012	10:10:34 AM	PH3 MFC set to  0.000000
7/5/2012	10:10:34 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:10:34 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:10:34 AM	Tube furnace set to 0
7/5/2012	10:10:37 AM	H2 valve closed
7/5/2012	10:10:37 AM	BCl3 valve closed
7/5/2012	10:10:37 AM	PH3 valve closed
7/5/2012	10:10:37 AM	SiCl4 pre valve closed
7/5/2012	10:10:37 AM	SiCl4 post valve closed
7/5/2012	10:10:37 AM	Main Vac valve closed
7/5/2012	10:10:37 AM	Bypass valve closed
7/5/2012	10:10:37 AM	Bubbler valve closed
7/5/2012	10:10:37 AM	Helium valve opened
7/5/2012	10:10:37 AM	Helium MFC set to  500.000000
7/5/2012	10:10:37 AM	H2 MFC set to  0.000000
7/5/2012	10:10:37 AM	BCl3 MFC set to  0.000000
7/5/2012	10:10:37 AM	PH3 MFC set to  0.000000
7/5/2012	10:10:37 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:10:37 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:10:37 AM	Tube furnace set to 0
7/5/2012	10:11:52 AM	Helium valve closed
7/5/2012	10:11:52 AM	H2 valve closed
7/5/2012	10:11:52 AM	BCl3 valve closed
7/5/2012	10:11:52 AM	PH3 valve closed
7/5/2012	10:11:52 AM	SiCl4 pre valve closed
7/5/2012	10:11:52 AM	SiCl4 post valve closed
7/5/2012	10:11:52 AM	Main Vac valve closed
7/5/2012	10:11:52 AM	Bypass valve closed
7/5/2012	10:11:52 AM	Bubbler valve closed
7/5/2012	10:11:52 AM	Helium MFC set to  0.000000
7/5/2012	10:11:52 AM	H2 MFC set to  0.000000
7/5/2012	10:11:52 AM	BCl3 MFC set to  0.000000
7/5/2012	10:11:52 AM	PH3 MFC set to  0.000000
7/5/2012	10:11:52 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:11:52 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:11:52 AM	Tube furnace set to 0
7/5/2012	10:11:53 AM	Run finished at 10:11 AM
7/5/2012	10:11:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	10:14:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	10:14:58 AM	Recipe started at 10:14 AM
7/5/2012	10:14:58 AM	Helium valve closed
7/5/2012	10:14:58 AM	H2 valve closed
7/5/2012	10:14:58 AM	BCl3 valve closed
7/5/2012	10:14:58 AM	PH3 valve closed
7/5/2012	10:14:58 AM	SiCl4 pre valve closed
7/5/2012	10:14:58 AM	SiCl4 post valve closed
7/5/2012	10:14:58 AM	Main Vac valve closed
7/5/2012	10:14:58 AM	Bubbler valve closed
7/5/2012	10:14:58 AM	Bypass valve opened
7/5/2012	10:14:58 AM	Helium MFC set to  0.000000
7/5/2012	10:14:58 AM	H2 MFC set to  0.000000
7/5/2012	10:14:58 AM	BCl3 MFC set to  0.000000
7/5/2012	10:14:58 AM	PH3 MFC set to  0.000000
7/5/2012	10:14:58 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:14:58 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:14:58 AM	Tube furnace set to 0
7/5/2012	10:16:09 AM	Helium valve closed
7/5/2012	10:16:09 AM	H2 valve closed
7/5/2012	10:16:09 AM	BCl3 valve closed
7/5/2012	10:16:09 AM	PH3 valve closed
7/5/2012	10:16:09 AM	SiCl4 pre valve closed
7/5/2012	10:16:09 AM	SiCl4 post valve closed
7/5/2012	10:16:09 AM	Main Vac valve closed
7/5/2012	10:16:09 AM	Bubbler valve closed
7/5/2012	10:16:09 AM	Bypass valve opened
7/5/2012	10:16:09 AM	Helium MFC set to  0.000000
7/5/2012	10:16:09 AM	H2 MFC set to  0.000000
7/5/2012	10:16:09 AM	BCl3 MFC set to  0.000000
7/5/2012	10:16:09 AM	PH3 MFC set to  0.000000
7/5/2012	10:16:09 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:16:09 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:16:09 AM	Tube furnace set to 0
7/5/2012	10:17:09 AM	Helium valve closed
7/5/2012	10:17:09 AM	H2 valve closed
7/5/2012	10:17:10 AM	BCl3 valve closed
7/5/2012	10:17:10 AM	PH3 valve closed
7/5/2012	10:17:10 AM	SiCl4 pre valve closed
7/5/2012	10:17:10 AM	SiCl4 post valve closed
7/5/2012	10:17:10 AM	Bypass valve closed
7/5/2012	10:17:10 AM	Bubbler valve closed
7/5/2012	10:17:10 AM	Main Vac valve opened
7/5/2012	10:17:10 AM	Helium MFC set to  0.000000
7/5/2012	10:17:10 AM	H2 MFC set to  0.000000
7/5/2012	10:17:10 AM	BCl3 MFC set to  0.000000
7/5/2012	10:17:10 AM	PH3 MFC set to  0.000000
7/5/2012	10:17:10 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:17:10 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:17:10 AM	Tube furnace set to 0
7/5/2012	10:17:11 AM	Run finished at 10:17 AM
7/5/2012	10:17:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	10:47:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/5/2012	10:47:55 AM	Recipe started at 10:47 AM
7/5/2012	10:47:55 AM	Helium valve closed
7/5/2012	10:47:56 AM	H2 valve closed
7/5/2012	10:47:56 AM	BCl3 valve closed
7/5/2012	10:47:56 AM	PH3 valve closed
7/5/2012	10:47:56 AM	SiCl4 pre valve closed
7/5/2012	10:47:56 AM	SiCl4 post valve closed
7/5/2012	10:47:56 AM	Main Vac valve closed
7/5/2012	10:47:56 AM	Bubbler valve closed
7/5/2012	10:47:56 AM	Bypass valve opened
7/5/2012	10:47:56 AM	Helium MFC set to  0.000000
7/5/2012	10:47:56 AM	H2 MFC set to  0.000000
7/5/2012	10:47:56 AM	BCl3 MFC set to  0.000000
7/5/2012	10:47:56 AM	PH3 MFC set to  0.000000
7/5/2012	10:47:56 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:47:56 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:47:56 AM	Tube furnace set to 0
7/5/2012	10:47:56 AM	Helium valve closed
7/5/2012	10:47:56 AM	H2 valve closed
7/5/2012	10:47:56 AM	BCl3 valve closed
7/5/2012	10:47:56 AM	PH3 valve closed
7/5/2012	10:47:56 AM	SiCl4 pre valve closed
7/5/2012	10:47:56 AM	SiCl4 post valve closed
7/5/2012	10:47:56 AM	Main Vac valve closed
7/5/2012	10:47:56 AM	Bubbler valve closed
7/5/2012	10:47:56 AM	Bypass valve opened
7/5/2012	10:47:56 AM	Helium MFC set to  0.000000
7/5/2012	10:47:56 AM	H2 MFC set to  0.000000
7/5/2012	10:47:56 AM	BCl3 MFC set to  0.000000
7/5/2012	10:47:56 AM	PH3 MFC set to  0.000000
7/5/2012	10:47:56 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:47:56 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:47:56 AM	Tube furnace set to 0
7/5/2012	10:47:57 AM	Helium valve closed
7/5/2012	10:47:57 AM	H2 valve closed
7/5/2012	10:47:57 AM	BCl3 valve closed
7/5/2012	10:47:57 AM	PH3 valve closed
7/5/2012	10:47:57 AM	SiCl4 pre valve closed
7/5/2012	10:47:57 AM	SiCl4 post valve closed
7/5/2012	10:47:57 AM	Bypass valve closed
7/5/2012	10:47:57 AM	Bubbler valve closed
7/5/2012	10:47:57 AM	Main Vac valve opened
7/5/2012	10:47:57 AM	Helium MFC set to  0.000000
7/5/2012	10:47:57 AM	H2 MFC set to  0.000000
7/5/2012	10:47:57 AM	BCl3 MFC set to  0.000000
7/5/2012	10:47:57 AM	PH3 MFC set to  0.000000
7/5/2012	10:47:57 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:47:57 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:47:57 AM	Tube furnace set to 0
7/5/2012	10:47:57 AM	H2 valve closed
7/5/2012	10:47:57 AM	BCl3 valve closed
7/5/2012	10:47:57 AM	PH3 valve closed
7/5/2012	10:47:57 AM	SiCl4 pre valve closed
7/5/2012	10:47:57 AM	SiCl4 post valve closed
7/5/2012	10:47:57 AM	Bypass valve closed
7/5/2012	10:47:57 AM	Bubbler valve closed
7/5/2012	10:47:57 AM	Helium valve opened
7/5/2012	10:47:57 AM	Main Vac valve opened
7/5/2012	10:47:57 AM	Helium MFC set to  20.000000
7/5/2012	10:47:57 AM	H2 MFC set to  0.000000
7/5/2012	10:47:58 AM	BCl3 MFC set to  0.000000
7/5/2012	10:47:58 AM	PH3 MFC set to  0.000000
7/5/2012	10:47:58 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:47:58 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:47:58 AM	Tube furnace set to 0
7/5/2012	10:48:28 AM	Helium valve closed
7/5/2012	10:48:28 AM	H2 valve closed
7/5/2012	10:48:28 AM	BCl3 valve closed
7/5/2012	10:48:28 AM	PH3 valve closed
7/5/2012	10:48:28 AM	SiCl4 pre valve closed
7/5/2012	10:48:28 AM	SiCl4 post valve closed
7/5/2012	10:48:28 AM	Bypass valve closed
7/5/2012	10:48:28 AM	Bubbler valve closed
7/5/2012	10:48:28 AM	Main Vac valve opened
7/5/2012	10:48:28 AM	Helium MFC set to  0.000000
7/5/2012	10:48:28 AM	H2 MFC set to  0.000000
7/5/2012	10:48:28 AM	BCl3 MFC set to  0.000000
7/5/2012	10:48:28 AM	PH3 MFC set to  0.000000
7/5/2012	10:48:28 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:48:28 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:48:28 AM	Tube furnace set to 0
7/5/2012	10:48:58 AM	H2 valve closed
7/5/2012	10:48:58 AM	BCl3 valve closed
7/5/2012	10:48:58 AM	PH3 valve closed
7/5/2012	10:48:58 AM	SiCl4 pre valve closed
7/5/2012	10:48:58 AM	SiCl4 post valve closed
7/5/2012	10:48:58 AM	Bypass valve closed
7/5/2012	10:48:58 AM	Bubbler valve closed
7/5/2012	10:48:58 AM	Helium valve opened
7/5/2012	10:48:58 AM	Main Vac valve opened
7/5/2012	10:48:58 AM	Helium MFC set to  20.000000
7/5/2012	10:48:58 AM	H2 MFC set to  0.000000
7/5/2012	10:48:58 AM	BCl3 MFC set to  0.000000
7/5/2012	10:48:58 AM	PH3 MFC set to  0.000000
7/5/2012	10:48:58 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:48:58 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:48:58 AM	Tube furnace set to 0
7/5/2012	10:49:28 AM	Helium valve closed
7/5/2012	10:49:28 AM	H2 valve closed
7/5/2012	10:49:28 AM	BCl3 valve closed
7/5/2012	10:49:28 AM	PH3 valve closed
7/5/2012	10:49:28 AM	SiCl4 pre valve closed
7/5/2012	10:49:28 AM	SiCl4 post valve closed
7/5/2012	10:49:28 AM	Bypass valve closed
7/5/2012	10:49:28 AM	Bubbler valve closed
7/5/2012	10:49:28 AM	Main Vac valve opened
7/5/2012	10:49:28 AM	Helium MFC set to  0.000000
7/5/2012	10:49:28 AM	H2 MFC set to  0.000000
7/5/2012	10:49:28 AM	BCl3 MFC set to  0.000000
7/5/2012	10:49:28 AM	PH3 MFC set to  0.000000
7/5/2012	10:49:28 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:49:28 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:49:28 AM	Tube furnace set to 0
7/5/2012	10:49:58 AM	H2 valve closed
7/5/2012	10:49:58 AM	BCl3 valve closed
7/5/2012	10:49:58 AM	PH3 valve closed
7/5/2012	10:49:58 AM	SiCl4 pre valve closed
7/5/2012	10:49:58 AM	SiCl4 post valve closed
7/5/2012	10:49:58 AM	Bypass valve closed
7/5/2012	10:49:58 AM	Bubbler valve closed
7/5/2012	10:49:58 AM	Helium valve opened
7/5/2012	10:49:58 AM	Main Vac valve opened
7/5/2012	10:49:58 AM	Helium MFC set to  20.000000
7/5/2012	10:49:58 AM	H2 MFC set to  0.000000
7/5/2012	10:49:58 AM	BCl3 MFC set to  0.000000
7/5/2012	10:49:58 AM	PH3 MFC set to  0.000000
7/5/2012	10:49:58 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:49:58 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:49:59 AM	Tube furnace set to 0
7/5/2012	10:50:29 AM	Helium valve closed
7/5/2012	10:50:29 AM	H2 valve closed
7/5/2012	10:50:29 AM	BCl3 valve closed
7/5/2012	10:50:29 AM	PH3 valve closed
7/5/2012	10:50:29 AM	SiCl4 pre valve closed
7/5/2012	10:50:29 AM	SiCl4 post valve closed
7/5/2012	10:50:29 AM	Bypass valve closed
7/5/2012	10:50:29 AM	Bubbler valve closed
7/5/2012	10:50:29 AM	Main Vac valve opened
7/5/2012	10:50:29 AM	Helium MFC set to  0.000000
7/5/2012	10:50:29 AM	H2 MFC set to  0.000000
7/5/2012	10:50:29 AM	BCl3 MFC set to  0.000000
7/5/2012	10:50:29 AM	PH3 MFC set to  0.000000
7/5/2012	10:50:29 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:50:29 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:50:29 AM	Tube furnace set to 0
7/5/2012	10:50:59 AM	H2 valve closed
7/5/2012	10:50:59 AM	BCl3 valve closed
7/5/2012	10:50:59 AM	PH3 valve closed
7/5/2012	10:50:59 AM	SiCl4 pre valve closed
7/5/2012	10:50:59 AM	SiCl4 post valve closed
7/5/2012	10:50:59 AM	Bypass valve closed
7/5/2012	10:50:59 AM	Bubbler valve closed
7/5/2012	10:50:59 AM	Helium valve opened
7/5/2012	10:50:59 AM	Main Vac valve opened
7/5/2012	10:50:59 AM	Helium MFC set to  20.000000
7/5/2012	10:50:59 AM	H2 MFC set to  0.000000
7/5/2012	10:50:59 AM	BCl3 MFC set to  0.000000
7/5/2012	10:50:59 AM	PH3 MFC set to  0.000000
7/5/2012	10:50:59 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:50:59 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:50:59 AM	Tube furnace set to 0
7/5/2012	10:51:29 AM	Helium valve closed
7/5/2012	10:51:29 AM	H2 valve closed
7/5/2012	10:51:29 AM	BCl3 valve closed
7/5/2012	10:51:29 AM	PH3 valve closed
7/5/2012	10:51:29 AM	SiCl4 pre valve closed
7/5/2012	10:51:29 AM	SiCl4 post valve closed
7/5/2012	10:51:29 AM	Bypass valve closed
7/5/2012	10:51:29 AM	Bubbler valve closed
7/5/2012	10:51:29 AM	Main Vac valve opened
7/5/2012	10:51:29 AM	Helium MFC set to  0.000000
7/5/2012	10:51:29 AM	H2 MFC set to  0.000000
7/5/2012	10:51:29 AM	BCl3 MFC set to  0.000000
7/5/2012	10:51:29 AM	PH3 MFC set to  0.000000
7/5/2012	10:51:29 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:51:29 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:51:29 AM	Tube furnace set to 0
7/5/2012	10:51:59 AM	H2 valve closed
7/5/2012	10:51:59 AM	BCl3 valve closed
7/5/2012	10:51:59 AM	PH3 valve closed
7/5/2012	10:51:59 AM	SiCl4 pre valve closed
7/5/2012	10:51:59 AM	SiCl4 post valve closed
7/5/2012	10:51:59 AM	Bypass valve closed
7/5/2012	10:51:59 AM	Bubbler valve closed
7/5/2012	10:51:59 AM	Helium valve opened
7/5/2012	10:51:59 AM	Main Vac valve opened
7/5/2012	10:51:59 AM	Helium MFC set to  20.000000
7/5/2012	10:51:59 AM	H2 MFC set to  0.000000
7/5/2012	10:51:59 AM	BCl3 MFC set to  0.000000
7/5/2012	10:51:59 AM	PH3 MFC set to  0.000000
7/5/2012	10:51:59 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:51:59 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:52:00 AM	Tube furnace set to 0
7/5/2012	10:52:30 AM	Helium valve closed
7/5/2012	10:52:30 AM	H2 valve closed
7/5/2012	10:52:30 AM	BCl3 valve closed
7/5/2012	10:52:30 AM	PH3 valve closed
7/5/2012	10:52:30 AM	SiCl4 pre valve closed
7/5/2012	10:52:30 AM	SiCl4 post valve closed
7/5/2012	10:52:30 AM	Bypass valve closed
7/5/2012	10:52:30 AM	Bubbler valve closed
7/5/2012	10:52:30 AM	Main Vac valve opened
7/5/2012	10:52:30 AM	Helium MFC set to  0.000000
7/5/2012	10:52:30 AM	H2 MFC set to  0.000000
7/5/2012	10:52:30 AM	BCl3 MFC set to  0.000000
7/5/2012	10:52:30 AM	PH3 MFC set to  0.000000
7/5/2012	10:52:30 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:52:30 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:52:30 AM	Tube furnace set to 0
7/5/2012	10:53:00 AM	H2 valve closed
7/5/2012	10:53:00 AM	BCl3 valve closed
7/5/2012	10:53:00 AM	PH3 valve closed
7/5/2012	10:53:00 AM	SiCl4 pre valve closed
7/5/2012	10:53:00 AM	SiCl4 post valve closed
7/5/2012	10:53:00 AM	Bypass valve closed
7/5/2012	10:53:00 AM	Bubbler valve closed
7/5/2012	10:53:00 AM	Helium valve opened
7/5/2012	10:53:00 AM	Main Vac valve opened
7/5/2012	10:53:00 AM	Helium MFC set to  20.000000
7/5/2012	10:53:00 AM	H2 MFC set to  0.000000
7/5/2012	10:53:00 AM	BCl3 MFC set to  0.000000
7/5/2012	10:53:00 AM	PH3 MFC set to  0.000000
7/5/2012	10:53:00 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:53:00 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:53:00 AM	Tube furnace set to 0
7/5/2012	10:53:30 AM	Helium valve closed
7/5/2012	10:53:30 AM	H2 valve closed
7/5/2012	10:53:30 AM	BCl3 valve closed
7/5/2012	10:53:30 AM	PH3 valve closed
7/5/2012	10:53:30 AM	SiCl4 pre valve closed
7/5/2012	10:53:30 AM	SiCl4 post valve closed
7/5/2012	10:53:30 AM	Bypass valve closed
7/5/2012	10:53:30 AM	Bubbler valve closed
7/5/2012	10:53:30 AM	Main Vac valve opened
7/5/2012	10:53:30 AM	Helium MFC set to  0.000000
7/5/2012	10:53:30 AM	H2 MFC set to  0.000000
7/5/2012	10:53:30 AM	BCl3 MFC set to  0.000000
7/5/2012	10:53:30 AM	PH3 MFC set to  0.000000
7/5/2012	10:53:30 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:53:30 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:53:30 AM	Tube furnace set to 0
7/5/2012	10:54:00 AM	H2 valve closed
7/5/2012	10:54:00 AM	BCl3 valve closed
7/5/2012	10:54:00 AM	PH3 valve closed
7/5/2012	10:54:00 AM	SiCl4 pre valve closed
7/5/2012	10:54:00 AM	SiCl4 post valve closed
7/5/2012	10:54:00 AM	Bypass valve closed
7/5/2012	10:54:00 AM	Bubbler valve closed
7/5/2012	10:54:00 AM	Helium valve opened
7/5/2012	10:54:00 AM	Main Vac valve opened
7/5/2012	10:54:00 AM	Helium MFC set to  20.000000
7/5/2012	10:54:00 AM	H2 MFC set to  0.000000
7/5/2012	10:54:00 AM	BCl3 MFC set to  0.000000
7/5/2012	10:54:00 AM	PH3 MFC set to  0.000000
7/5/2012	10:54:00 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:54:00 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:54:01 AM	Tube furnace set to 0
7/5/2012	10:54:31 AM	Helium valve closed
7/5/2012	10:54:31 AM	H2 valve closed
7/5/2012	10:54:31 AM	BCl3 valve closed
7/5/2012	10:54:31 AM	PH3 valve closed
7/5/2012	10:54:31 AM	SiCl4 pre valve closed
7/5/2012	10:54:31 AM	SiCl4 post valve closed
7/5/2012	10:54:31 AM	Bypass valve closed
7/5/2012	10:54:31 AM	Bubbler valve closed
7/5/2012	10:54:31 AM	Main Vac valve opened
7/5/2012	10:54:31 AM	Helium MFC set to  0.000000
7/5/2012	10:54:31 AM	H2 MFC set to  0.000000
7/5/2012	10:54:31 AM	BCl3 MFC set to  0.000000
7/5/2012	10:54:31 AM	PH3 MFC set to  0.000000
7/5/2012	10:54:31 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:54:31 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:54:31 AM	Tube furnace set to 0
7/5/2012	10:55:01 AM	H2 valve closed
7/5/2012	10:55:01 AM	BCl3 valve closed
7/5/2012	10:55:01 AM	PH3 valve closed
7/5/2012	10:55:01 AM	SiCl4 pre valve closed
7/5/2012	10:55:01 AM	SiCl4 post valve closed
7/5/2012	10:55:01 AM	Bypass valve closed
7/5/2012	10:55:01 AM	Bubbler valve closed
7/5/2012	10:55:01 AM	Helium valve opened
7/5/2012	10:55:01 AM	Main Vac valve opened
7/5/2012	10:55:01 AM	Helium MFC set to  20.000000
7/5/2012	10:55:01 AM	H2 MFC set to  0.000000
7/5/2012	10:55:01 AM	BCl3 MFC set to  0.000000
7/5/2012	10:55:01 AM	PH3 MFC set to  0.000000
7/5/2012	10:55:01 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:55:01 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:55:01 AM	Tube furnace set to 0
7/5/2012	10:55:31 AM	Helium valve closed
7/5/2012	10:55:31 AM	H2 valve closed
7/5/2012	10:55:31 AM	BCl3 valve closed
7/5/2012	10:55:31 AM	PH3 valve closed
7/5/2012	10:55:31 AM	SiCl4 pre valve closed
7/5/2012	10:55:31 AM	SiCl4 post valve closed
7/5/2012	10:55:31 AM	Bypass valve closed
7/5/2012	10:55:31 AM	Bubbler valve closed
7/5/2012	10:55:31 AM	Main Vac valve opened
7/5/2012	10:55:31 AM	Helium MFC set to  0.000000
7/5/2012	10:55:31 AM	H2 MFC set to  0.000000
7/5/2012	10:55:31 AM	BCl3 MFC set to  0.000000
7/5/2012	10:55:31 AM	PH3 MFC set to  0.000000
7/5/2012	10:55:31 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:55:31 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:55:31 AM	Tube furnace set to 0
7/5/2012	10:56:01 AM	H2 valve closed
7/5/2012	10:56:01 AM	BCl3 valve closed
7/5/2012	10:56:01 AM	PH3 valve closed
7/5/2012	10:56:01 AM	SiCl4 pre valve closed
7/5/2012	10:56:01 AM	SiCl4 post valve closed
7/5/2012	10:56:01 AM	Bypass valve closed
7/5/2012	10:56:01 AM	Bubbler valve closed
7/5/2012	10:56:01 AM	Helium valve opened
7/5/2012	10:56:01 AM	Main Vac valve opened
7/5/2012	10:56:01 AM	Helium MFC set to  20.000000
7/5/2012	10:56:01 AM	H2 MFC set to  0.000000
7/5/2012	10:56:01 AM	BCl3 MFC set to  0.000000
7/5/2012	10:56:01 AM	PH3 MFC set to  0.000000
7/5/2012	10:56:01 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:56:01 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:56:01 AM	Tube furnace set to 0
7/5/2012	10:56:31 AM	Helium valve closed
7/5/2012	10:56:31 AM	H2 valve closed
7/5/2012	10:56:31 AM	BCl3 valve closed
7/5/2012	10:56:31 AM	PH3 valve closed
7/5/2012	10:56:31 AM	SiCl4 pre valve closed
7/5/2012	10:56:31 AM	SiCl4 post valve closed
7/5/2012	10:56:31 AM	Bypass valve closed
7/5/2012	10:56:32 AM	Bubbler valve closed
7/5/2012	10:56:32 AM	Main Vac valve opened
7/5/2012	10:56:32 AM	Helium MFC set to  0.000000
7/5/2012	10:56:32 AM	H2 MFC set to  0.000000
7/5/2012	10:56:32 AM	BCl3 MFC set to  0.000000
7/5/2012	10:56:32 AM	PH3 MFC set to  0.000000
7/5/2012	10:56:32 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:56:32 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:56:32 AM	Tube furnace set to 0
7/5/2012	10:57:02 AM	H2 valve closed
7/5/2012	10:57:02 AM	BCl3 valve closed
7/5/2012	10:57:02 AM	PH3 valve closed
7/5/2012	10:57:02 AM	SiCl4 pre valve closed
7/5/2012	10:57:02 AM	SiCl4 post valve closed
7/5/2012	10:57:02 AM	Bypass valve closed
7/5/2012	10:57:02 AM	Bubbler valve closed
7/5/2012	10:57:02 AM	Helium valve opened
7/5/2012	10:57:02 AM	Main Vac valve opened
7/5/2012	10:57:02 AM	Helium MFC set to  20.000000
7/5/2012	10:57:02 AM	H2 MFC set to  0.000000
7/5/2012	10:57:02 AM	BCl3 MFC set to  0.000000
7/5/2012	10:57:02 AM	PH3 MFC set to  0.000000
7/5/2012	10:57:02 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:57:02 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:57:02 AM	Tube furnace set to 0
7/5/2012	10:57:32 AM	Helium valve closed
7/5/2012	10:57:32 AM	H2 valve closed
7/5/2012	10:57:32 AM	BCl3 valve closed
7/5/2012	10:57:32 AM	PH3 valve closed
7/5/2012	10:57:32 AM	SiCl4 pre valve closed
7/5/2012	10:57:32 AM	SiCl4 post valve closed
7/5/2012	10:57:32 AM	Bypass valve closed
7/5/2012	10:57:32 AM	Bubbler valve closed
7/5/2012	10:57:32 AM	Main Vac valve opened
7/5/2012	10:57:32 AM	Helium MFC set to  0.000000
7/5/2012	10:57:32 AM	H2 MFC set to  0.000000
7/5/2012	10:57:32 AM	BCl3 MFC set to  0.000000
7/5/2012	10:57:32 AM	PH3 MFC set to  0.000000
7/5/2012	10:57:32 AM	SiCl4 MFC set to  0.000000
7/5/2012	10:57:32 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:57:32 AM	Tube furnace set to 0
7/5/2012	10:57:33 AM	Run finished at 10:57 AM
7/5/2012	10:57:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/5/2012	10:59:38 AM	Main Vac valve closed
7/5/2012	10:59:53 AM	Main Vac valve opened
7/5/2012	11:01:30 AM	Recipe started at 11:01 AM
7/5/2012	11:01:30 AM	Helium valve closed
7/5/2012	11:01:30 AM	H2 valve closed
7/5/2012	11:01:30 AM	BCl3 valve closed
7/5/2012	11:01:30 AM	PH3 valve closed
7/5/2012	11:01:30 AM	SiCl4 pre valve closed
7/5/2012	11:01:30 AM	SiCl4 post valve closed
7/5/2012	11:01:30 AM	Main Vac valve closed
7/5/2012	11:01:30 AM	Bypass valve closed
7/5/2012	11:01:30 AM	Bubbler valve closed
7/5/2012	11:01:30 AM	Helium MFC set to  0.000000
7/5/2012	11:01:30 AM	H2 MFC set to  0.000000
7/5/2012	11:01:30 AM	BCl3 MFC set to  0.000000
7/5/2012	11:01:30 AM	PH3 MFC set to  0.000000
7/5/2012	11:01:30 AM	SiCl4 MFC set to  0.000000
7/5/2012	11:01:30 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:01:30 AM	Tube furnace set to 0
7/5/2012	11:01:33 AM	Helium valve closed
7/5/2012	11:01:33 AM	BCl3 valve closed
7/5/2012	11:01:33 AM	PH3 valve closed
7/5/2012	11:01:33 AM	SiCl4 pre valve closed
7/5/2012	11:01:33 AM	SiCl4 post valve closed
7/5/2012	11:01:33 AM	Main Vac valve closed
7/5/2012	11:01:33 AM	Bypass valve closed
7/5/2012	11:01:33 AM	Bubbler valve closed
7/5/2012	11:01:33 AM	H2 valve opened
7/5/2012	11:01:33 AM	Helium MFC set to  0.000000
7/5/2012	11:01:33 AM	H2 MFC set to  500.000000
7/5/2012	11:01:33 AM	BCl3 MFC set to  0.000000
7/5/2012	11:01:33 AM	PH3 MFC set to  0.000000
7/5/2012	11:01:33 AM	SiCl4 MFC set to  0.000000
7/5/2012	11:01:33 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:01:34 AM	Tube furnace set to 0
7/5/2012	11:02:51 AM	Helium valve closed
7/5/2012	11:02:51 AM	BCl3 valve closed
7/5/2012	11:02:51 AM	PH3 valve closed
7/5/2012	11:02:51 AM	SiCl4 pre valve closed
7/5/2012	11:02:51 AM	SiCl4 post valve closed
7/5/2012	11:02:51 AM	Main Vac valve closed
7/5/2012	11:02:51 AM	Bypass valve closed
7/5/2012	11:02:51 AM	H2 valve opened
7/5/2012	11:02:51 AM	Bubbler valve opened
7/5/2012	11:02:51 AM	Helium MFC set to  0.000000
7/5/2012	11:02:51 AM	H2 MFC set to  500.000000
7/5/2012	11:02:51 AM	BCl3 MFC set to  0.000000
7/5/2012	11:02:51 AM	PH3 MFC set to  0.000000
7/5/2012	11:02:51 AM	SiCl4 MFC set to  0.000000
7/5/2012	11:02:51 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:02:51 AM	Tube furnace set to 0
7/5/2012	11:02:52 AM	Helium valve closed
7/5/2012	11:02:52 AM	BCl3 valve closed
7/5/2012	11:02:52 AM	PH3 valve closed
7/5/2012	11:02:52 AM	SiCl4 pre valve closed
7/5/2012	11:02:52 AM	SiCl4 post valve closed
7/5/2012	11:02:52 AM	Main Vac valve closed
7/5/2012	11:02:52 AM	Bypass valve closed
7/5/2012	11:02:52 AM	H2 valve opened
7/5/2012	11:02:52 AM	Bubbler valve opened
7/5/2012	11:02:52 AM	Helium MFC set to  0.000000
7/5/2012	11:02:52 AM	H2 MFC set to  500.000000
7/5/2012	11:02:52 AM	BCl3 MFC set to  0.000000
7/5/2012	11:02:52 AM	PH3 MFC set to  0.000000
7/5/2012	11:02:52 AM	SiCl4 MFC set to  0.000000
7/5/2012	11:02:52 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:02:52 AM	Tube furnace set to 950
7/5/2012	11:22:52 AM	Helium valve closed
7/5/2012	11:22:52 AM	PH3 valve closed
7/5/2012	11:22:52 AM	Main Vac valve closed
7/5/2012	11:22:52 AM	Bypass valve closed
7/5/2012	11:22:52 AM	H2 valve opened
7/5/2012	11:22:52 AM	BCl3 valve opened
7/5/2012	11:22:52 AM	SiCl4 pre valve opened
7/5/2012	11:22:52 AM	SiCl4 post valve opened
7/5/2012	11:22:52 AM	Bubbler valve opened
7/5/2012	11:22:52 AM	Helium MFC set to  0.000000
7/5/2012	11:22:52 AM	H2 MFC set to  500.000000
7/5/2012	11:22:52 AM	BCl3 MFC set to  1.000000
7/5/2012	11:22:52 AM	PH3 MFC set to  0.000000
7/5/2012	11:22:52 AM	SiCl4 MFC set to  25.000000
7/5/2012	11:22:52 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:22:52 AM	Tube furnace set to 950
7/5/2012	11:42:53 AM	Helium valve closed
7/5/2012	11:42:53 AM	BCl3 valve closed
7/5/2012	11:42:53 AM	PH3 valve closed
7/5/2012	11:42:53 AM	SiCl4 pre valve closed
7/5/2012	11:42:53 AM	SiCl4 post valve closed
7/5/2012	11:42:53 AM	Main Vac valve closed
7/5/2012	11:42:53 AM	Bypass valve closed
7/5/2012	11:42:53 AM	H2 valve opened
7/5/2012	11:42:53 AM	Bubbler valve opened
7/5/2012	11:42:53 AM	Helium MFC set to  0.000000
7/5/2012	11:42:53 AM	H2 MFC set to  500.000000
7/5/2012	11:42:53 AM	BCl3 MFC set to  0.000000
7/5/2012	11:42:53 AM	PH3 MFC set to  0.000000
7/5/2012	11:42:53 AM	SiCl4 MFC set to  0.000000
7/5/2012	11:42:53 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:42:53 AM	Tube furnace set to 750
7/5/2012	11:47:53 AM	H2 valve closed
7/5/2012	11:47:53 AM	BCl3 valve closed
7/5/2012	11:47:53 AM	PH3 valve closed
7/5/2012	11:47:53 AM	SiCl4 pre valve closed
7/5/2012	11:47:53 AM	SiCl4 post valve closed
7/5/2012	11:47:53 AM	Main Vac valve closed
7/5/2012	11:47:53 AM	Bypass valve closed
7/5/2012	11:47:53 AM	Helium valve opened
7/5/2012	11:47:53 AM	Bubbler valve opened
7/5/2012	11:47:53 AM	Helium MFC set to  500.000000
7/5/2012	11:47:53 AM	H2 MFC set to  0.000000
7/5/2012	11:47:53 AM	BCl3 MFC set to  0.000000
7/5/2012	11:47:53 AM	PH3 MFC set to  0.000000
7/5/2012	11:47:53 AM	SiCl4 MFC set to  0.000000
7/5/2012	11:47:53 AM	Bypass solenoid MFC set to  0.000000
7/5/2012	11:47:53 AM	Tube furnace set to 0
7/5/2012	12:05:34 PM	Run aborted at 12:05 PM
7/5/2012	12:05:34 PM	Helium valve closed
7/5/2012	12:05:34 PM	H2 valve closed
7/5/2012	12:05:34 PM	BCl3 valve closed
7/5/2012	12:05:34 PM	PH3 valve closed
7/5/2012	12:05:34 PM	SiCl4 pre valve closed
7/5/2012	12:05:34 PM	SiCl4 post valve closed
7/5/2012	12:05:34 PM	Bypass valve closed
7/5/2012	12:05:34 PM	Main Vac valve closed
7/5/2012	12:05:34 PM	Bubbler valve closed
7/5/2012	12:05:34 PM	Helium MFC set to  0.000000
7/5/2012	12:05:34 PM	H2 MFC set to  0.000000
7/5/2012	12:05:35 PM	BCl3 MFC set to  0.000000
7/5/2012	12:05:35 PM	PH3 MFC set to  0.000000
7/5/2012	12:05:35 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:05:35 PM	Tube furnace set to 0
7/5/2012	12:05:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	12:05:37 PM	Recipe started at 12:05 PM
7/5/2012	12:05:37 PM	Helium valve closed
7/5/2012	12:05:37 PM	H2 valve closed
7/5/2012	12:05:37 PM	BCl3 valve closed
7/5/2012	12:05:37 PM	PH3 valve closed
7/5/2012	12:05:37 PM	SiCl4 pre valve closed
7/5/2012	12:05:37 PM	SiCl4 post valve closed
7/5/2012	12:05:37 PM	Main Vac valve closed
7/5/2012	12:05:37 PM	Bypass valve closed
7/5/2012	12:05:37 PM	Bubbler valve closed
7/5/2012	12:05:37 PM	Helium MFC set to  0.000000
7/5/2012	12:05:37 PM	H2 MFC set to  0.000000
7/5/2012	12:05:37 PM	BCl3 MFC set to  0.000000
7/5/2012	12:05:37 PM	PH3 MFC set to  0.000000
7/5/2012	12:05:37 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:05:37 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:05:37 PM	Tube furnace set to 0
7/5/2012	12:05:40 PM	H2 valve closed
7/5/2012	12:05:40 PM	BCl3 valve closed
7/5/2012	12:05:40 PM	PH3 valve closed
7/5/2012	12:05:40 PM	SiCl4 pre valve closed
7/5/2012	12:05:40 PM	SiCl4 post valve closed
7/5/2012	12:05:40 PM	Main Vac valve closed
7/5/2012	12:05:40 PM	Bypass valve closed
7/5/2012	12:05:40 PM	Bubbler valve closed
7/5/2012	12:05:40 PM	Helium valve opened
7/5/2012	12:05:40 PM	Helium MFC set to  500.000000
7/5/2012	12:05:40 PM	H2 MFC set to  0.000000
7/5/2012	12:05:40 PM	BCl3 MFC set to  0.000000
7/5/2012	12:05:40 PM	PH3 MFC set to  0.000000
7/5/2012	12:05:40 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:05:40 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:05:41 PM	Tube furnace set to 0
7/5/2012	12:05:41 PM	Helium valve closed
7/5/2012	12:05:41 PM	H2 valve closed
7/5/2012	12:05:41 PM	BCl3 valve closed
7/5/2012	12:05:41 PM	PH3 valve closed
7/5/2012	12:05:41 PM	SiCl4 pre valve closed
7/5/2012	12:05:41 PM	SiCl4 post valve closed
7/5/2012	12:05:41 PM	Main Vac valve closed
7/5/2012	12:05:41 PM	Bypass valve closed
7/5/2012	12:05:41 PM	Bubbler valve closed
7/5/2012	12:05:41 PM	Helium MFC set to  0.000000
7/5/2012	12:05:41 PM	H2 MFC set to  0.000000
7/5/2012	12:05:41 PM	BCl3 MFC set to  0.000000
7/5/2012	12:05:41 PM	PH3 MFC set to  0.000000
7/5/2012	12:05:41 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:05:41 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:05:41 PM	Tube furnace set to 0
7/5/2012	12:05:42 PM	Run finished at 12:05 PM
7/5/2012	12:05:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	12:12:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	12:12:41 PM	Recipe started at 12:12 PM
7/5/2012	12:12:41 PM	Helium valve closed
7/5/2012	12:12:41 PM	H2 valve closed
7/5/2012	12:12:41 PM	BCl3 valve closed
7/5/2012	12:12:41 PM	PH3 valve closed
7/5/2012	12:12:41 PM	SiCl4 pre valve closed
7/5/2012	12:12:41 PM	SiCl4 post valve closed
7/5/2012	12:12:41 PM	Main Vac valve closed
7/5/2012	12:12:41 PM	Bubbler valve closed
7/5/2012	12:12:41 PM	Bypass valve opened
7/5/2012	12:12:41 PM	Helium MFC set to  0.000000
7/5/2012	12:12:41 PM	H2 MFC set to  0.000000
7/5/2012	12:12:41 PM	BCl3 MFC set to  0.000000
7/5/2012	12:12:41 PM	PH3 MFC set to  0.000000
7/5/2012	12:12:41 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:12:41 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:12:41 PM	Tube furnace set to 0
7/5/2012	12:13:54 PM	Helium valve closed
7/5/2012	12:13:54 PM	H2 valve closed
7/5/2012	12:13:54 PM	BCl3 valve closed
7/5/2012	12:13:54 PM	PH3 valve closed
7/5/2012	12:13:54 PM	SiCl4 pre valve closed
7/5/2012	12:13:54 PM	SiCl4 post valve closed
7/5/2012	12:13:54 PM	Main Vac valve closed
7/5/2012	12:13:54 PM	Bubbler valve closed
7/5/2012	12:13:54 PM	Bypass valve opened
7/5/2012	12:13:54 PM	Helium MFC set to  0.000000
7/5/2012	12:13:54 PM	H2 MFC set to  0.000000
7/5/2012	12:13:54 PM	BCl3 MFC set to  0.000000
7/5/2012	12:13:54 PM	PH3 MFC set to  0.000000
7/5/2012	12:13:54 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:13:54 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:13:54 PM	Tube furnace set to 0
7/5/2012	12:14:54 PM	Helium valve closed
7/5/2012	12:14:54 PM	H2 valve closed
7/5/2012	12:14:54 PM	BCl3 valve closed
7/5/2012	12:14:54 PM	PH3 valve closed
7/5/2012	12:14:54 PM	SiCl4 pre valve closed
7/5/2012	12:14:54 PM	SiCl4 post valve closed
7/5/2012	12:14:54 PM	Bypass valve closed
7/5/2012	12:14:54 PM	Bubbler valve closed
7/5/2012	12:14:54 PM	Main Vac valve opened
7/5/2012	12:14:54 PM	Helium MFC set to  0.000000
7/5/2012	12:14:54 PM	H2 MFC set to  0.000000
7/5/2012	12:14:54 PM	BCl3 MFC set to  0.000000
7/5/2012	12:14:54 PM	PH3 MFC set to  0.000000
7/5/2012	12:14:54 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:14:54 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:14:54 PM	Tube furnace set to 0
7/5/2012	12:14:55 PM	Run finished at 12:14 PM
7/5/2012	12:14:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	12:36:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/5/2012	12:37:05 PM	Recipe started at 12:36 PM
7/5/2012	12:37:05 PM	Helium valve closed
7/5/2012	12:37:05 PM	H2 valve closed
7/5/2012	12:37:05 PM	BCl3 valve closed
7/5/2012	12:37:05 PM	PH3 valve closed
7/5/2012	12:37:05 PM	SiCl4 pre valve closed
7/5/2012	12:37:05 PM	SiCl4 post valve closed
7/5/2012	12:37:05 PM	Main Vac valve closed
7/5/2012	12:37:05 PM	Bubbler valve closed
7/5/2012	12:37:05 PM	Bypass valve opened
7/5/2012	12:37:05 PM	Helium MFC set to  0.000000
7/5/2012	12:37:05 PM	H2 MFC set to  0.000000
7/5/2012	12:37:05 PM	BCl3 MFC set to  0.000000
7/5/2012	12:37:05 PM	PH3 MFC set to  0.000000
7/5/2012	12:37:05 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:37:05 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:37:05 PM	Tube furnace set to 0
7/5/2012	12:37:05 PM	Helium valve closed
7/5/2012	12:37:05 PM	H2 valve closed
7/5/2012	12:37:05 PM	BCl3 valve closed
7/5/2012	12:37:05 PM	PH3 valve closed
7/5/2012	12:37:05 PM	SiCl4 pre valve closed
7/5/2012	12:37:05 PM	SiCl4 post valve closed
7/5/2012	12:37:05 PM	Main Vac valve closed
7/5/2012	12:37:05 PM	Bubbler valve closed
7/5/2012	12:37:05 PM	Bypass valve opened
7/5/2012	12:37:05 PM	Helium MFC set to  0.000000
7/5/2012	12:37:05 PM	H2 MFC set to  0.000000
7/5/2012	12:37:05 PM	BCl3 MFC set to  0.000000
7/5/2012	12:37:05 PM	PH3 MFC set to  0.000000
7/5/2012	12:37:05 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:37:05 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:37:06 PM	Tube furnace set to 0
7/5/2012	12:37:06 PM	Helium valve closed
7/5/2012	12:37:06 PM	H2 valve closed
7/5/2012	12:37:06 PM	BCl3 valve closed
7/5/2012	12:37:06 PM	PH3 valve closed
7/5/2012	12:37:06 PM	SiCl4 pre valve closed
7/5/2012	12:37:06 PM	SiCl4 post valve closed
7/5/2012	12:37:06 PM	Bypass valve closed
7/5/2012	12:37:06 PM	Bubbler valve closed
7/5/2012	12:37:06 PM	Main Vac valve opened
7/5/2012	12:37:06 PM	Helium MFC set to  0.000000
7/5/2012	12:37:06 PM	H2 MFC set to  0.000000
7/5/2012	12:37:06 PM	BCl3 MFC set to  0.000000
7/5/2012	12:37:06 PM	PH3 MFC set to  0.000000
7/5/2012	12:37:06 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:37:06 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:37:06 PM	Tube furnace set to 0
7/5/2012	12:37:07 PM	H2 valve closed
7/5/2012	12:37:07 PM	BCl3 valve closed
7/5/2012	12:37:07 PM	PH3 valve closed
7/5/2012	12:37:07 PM	SiCl4 pre valve closed
7/5/2012	12:37:07 PM	SiCl4 post valve closed
7/5/2012	12:37:07 PM	Bypass valve closed
7/5/2012	12:37:07 PM	Bubbler valve closed
7/5/2012	12:37:07 PM	Helium valve opened
7/5/2012	12:37:07 PM	Main Vac valve opened
7/5/2012	12:37:07 PM	Helium MFC set to  20.000000
7/5/2012	12:37:07 PM	H2 MFC set to  0.000000
7/5/2012	12:37:07 PM	BCl3 MFC set to  0.000000
7/5/2012	12:37:07 PM	PH3 MFC set to  0.000000
7/5/2012	12:37:07 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:37:07 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:37:07 PM	Tube furnace set to 0
7/5/2012	12:37:38 PM	Helium valve closed
7/5/2012	12:37:38 PM	H2 valve closed
7/5/2012	12:37:38 PM	BCl3 valve closed
7/5/2012	12:37:38 PM	PH3 valve closed
7/5/2012	12:37:38 PM	SiCl4 pre valve closed
7/5/2012	12:37:38 PM	SiCl4 post valve closed
7/5/2012	12:37:38 PM	Bypass valve closed
7/5/2012	12:37:38 PM	Bubbler valve closed
7/5/2012	12:37:38 PM	Main Vac valve opened
7/5/2012	12:37:38 PM	Helium MFC set to  0.000000
7/5/2012	12:37:38 PM	H2 MFC set to  0.000000
7/5/2012	12:37:38 PM	BCl3 MFC set to  0.000000
7/5/2012	12:37:38 PM	PH3 MFC set to  0.000000
7/5/2012	12:37:38 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:37:38 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:37:38 PM	Tube furnace set to 0
7/5/2012	12:38:08 PM	H2 valve closed
7/5/2012	12:38:08 PM	BCl3 valve closed
7/5/2012	12:38:08 PM	PH3 valve closed
7/5/2012	12:38:08 PM	SiCl4 pre valve closed
7/5/2012	12:38:08 PM	SiCl4 post valve closed
7/5/2012	12:38:08 PM	Bypass valve closed
7/5/2012	12:38:08 PM	Bubbler valve closed
7/5/2012	12:38:08 PM	Helium valve opened
7/5/2012	12:38:08 PM	Main Vac valve opened
7/5/2012	12:38:08 PM	Helium MFC set to  20.000000
7/5/2012	12:38:08 PM	H2 MFC set to  0.000000
7/5/2012	12:38:08 PM	BCl3 MFC set to  0.000000
7/5/2012	12:38:08 PM	PH3 MFC set to  0.000000
7/5/2012	12:38:08 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:38:08 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:38:08 PM	Tube furnace set to 0
7/5/2012	12:38:38 PM	Helium valve closed
7/5/2012	12:38:38 PM	H2 valve closed
7/5/2012	12:38:38 PM	BCl3 valve closed
7/5/2012	12:38:38 PM	PH3 valve closed
7/5/2012	12:38:38 PM	SiCl4 pre valve closed
7/5/2012	12:38:38 PM	SiCl4 post valve closed
7/5/2012	12:38:38 PM	Bypass valve closed
7/5/2012	12:38:38 PM	Bubbler valve closed
7/5/2012	12:38:38 PM	Main Vac valve opened
7/5/2012	12:38:38 PM	Helium MFC set to  0.000000
7/5/2012	12:38:38 PM	H2 MFC set to  0.000000
7/5/2012	12:38:38 PM	BCl3 MFC set to  0.000000
7/5/2012	12:38:38 PM	PH3 MFC set to  0.000000
7/5/2012	12:38:38 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:38:38 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:38:38 PM	Tube furnace set to 0
7/5/2012	12:39:08 PM	H2 valve closed
7/5/2012	12:39:08 PM	BCl3 valve closed
7/5/2012	12:39:08 PM	PH3 valve closed
7/5/2012	12:39:08 PM	SiCl4 pre valve closed
7/5/2012	12:39:08 PM	SiCl4 post valve closed
7/5/2012	12:39:08 PM	Bypass valve closed
7/5/2012	12:39:08 PM	Bubbler valve closed
7/5/2012	12:39:08 PM	Helium valve opened
7/5/2012	12:39:08 PM	Main Vac valve opened
7/5/2012	12:39:08 PM	Helium MFC set to  20.000000
7/5/2012	12:39:08 PM	H2 MFC set to  0.000000
7/5/2012	12:39:08 PM	BCl3 MFC set to  0.000000
7/5/2012	12:39:08 PM	PH3 MFC set to  0.000000
7/5/2012	12:39:08 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:39:08 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:39:08 PM	Tube furnace set to 0
7/5/2012	12:39:38 PM	Helium valve closed
7/5/2012	12:39:38 PM	H2 valve closed
7/5/2012	12:39:38 PM	BCl3 valve closed
7/5/2012	12:39:38 PM	PH3 valve closed
7/5/2012	12:39:38 PM	SiCl4 pre valve closed
7/5/2012	12:39:38 PM	SiCl4 post valve closed
7/5/2012	12:39:38 PM	Bypass valve closed
7/5/2012	12:39:38 PM	Bubbler valve closed
7/5/2012	12:39:38 PM	Main Vac valve opened
7/5/2012	12:39:38 PM	Helium MFC set to  0.000000
7/5/2012	12:39:38 PM	H2 MFC set to  0.000000
7/5/2012	12:39:38 PM	BCl3 MFC set to  0.000000
7/5/2012	12:39:38 PM	PH3 MFC set to  0.000000
7/5/2012	12:39:39 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:39:39 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:39:39 PM	Tube furnace set to 0
7/5/2012	12:40:09 PM	H2 valve closed
7/5/2012	12:40:09 PM	BCl3 valve closed
7/5/2012	12:40:09 PM	PH3 valve closed
7/5/2012	12:40:09 PM	SiCl4 pre valve closed
7/5/2012	12:40:09 PM	SiCl4 post valve closed
7/5/2012	12:40:09 PM	Bypass valve closed
7/5/2012	12:40:09 PM	Bubbler valve closed
7/5/2012	12:40:09 PM	Helium valve opened
7/5/2012	12:40:09 PM	Main Vac valve opened
7/5/2012	12:40:09 PM	Helium MFC set to  20.000000
7/5/2012	12:40:09 PM	H2 MFC set to  0.000000
7/5/2012	12:40:09 PM	BCl3 MFC set to  0.000000
7/5/2012	12:40:09 PM	PH3 MFC set to  0.000000
7/5/2012	12:40:09 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:40:09 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:40:09 PM	Tube furnace set to 0
7/5/2012	12:40:39 PM	Helium valve closed
7/5/2012	12:40:39 PM	H2 valve closed
7/5/2012	12:40:39 PM	BCl3 valve closed
7/5/2012	12:40:39 PM	PH3 valve closed
7/5/2012	12:40:39 PM	SiCl4 pre valve closed
7/5/2012	12:40:39 PM	SiCl4 post valve closed
7/5/2012	12:40:39 PM	Bypass valve closed
7/5/2012	12:40:39 PM	Bubbler valve closed
7/5/2012	12:40:39 PM	Main Vac valve opened
7/5/2012	12:40:39 PM	Helium MFC set to  0.000000
7/5/2012	12:40:39 PM	H2 MFC set to  0.000000
7/5/2012	12:40:39 PM	BCl3 MFC set to  0.000000
7/5/2012	12:40:39 PM	PH3 MFC set to  0.000000
7/5/2012	12:40:39 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:40:39 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:40:39 PM	Tube furnace set to 0
7/5/2012	12:41:09 PM	H2 valve closed
7/5/2012	12:41:09 PM	BCl3 valve closed
7/5/2012	12:41:09 PM	PH3 valve closed
7/5/2012	12:41:09 PM	SiCl4 pre valve closed
7/5/2012	12:41:09 PM	SiCl4 post valve closed
7/5/2012	12:41:09 PM	Bypass valve closed
7/5/2012	12:41:09 PM	Bubbler valve closed
7/5/2012	12:41:09 PM	Helium valve opened
7/5/2012	12:41:09 PM	Main Vac valve opened
7/5/2012	12:41:09 PM	Helium MFC set to  20.000000
7/5/2012	12:41:09 PM	H2 MFC set to  0.000000
7/5/2012	12:41:09 PM	BCl3 MFC set to  0.000000
7/5/2012	12:41:09 PM	PH3 MFC set to  0.000000
7/5/2012	12:41:09 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:41:09 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:41:09 PM	Tube furnace set to 0
7/5/2012	12:41:39 PM	Helium valve closed
7/5/2012	12:41:39 PM	H2 valve closed
7/5/2012	12:41:39 PM	BCl3 valve closed
7/5/2012	12:41:39 PM	PH3 valve closed
7/5/2012	12:41:39 PM	SiCl4 pre valve closed
7/5/2012	12:41:39 PM	SiCl4 post valve closed
7/5/2012	12:41:39 PM	Bypass valve closed
7/5/2012	12:41:39 PM	Bubbler valve closed
7/5/2012	12:41:39 PM	Main Vac valve opened
7/5/2012	12:41:39 PM	Helium MFC set to  0.000000
7/5/2012	12:41:39 PM	H2 MFC set to  0.000000
7/5/2012	12:41:39 PM	BCl3 MFC set to  0.000000
7/5/2012	12:41:39 PM	PH3 MFC set to  0.000000
7/5/2012	12:41:39 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:41:39 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:41:40 PM	Tube furnace set to 0
7/5/2012	12:42:10 PM	H2 valve closed
7/5/2012	12:42:10 PM	BCl3 valve closed
7/5/2012	12:42:10 PM	PH3 valve closed
7/5/2012	12:42:10 PM	SiCl4 pre valve closed
7/5/2012	12:42:10 PM	SiCl4 post valve closed
7/5/2012	12:42:10 PM	Bypass valve closed
7/5/2012	12:42:10 PM	Bubbler valve closed
7/5/2012	12:42:10 PM	Helium valve opened
7/5/2012	12:42:10 PM	Main Vac valve opened
7/5/2012	12:42:10 PM	Helium MFC set to  20.000000
7/5/2012	12:42:10 PM	H2 MFC set to  0.000000
7/5/2012	12:42:10 PM	BCl3 MFC set to  0.000000
7/5/2012	12:42:10 PM	PH3 MFC set to  0.000000
7/5/2012	12:42:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:42:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:42:10 PM	Tube furnace set to 0
7/5/2012	12:42:40 PM	Helium valve closed
7/5/2012	12:42:40 PM	H2 valve closed
7/5/2012	12:42:40 PM	BCl3 valve closed
7/5/2012	12:42:40 PM	PH3 valve closed
7/5/2012	12:42:40 PM	SiCl4 pre valve closed
7/5/2012	12:42:40 PM	SiCl4 post valve closed
7/5/2012	12:42:40 PM	Bypass valve closed
7/5/2012	12:42:40 PM	Bubbler valve closed
7/5/2012	12:42:40 PM	Main Vac valve opened
7/5/2012	12:42:40 PM	Helium MFC set to  0.000000
7/5/2012	12:42:40 PM	H2 MFC set to  0.000000
7/5/2012	12:42:40 PM	BCl3 MFC set to  0.000000
7/5/2012	12:42:40 PM	PH3 MFC set to  0.000000
7/5/2012	12:42:40 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:42:40 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:42:40 PM	Tube furnace set to 0
7/5/2012	12:43:10 PM	H2 valve closed
7/5/2012	12:43:10 PM	BCl3 valve closed
7/5/2012	12:43:10 PM	PH3 valve closed
7/5/2012	12:43:10 PM	SiCl4 pre valve closed
7/5/2012	12:43:10 PM	SiCl4 post valve closed
7/5/2012	12:43:10 PM	Bypass valve closed
7/5/2012	12:43:10 PM	Bubbler valve closed
7/5/2012	12:43:10 PM	Helium valve opened
7/5/2012	12:43:10 PM	Main Vac valve opened
7/5/2012	12:43:10 PM	Helium MFC set to  20.000000
7/5/2012	12:43:10 PM	H2 MFC set to  0.000000
7/5/2012	12:43:10 PM	BCl3 MFC set to  0.000000
7/5/2012	12:43:10 PM	PH3 MFC set to  0.000000
7/5/2012	12:43:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:43:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:43:10 PM	Tube furnace set to 0
7/5/2012	12:43:40 PM	Helium valve closed
7/5/2012	12:43:40 PM	H2 valve closed
7/5/2012	12:43:40 PM	BCl3 valve closed
7/5/2012	12:43:40 PM	PH3 valve closed
7/5/2012	12:43:40 PM	SiCl4 pre valve closed
7/5/2012	12:43:40 PM	SiCl4 post valve closed
7/5/2012	12:43:40 PM	Bypass valve closed
7/5/2012	12:43:40 PM	Bubbler valve closed
7/5/2012	12:43:40 PM	Main Vac valve opened
7/5/2012	12:43:40 PM	Helium MFC set to  0.000000
7/5/2012	12:43:40 PM	H2 MFC set to  0.000000
7/5/2012	12:43:40 PM	BCl3 MFC set to  0.000000
7/5/2012	12:43:40 PM	PH3 MFC set to  0.000000
7/5/2012	12:43:40 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:43:40 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:43:41 PM	Tube furnace set to 0
7/5/2012	12:44:11 PM	H2 valve closed
7/5/2012	12:44:11 PM	BCl3 valve closed
7/5/2012	12:44:11 PM	PH3 valve closed
7/5/2012	12:44:11 PM	SiCl4 pre valve closed
7/5/2012	12:44:11 PM	SiCl4 post valve closed
7/5/2012	12:44:11 PM	Bypass valve closed
7/5/2012	12:44:11 PM	Bubbler valve closed
7/5/2012	12:44:11 PM	Helium valve opened
7/5/2012	12:44:11 PM	Main Vac valve opened
7/5/2012	12:44:11 PM	Helium MFC set to  20.000000
7/5/2012	12:44:11 PM	H2 MFC set to  0.000000
7/5/2012	12:44:11 PM	BCl3 MFC set to  0.000000
7/5/2012	12:44:11 PM	PH3 MFC set to  0.000000
7/5/2012	12:44:11 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:44:11 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:44:11 PM	Tube furnace set to 0
7/5/2012	12:44:41 PM	Helium valve closed
7/5/2012	12:44:41 PM	H2 valve closed
7/5/2012	12:44:41 PM	BCl3 valve closed
7/5/2012	12:44:41 PM	PH3 valve closed
7/5/2012	12:44:41 PM	SiCl4 pre valve closed
7/5/2012	12:44:41 PM	SiCl4 post valve closed
7/5/2012	12:44:41 PM	Bypass valve closed
7/5/2012	12:44:41 PM	Bubbler valve closed
7/5/2012	12:44:41 PM	Main Vac valve opened
7/5/2012	12:44:41 PM	Helium MFC set to  0.000000
7/5/2012	12:44:41 PM	H2 MFC set to  0.000000
7/5/2012	12:44:41 PM	BCl3 MFC set to  0.000000
7/5/2012	12:44:41 PM	PH3 MFC set to  0.000000
7/5/2012	12:44:41 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:44:41 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:44:41 PM	Tube furnace set to 0
7/5/2012	12:45:11 PM	H2 valve closed
7/5/2012	12:45:11 PM	BCl3 valve closed
7/5/2012	12:45:11 PM	PH3 valve closed
7/5/2012	12:45:11 PM	SiCl4 pre valve closed
7/5/2012	12:45:11 PM	SiCl4 post valve closed
7/5/2012	12:45:11 PM	Bypass valve closed
7/5/2012	12:45:11 PM	Bubbler valve closed
7/5/2012	12:45:11 PM	Helium valve opened
7/5/2012	12:45:11 PM	Main Vac valve opened
7/5/2012	12:45:11 PM	Helium MFC set to  20.000000
7/5/2012	12:45:11 PM	H2 MFC set to  0.000000
7/5/2012	12:45:11 PM	BCl3 MFC set to  0.000000
7/5/2012	12:45:11 PM	PH3 MFC set to  0.000000
7/5/2012	12:45:11 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:45:11 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:45:11 PM	Tube furnace set to 0
7/5/2012	12:45:41 PM	Helium valve closed
7/5/2012	12:45:41 PM	H2 valve closed
7/5/2012	12:45:41 PM	BCl3 valve closed
7/5/2012	12:45:41 PM	PH3 valve closed
7/5/2012	12:45:41 PM	SiCl4 pre valve closed
7/5/2012	12:45:41 PM	SiCl4 post valve closed
7/5/2012	12:45:41 PM	Bypass valve closed
7/5/2012	12:45:41 PM	Bubbler valve closed
7/5/2012	12:45:41 PM	Main Vac valve opened
7/5/2012	12:45:41 PM	Helium MFC set to  0.000000
7/5/2012	12:45:41 PM	H2 MFC set to  0.000000
7/5/2012	12:45:41 PM	BCl3 MFC set to  0.000000
7/5/2012	12:45:41 PM	PH3 MFC set to  0.000000
7/5/2012	12:45:41 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:45:41 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:45:42 PM	Tube furnace set to 0
7/5/2012	12:46:12 PM	H2 valve closed
7/5/2012	12:46:12 PM	BCl3 valve closed
7/5/2012	12:46:12 PM	PH3 valve closed
7/5/2012	12:46:12 PM	SiCl4 pre valve closed
7/5/2012	12:46:12 PM	SiCl4 post valve closed
7/5/2012	12:46:12 PM	Bypass valve closed
7/5/2012	12:46:12 PM	Bubbler valve closed
7/5/2012	12:46:12 PM	Helium valve opened
7/5/2012	12:46:12 PM	Main Vac valve opened
7/5/2012	12:46:12 PM	Helium MFC set to  20.000000
7/5/2012	12:46:12 PM	H2 MFC set to  0.000000
7/5/2012	12:46:12 PM	BCl3 MFC set to  0.000000
7/5/2012	12:46:12 PM	PH3 MFC set to  0.000000
7/5/2012	12:46:12 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:46:12 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:46:12 PM	Tube furnace set to 0
7/5/2012	12:46:42 PM	Helium valve closed
7/5/2012	12:46:42 PM	H2 valve closed
7/5/2012	12:46:42 PM	BCl3 valve closed
7/5/2012	12:46:42 PM	PH3 valve closed
7/5/2012	12:46:42 PM	SiCl4 pre valve closed
7/5/2012	12:46:42 PM	SiCl4 post valve closed
7/5/2012	12:46:42 PM	Bypass valve closed
7/5/2012	12:46:42 PM	Bubbler valve closed
7/5/2012	12:46:42 PM	Main Vac valve opened
7/5/2012	12:46:42 PM	Helium MFC set to  0.000000
7/5/2012	12:46:42 PM	H2 MFC set to  0.000000
7/5/2012	12:46:42 PM	BCl3 MFC set to  0.000000
7/5/2012	12:46:42 PM	PH3 MFC set to  0.000000
7/5/2012	12:46:42 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:46:42 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:46:42 PM	Tube furnace set to 0
7/5/2012	12:46:43 PM	Run finished at 12:46 PM
7/5/2012	12:46:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/5/2012	12:50:51 PM	Main Vac valve closed
7/5/2012	12:51:05 PM	Main Vac valve opened
7/5/2012	12:51:38 PM	Recipe started at 12:51 PM
7/5/2012	12:51:38 PM	Helium valve closed
7/5/2012	12:51:38 PM	H2 valve closed
7/5/2012	12:51:38 PM	BCl3 valve closed
7/5/2012	12:51:38 PM	PH3 valve closed
7/5/2012	12:51:38 PM	SiCl4 pre valve closed
7/5/2012	12:51:38 PM	SiCl4 post valve closed
7/5/2012	12:51:38 PM	Main Vac valve closed
7/5/2012	12:51:38 PM	Bypass valve closed
7/5/2012	12:51:38 PM	Bubbler valve closed
7/5/2012	12:51:38 PM	Helium MFC set to  0.000000
7/5/2012	12:51:38 PM	H2 MFC set to  0.000000
7/5/2012	12:51:38 PM	BCl3 MFC set to  0.000000
7/5/2012	12:51:38 PM	PH3 MFC set to  0.000000
7/5/2012	12:51:38 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:51:38 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:51:38 PM	Tube furnace set to 0
7/5/2012	12:51:41 PM	Helium valve closed
7/5/2012	12:51:41 PM	BCl3 valve closed
7/5/2012	12:51:41 PM	PH3 valve closed
7/5/2012	12:51:41 PM	SiCl4 pre valve closed
7/5/2012	12:51:41 PM	SiCl4 post valve closed
7/5/2012	12:51:41 PM	Main Vac valve closed
7/5/2012	12:51:41 PM	Bypass valve closed
7/5/2012	12:51:41 PM	Bubbler valve closed
7/5/2012	12:51:41 PM	H2 valve opened
7/5/2012	12:51:41 PM	Helium MFC set to  0.000000
7/5/2012	12:51:41 PM	H2 MFC set to  500.000000
7/5/2012	12:51:41 PM	BCl3 MFC set to  0.000000
7/5/2012	12:51:41 PM	PH3 MFC set to  0.000000
7/5/2012	12:51:41 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:51:41 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:51:41 PM	Tube furnace set to 0
7/5/2012	12:52:58 PM	Helium valve closed
7/5/2012	12:52:58 PM	BCl3 valve closed
7/5/2012	12:52:58 PM	PH3 valve closed
7/5/2012	12:52:58 PM	SiCl4 pre valve closed
7/5/2012	12:52:58 PM	SiCl4 post valve closed
7/5/2012	12:52:58 PM	Main Vac valve closed
7/5/2012	12:52:58 PM	Bypass valve closed
7/5/2012	12:52:58 PM	H2 valve opened
7/5/2012	12:52:58 PM	Bubbler valve opened
7/5/2012	12:52:58 PM	Helium MFC set to  0.000000
7/5/2012	12:52:58 PM	H2 MFC set to  500.000000
7/5/2012	12:52:58 PM	BCl3 MFC set to  0.000000
7/5/2012	12:52:58 PM	PH3 MFC set to  0.000000
7/5/2012	12:52:58 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:52:58 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:52:58 PM	Tube furnace set to 0
7/5/2012	12:52:59 PM	Helium valve closed
7/5/2012	12:52:59 PM	BCl3 valve closed
7/5/2012	12:52:59 PM	PH3 valve closed
7/5/2012	12:52:59 PM	SiCl4 pre valve closed
7/5/2012	12:52:59 PM	SiCl4 post valve closed
7/5/2012	12:52:59 PM	Main Vac valve closed
7/5/2012	12:52:59 PM	Bypass valve closed
7/5/2012	12:52:59 PM	H2 valve opened
7/5/2012	12:52:59 PM	Bubbler valve opened
7/5/2012	12:52:59 PM	Helium MFC set to  0.000000
7/5/2012	12:52:59 PM	H2 MFC set to  500.000000
7/5/2012	12:52:59 PM	BCl3 MFC set to  0.000000
7/5/2012	12:52:59 PM	PH3 MFC set to  0.000000
7/5/2012	12:52:59 PM	SiCl4 MFC set to  0.000000
7/5/2012	12:52:59 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	12:52:59 PM	Tube furnace set to 950
7/5/2012	1:12:59 PM	Helium valve closed
7/5/2012	1:12:59 PM	PH3 valve closed
7/5/2012	1:12:59 PM	Main Vac valve closed
7/5/2012	1:12:59 PM	Bypass valve closed
7/5/2012	1:12:59 PM	H2 valve opened
7/5/2012	1:12:59 PM	BCl3 valve opened
7/5/2012	1:12:59 PM	SiCl4 pre valve opened
7/5/2012	1:12:59 PM	SiCl4 post valve opened
7/5/2012	1:12:59 PM	Bubbler valve opened
7/5/2012	1:12:59 PM	Helium MFC set to  0.000000
7/5/2012	1:12:59 PM	H2 MFC set to  500.000000
7/5/2012	1:12:59 PM	BCl3 MFC set to  1.000000
7/5/2012	1:12:59 PM	PH3 MFC set to  0.000000
7/5/2012	1:12:59 PM	SiCl4 MFC set to  25.000000
7/5/2012	1:12:59 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	1:12:59 PM	Tube furnace set to 950
7/5/2012	1:32:59 PM	Helium valve closed
7/5/2012	1:32:59 PM	BCl3 valve closed
7/5/2012	1:32:59 PM	PH3 valve closed
7/5/2012	1:32:59 PM	SiCl4 pre valve closed
7/5/2012	1:32:59 PM	SiCl4 post valve closed
7/5/2012	1:32:59 PM	Main Vac valve closed
7/5/2012	1:32:59 PM	Bypass valve closed
7/5/2012	1:32:59 PM	H2 valve opened
7/5/2012	1:32:59 PM	Bubbler valve opened
7/5/2012	1:32:59 PM	Helium MFC set to  0.000000
7/5/2012	1:32:59 PM	H2 MFC set to  500.000000
7/5/2012	1:32:59 PM	BCl3 MFC set to  0.000000
7/5/2012	1:32:59 PM	PH3 MFC set to  0.000000
7/5/2012	1:32:59 PM	SiCl4 MFC set to  0.000000
7/5/2012	1:32:59 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	1:32:59 PM	Tube furnace set to 750
7/5/2012	1:38:00 PM	H2 valve closed
7/5/2012	1:38:00 PM	BCl3 valve closed
7/5/2012	1:38:00 PM	PH3 valve closed
7/5/2012	1:38:00 PM	SiCl4 pre valve closed
7/5/2012	1:38:00 PM	SiCl4 post valve closed
7/5/2012	1:38:00 PM	Main Vac valve closed
7/5/2012	1:38:00 PM	Bypass valve closed
7/5/2012	1:38:00 PM	Helium valve opened
7/5/2012	1:38:00 PM	Bubbler valve opened
7/5/2012	1:38:00 PM	Helium MFC set to  500.000000
7/5/2012	1:38:00 PM	H2 MFC set to  0.000000
7/5/2012	1:38:00 PM	BCl3 MFC set to  0.000000
7/5/2012	1:38:00 PM	PH3 MFC set to  0.000000
7/5/2012	1:38:00 PM	SiCl4 MFC set to  0.000000
7/5/2012	1:38:00 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	1:38:00 PM	Tube furnace set to 0
7/5/2012	1:52:18 PM	Run aborted at 1:52 PM
7/5/2012	1:52:18 PM	Helium valve closed
7/5/2012	1:52:18 PM	H2 valve closed
7/5/2012	1:52:18 PM	BCl3 valve closed
7/5/2012	1:52:18 PM	PH3 valve closed
7/5/2012	1:52:18 PM	SiCl4 pre valve closed
7/5/2012	1:52:18 PM	SiCl4 post valve closed
7/5/2012	1:52:18 PM	Bypass valve closed
7/5/2012	1:52:18 PM	Main Vac valve closed
7/5/2012	1:52:18 PM	Bubbler valve closed
7/5/2012	1:52:18 PM	Helium MFC set to  0.000000
7/5/2012	1:52:18 PM	H2 MFC set to  0.000000
7/5/2012	1:52:18 PM	BCl3 MFC set to  0.000000
7/5/2012	1:52:18 PM	PH3 MFC set to  0.000000
7/5/2012	1:52:18 PM	SiCl4 MFC set to  0.000000
7/5/2012	1:52:18 PM	Tube furnace set to 0
7/5/2012	1:52:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	1:52:21 PM	Recipe started at 1:52 PM
7/5/2012	1:52:21 PM	Helium valve closed
7/5/2012	1:52:21 PM	H2 valve closed
7/5/2012	1:52:21 PM	BCl3 valve closed
7/5/2012	1:52:21 PM	PH3 valve closed
7/5/2012	1:52:21 PM	SiCl4 pre valve closed
7/5/2012	1:52:21 PM	SiCl4 post valve closed
7/5/2012	1:52:21 PM	Main Vac valve closed
7/5/2012	1:52:21 PM	Bypass valve closed
7/5/2012	1:52:21 PM	Bubbler valve closed
7/5/2012	1:52:21 PM	Helium MFC set to  0.000000
7/5/2012	1:52:21 PM	H2 MFC set to  0.000000
7/5/2012	1:52:21 PM	BCl3 MFC set to  0.000000
7/5/2012	1:52:21 PM	PH3 MFC set to  0.000000
7/5/2012	1:52:21 PM	SiCl4 MFC set to  0.000000
7/5/2012	1:52:21 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	1:52:21 PM	Tube furnace set to 0
7/5/2012	1:52:24 PM	H2 valve closed
7/5/2012	1:52:24 PM	BCl3 valve closed
7/5/2012	1:52:24 PM	PH3 valve closed
7/5/2012	1:52:24 PM	SiCl4 pre valve closed
7/5/2012	1:52:24 PM	SiCl4 post valve closed
7/5/2012	1:52:24 PM	Main Vac valve closed
7/5/2012	1:52:24 PM	Bypass valve closed
7/5/2012	1:52:25 PM	Bubbler valve closed
7/5/2012	1:52:25 PM	Helium valve opened
7/5/2012	1:52:25 PM	Helium MFC set to  500.000000
7/5/2012	1:52:25 PM	H2 MFC set to  0.000000
7/5/2012	1:52:25 PM	BCl3 MFC set to  0.000000
7/5/2012	1:52:25 PM	PH3 MFC set to  0.000000
7/5/2012	1:52:25 PM	SiCl4 MFC set to  0.000000
7/5/2012	1:52:25 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	1:52:25 PM	Tube furnace set to 0
7/5/2012	1:52:25 PM	Helium valve closed
7/5/2012	1:52:25 PM	H2 valve closed
7/5/2012	1:52:25 PM	BCl3 valve closed
7/5/2012	1:52:25 PM	PH3 valve closed
7/5/2012	1:52:25 PM	SiCl4 pre valve closed
7/5/2012	1:52:25 PM	SiCl4 post valve closed
7/5/2012	1:52:25 PM	Main Vac valve closed
7/5/2012	1:52:25 PM	Bypass valve closed
7/5/2012	1:52:25 PM	Bubbler valve closed
7/5/2012	1:52:25 PM	Helium MFC set to  0.000000
7/5/2012	1:52:25 PM	H2 MFC set to  0.000000
7/5/2012	1:52:25 PM	BCl3 MFC set to  0.000000
7/5/2012	1:52:25 PM	PH3 MFC set to  0.000000
7/5/2012	1:52:25 PM	SiCl4 MFC set to  0.000000
7/5/2012	1:52:25 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	1:52:25 PM	Tube furnace set to 0
7/5/2012	1:52:26 PM	Run finished at 1:52 PM
7/5/2012	1:52:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	2:08:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	2:08:28 PM	Recipe started at 2:08 PM
7/5/2012	2:08:28 PM	Helium valve closed
7/5/2012	2:08:28 PM	H2 valve closed
7/5/2012	2:08:28 PM	BCl3 valve closed
7/5/2012	2:08:28 PM	PH3 valve closed
7/5/2012	2:08:28 PM	SiCl4 pre valve closed
7/5/2012	2:08:28 PM	SiCl4 post valve closed
7/5/2012	2:08:28 PM	Main Vac valve closed
7/5/2012	2:08:28 PM	Bubbler valve closed
7/5/2012	2:08:28 PM	Bypass valve opened
7/5/2012	2:08:28 PM	Helium MFC set to  0.000000
7/5/2012	2:08:28 PM	H2 MFC set to  0.000000
7/5/2012	2:08:28 PM	BCl3 MFC set to  0.000000
7/5/2012	2:08:28 PM	PH3 MFC set to  0.000000
7/5/2012	2:08:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:08:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:08:28 PM	Tube furnace set to 0
7/5/2012	2:09:44 PM	Helium valve closed
7/5/2012	2:09:44 PM	H2 valve closed
7/5/2012	2:09:44 PM	BCl3 valve closed
7/5/2012	2:09:44 PM	PH3 valve closed
7/5/2012	2:09:44 PM	SiCl4 pre valve closed
7/5/2012	2:09:44 PM	SiCl4 post valve closed
7/5/2012	2:09:44 PM	Main Vac valve closed
7/5/2012	2:09:44 PM	Bubbler valve closed
7/5/2012	2:09:44 PM	Bypass valve opened
7/5/2012	2:09:44 PM	Helium MFC set to  0.000000
7/5/2012	2:09:44 PM	H2 MFC set to  0.000000
7/5/2012	2:09:44 PM	BCl3 MFC set to  0.000000
7/5/2012	2:09:44 PM	PH3 MFC set to  0.000000
7/5/2012	2:09:44 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:09:44 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:09:44 PM	Tube furnace set to 0
7/5/2012	2:10:44 PM	Helium valve closed
7/5/2012	2:10:44 PM	H2 valve closed
7/5/2012	2:10:44 PM	BCl3 valve closed
7/5/2012	2:10:44 PM	PH3 valve closed
7/5/2012	2:10:44 PM	SiCl4 pre valve closed
7/5/2012	2:10:44 PM	SiCl4 post valve closed
7/5/2012	2:10:44 PM	Bypass valve closed
7/5/2012	2:10:44 PM	Bubbler valve closed
7/5/2012	2:10:44 PM	Main Vac valve opened
7/5/2012	2:10:44 PM	Helium MFC set to  0.000000
7/5/2012	2:10:45 PM	H2 MFC set to  0.000000
7/5/2012	2:10:45 PM	BCl3 MFC set to  0.000000
7/5/2012	2:10:45 PM	PH3 MFC set to  0.000000
7/5/2012	2:10:45 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:10:45 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:10:45 PM	Tube furnace set to 0
7/5/2012	2:10:46 PM	Run finished at 2:10 PM
7/5/2012	2:10:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	2:15:16 PM	Recipe started at 2:15 PM
7/5/2012	2:15:16 PM	Helium valve closed
7/5/2012	2:15:16 PM	H2 valve closed
7/5/2012	2:15:16 PM	BCl3 valve closed
7/5/2012	2:15:16 PM	PH3 valve closed
7/5/2012	2:15:16 PM	SiCl4 pre valve closed
7/5/2012	2:15:16 PM	SiCl4 post valve closed
7/5/2012	2:15:16 PM	Main Vac valve closed
7/5/2012	2:15:16 PM	Bypass valve closed
7/5/2012	2:15:16 PM	Bubbler valve closed
7/5/2012	2:15:16 PM	Helium MFC set to  0.000000
7/5/2012	2:15:16 PM	H2 MFC set to  0.000000
7/5/2012	2:15:16 PM	BCl3 MFC set to  0.000000
7/5/2012	2:15:16 PM	PH3 MFC set to  0.000000
7/5/2012	2:15:16 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:15:16 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:15:16 PM	Tube furnace set to 0
7/5/2012	2:15:19 PM	Helium valve closed
7/5/2012	2:15:19 PM	BCl3 valve closed
7/5/2012	2:15:19 PM	PH3 valve closed
7/5/2012	2:15:19 PM	SiCl4 pre valve closed
7/5/2012	2:15:19 PM	SiCl4 post valve closed
7/5/2012	2:15:19 PM	Main Vac valve closed
7/5/2012	2:15:19 PM	Bypass valve closed
7/5/2012	2:15:19 PM	Bubbler valve closed
7/5/2012	2:15:19 PM	H2 valve opened
7/5/2012	2:15:19 PM	Helium MFC set to  0.000000
7/5/2012	2:15:19 PM	H2 MFC set to  500.000000
7/5/2012	2:15:19 PM	BCl3 MFC set to  0.000000
7/5/2012	2:15:19 PM	PH3 MFC set to  0.000000
7/5/2012	2:15:19 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:15:19 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:15:19 PM	Tube furnace set to 0
7/5/2012	2:16:35 PM	Helium valve closed
7/5/2012	2:16:35 PM	BCl3 valve closed
7/5/2012	2:16:35 PM	PH3 valve closed
7/5/2012	2:16:35 PM	SiCl4 pre valve closed
7/5/2012	2:16:35 PM	SiCl4 post valve closed
7/5/2012	2:16:35 PM	Main Vac valve closed
7/5/2012	2:16:35 PM	Bypass valve closed
7/5/2012	2:16:35 PM	H2 valve opened
7/5/2012	2:16:35 PM	Bubbler valve opened
7/5/2012	2:16:35 PM	Helium MFC set to  0.000000
7/5/2012	2:16:35 PM	H2 MFC set to  500.000000
7/5/2012	2:16:35 PM	BCl3 MFC set to  0.000000
7/5/2012	2:16:35 PM	PH3 MFC set to  0.000000
7/5/2012	2:16:35 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:16:35 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:16:35 PM	Tube furnace set to 0
7/5/2012	2:16:36 PM	Helium valve closed
7/5/2012	2:16:36 PM	BCl3 valve closed
7/5/2012	2:16:36 PM	PH3 valve closed
7/5/2012	2:16:36 PM	SiCl4 pre valve closed
7/5/2012	2:16:36 PM	SiCl4 post valve closed
7/5/2012	2:16:36 PM	Main Vac valve closed
7/5/2012	2:16:36 PM	Bypass valve closed
7/5/2012	2:16:37 PM	H2 valve opened
7/5/2012	2:16:37 PM	Bubbler valve opened
7/5/2012	2:16:37 PM	Helium MFC set to  0.000000
7/5/2012	2:16:37 PM	H2 MFC set to  500.000000
7/5/2012	2:16:37 PM	BCl3 MFC set to  0.000000
7/5/2012	2:16:37 PM	PH3 MFC set to  0.000000
7/5/2012	2:16:37 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:16:37 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:16:37 PM	Tube furnace set to 500
7/5/2012	2:36:09 PM	Helium valve closed
7/5/2012	2:36:09 PM	BCl3 valve closed
7/5/2012	2:36:09 PM	PH3 valve closed
7/5/2012	2:36:09 PM	SiCl4 pre valve closed
7/5/2012	2:36:09 PM	SiCl4 post valve closed
7/5/2012	2:36:09 PM	Main Vac valve closed
7/5/2012	2:36:09 PM	Bypass valve closed
7/5/2012	2:36:09 PM	H2 valve opened
7/5/2012	2:36:09 PM	Bubbler valve opened
7/5/2012	2:36:09 PM	Helium MFC set to  0.000000
7/5/2012	2:36:09 PM	H2 MFC set to  500.000000
7/5/2012	2:36:09 PM	BCl3 MFC set to  1.000000
7/5/2012	2:36:09 PM	PH3 MFC set to  0.000000
7/5/2012	2:36:09 PM	SiCl4 MFC set to  25.000000
7/5/2012	2:36:09 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:36:09 PM	Tube furnace set to 500
7/5/2012	2:56:10 PM	Helium valve closed
7/5/2012	2:56:10 PM	BCl3 valve closed
7/5/2012	2:56:10 PM	PH3 valve closed
7/5/2012	2:56:10 PM	SiCl4 pre valve closed
7/5/2012	2:56:10 PM	SiCl4 post valve closed
7/5/2012	2:56:10 PM	Main Vac valve closed
7/5/2012	2:56:10 PM	Bypass valve closed
7/5/2012	2:56:10 PM	H2 valve opened
7/5/2012	2:56:10 PM	Bubbler valve opened
7/5/2012	2:56:10 PM	Helium MFC set to  0.000000
7/5/2012	2:56:10 PM	H2 MFC set to  500.000000
7/5/2012	2:56:10 PM	BCl3 MFC set to  0.000000
7/5/2012	2:56:10 PM	PH3 MFC set to  0.000000
7/5/2012	2:56:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	2:56:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	2:56:10 PM	Tube furnace set to 250
7/5/2012	3:01:10 PM	H2 valve closed
7/5/2012	3:01:10 PM	BCl3 valve closed
7/5/2012	3:01:10 PM	PH3 valve closed
7/5/2012	3:01:10 PM	SiCl4 pre valve closed
7/5/2012	3:01:10 PM	SiCl4 post valve closed
7/5/2012	3:01:10 PM	Main Vac valve closed
7/5/2012	3:01:10 PM	Bypass valve closed
7/5/2012	3:01:10 PM	Helium valve opened
7/5/2012	3:01:10 PM	Bubbler valve opened
7/5/2012	3:01:10 PM	Helium MFC set to  500.000000
7/5/2012	3:01:10 PM	H2 MFC set to  0.000000
7/5/2012	3:01:10 PM	BCl3 MFC set to  0.000000
7/5/2012	3:01:10 PM	PH3 MFC set to  0.000000
7/5/2012	3:01:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:01:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:01:10 PM	Tube furnace set to 0
7/5/2012	3:17:58 PM	Helium valve closed
7/5/2012	3:17:58 PM	H2 valve closed
7/5/2012	3:17:58 PM	BCl3 valve closed
7/5/2012	3:17:58 PM	PH3 valve closed
7/5/2012	3:17:58 PM	SiCl4 pre valve closed
7/5/2012	3:17:58 PM	SiCl4 post valve closed
7/5/2012	3:17:58 PM	Main Vac valve closed
7/5/2012	3:17:58 PM	Bypass valve closed
7/5/2012	3:17:58 PM	Bubbler valve closed
7/5/2012	3:17:58 PM	Helium MFC set to  0.000000
7/5/2012	3:17:58 PM	H2 MFC set to  0.000000
7/5/2012	3:17:58 PM	BCl3 MFC set to  0.000000
7/5/2012	3:17:58 PM	PH3 MFC set to  0.000000
7/5/2012	3:17:58 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:17:58 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:17:58 PM	Tube furnace set to 0
7/5/2012	3:17:59 PM	Run finished at 3:17 PM
7/5/2012	3:18:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	3:18:04 PM	Recipe started at 3:18 PM
7/5/2012	3:18:04 PM	Helium valve closed
7/5/2012	3:18:04 PM	H2 valve closed
7/5/2012	3:18:04 PM	BCl3 valve closed
7/5/2012	3:18:04 PM	PH3 valve closed
7/5/2012	3:18:04 PM	SiCl4 pre valve closed
7/5/2012	3:18:04 PM	SiCl4 post valve closed
7/5/2012	3:18:04 PM	Main Vac valve closed
7/5/2012	3:18:04 PM	Bypass valve closed
7/5/2012	3:18:04 PM	Bubbler valve closed
7/5/2012	3:18:04 PM	Helium MFC set to  0.000000
7/5/2012	3:18:04 PM	H2 MFC set to  0.000000
7/5/2012	3:18:04 PM	BCl3 MFC set to  0.000000
7/5/2012	3:18:04 PM	PH3 MFC set to  0.000000
7/5/2012	3:18:04 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:18:04 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:18:04 PM	Tube furnace set to 0
7/5/2012	3:18:07 PM	H2 valve closed
7/5/2012	3:18:07 PM	BCl3 valve closed
7/5/2012	3:18:07 PM	PH3 valve closed
7/5/2012	3:18:07 PM	SiCl4 pre valve closed
7/5/2012	3:18:07 PM	SiCl4 post valve closed
7/5/2012	3:18:07 PM	Main Vac valve closed
7/5/2012	3:18:07 PM	Bypass valve closed
7/5/2012	3:18:07 PM	Bubbler valve closed
7/5/2012	3:18:07 PM	Helium valve opened
7/5/2012	3:18:07 PM	Helium MFC set to  500.000000
7/5/2012	3:18:07 PM	H2 MFC set to  0.000000
7/5/2012	3:18:07 PM	BCl3 MFC set to  0.000000
7/5/2012	3:18:07 PM	PH3 MFC set to  0.000000
7/5/2012	3:18:07 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:18:07 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:18:07 PM	Tube furnace set to 0
7/5/2012	3:18:07 PM	Helium valve closed
7/5/2012	3:18:07 PM	H2 valve closed
7/5/2012	3:18:07 PM	BCl3 valve closed
7/5/2012	3:18:07 PM	PH3 valve closed
7/5/2012	3:18:07 PM	SiCl4 pre valve closed
7/5/2012	3:18:07 PM	SiCl4 post valve closed
7/5/2012	3:18:07 PM	Main Vac valve closed
7/5/2012	3:18:07 PM	Bypass valve closed
7/5/2012	3:18:07 PM	Bubbler valve closed
7/5/2012	3:18:07 PM	Helium MFC set to  0.000000
7/5/2012	3:18:07 PM	H2 MFC set to  0.000000
7/5/2012	3:18:07 PM	BCl3 MFC set to  0.000000
7/5/2012	3:18:07 PM	PH3 MFC set to  0.000000
7/5/2012	3:18:07 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:18:07 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:18:07 PM	Tube furnace set to 0
7/5/2012	3:18:08 PM	Run finished at 3:18 PM
7/5/2012	3:18:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	3:20:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	3:21:00 PM	Recipe started at 3:21 PM
7/5/2012	3:21:00 PM	Helium valve closed
7/5/2012	3:21:00 PM	H2 valve closed
7/5/2012	3:21:00 PM	BCl3 valve closed
7/5/2012	3:21:00 PM	PH3 valve closed
7/5/2012	3:21:00 PM	SiCl4 pre valve closed
7/5/2012	3:21:00 PM	SiCl4 post valve closed
7/5/2012	3:21:00 PM	Main Vac valve closed
7/5/2012	3:21:00 PM	Bubbler valve closed
7/5/2012	3:21:00 PM	Bypass valve opened
7/5/2012	3:21:00 PM	Helium MFC set to  0.000000
7/5/2012	3:21:00 PM	H2 MFC set to  0.000000
7/5/2012	3:21:00 PM	BCl3 MFC set to  0.000000
7/5/2012	3:21:00 PM	PH3 MFC set to  0.000000
7/5/2012	3:21:00 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:21:00 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:21:00 PM	Tube furnace set to 0
7/5/2012	3:22:10 PM	Helium valve closed
7/5/2012	3:22:10 PM	H2 valve closed
7/5/2012	3:22:10 PM	BCl3 valve closed
7/5/2012	3:22:10 PM	PH3 valve closed
7/5/2012	3:22:10 PM	SiCl4 pre valve closed
7/5/2012	3:22:10 PM	SiCl4 post valve closed
7/5/2012	3:22:10 PM	Main Vac valve closed
7/5/2012	3:22:10 PM	Bubbler valve closed
7/5/2012	3:22:10 PM	Bypass valve opened
7/5/2012	3:22:10 PM	Helium MFC set to  0.000000
7/5/2012	3:22:10 PM	H2 MFC set to  0.000000
7/5/2012	3:22:10 PM	BCl3 MFC set to  0.000000
7/5/2012	3:22:10 PM	PH3 MFC set to  0.000000
7/5/2012	3:22:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:22:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:22:10 PM	Tube furnace set to 0
7/5/2012	3:23:10 PM	Helium valve closed
7/5/2012	3:23:10 PM	H2 valve closed
7/5/2012	3:23:10 PM	BCl3 valve closed
7/5/2012	3:23:10 PM	PH3 valve closed
7/5/2012	3:23:10 PM	SiCl4 pre valve closed
7/5/2012	3:23:10 PM	SiCl4 post valve closed
7/5/2012	3:23:10 PM	Bypass valve closed
7/5/2012	3:23:10 PM	Bubbler valve closed
7/5/2012	3:23:10 PM	Main Vac valve opened
7/5/2012	3:23:10 PM	Helium MFC set to  0.000000
7/5/2012	3:23:10 PM	H2 MFC set to  0.000000
7/5/2012	3:23:10 PM	BCl3 MFC set to  0.000000
7/5/2012	3:23:10 PM	PH3 MFC set to  0.000000
7/5/2012	3:23:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	3:23:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	3:23:10 PM	Tube furnace set to 0
7/5/2012	3:23:11 PM	Run finished at 3:23 PM
7/5/2012	3:23:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	4:17:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	4:17:48 PM	Recipe started at 4:17 PM
7/5/2012	4:17:48 PM	Helium valve closed
7/5/2012	4:17:48 PM	H2 valve closed
7/5/2012	4:17:48 PM	BCl3 valve closed
7/5/2012	4:17:48 PM	PH3 valve closed
7/5/2012	4:17:48 PM	SiCl4 pre valve closed
7/5/2012	4:17:48 PM	SiCl4 post valve closed
7/5/2012	4:17:48 PM	Main Vac valve closed
7/5/2012	4:17:48 PM	Bypass valve closed
7/5/2012	4:17:48 PM	Bubbler valve closed
7/5/2012	4:17:48 PM	Helium MFC set to  0.000000
7/5/2012	4:17:48 PM	H2 MFC set to  0.000000
7/5/2012	4:17:48 PM	BCl3 MFC set to  0.000000
7/5/2012	4:17:48 PM	PH3 MFC set to  0.000000
7/5/2012	4:17:48 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:17:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:17:48 PM	Tube furnace set to 0
7/5/2012	4:17:51 PM	H2 valve closed
7/5/2012	4:17:51 PM	BCl3 valve closed
7/5/2012	4:17:51 PM	PH3 valve closed
7/5/2012	4:17:51 PM	SiCl4 pre valve closed
7/5/2012	4:17:51 PM	SiCl4 post valve closed
7/5/2012	4:17:51 PM	Main Vac valve closed
7/5/2012	4:17:51 PM	Bypass valve closed
7/5/2012	4:17:51 PM	Bubbler valve closed
7/5/2012	4:17:51 PM	Helium valve opened
7/5/2012	4:17:51 PM	Helium MFC set to  500.000000
7/5/2012	4:17:51 PM	H2 MFC set to  0.000000
7/5/2012	4:17:51 PM	BCl3 MFC set to  0.000000
7/5/2012	4:17:51 PM	PH3 MFC set to  0.000000
7/5/2012	4:17:51 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:17:51 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:17:51 PM	Tube furnace set to 0
7/5/2012	4:19:04 PM	Helium valve closed
7/5/2012	4:19:04 PM	H2 valve closed
7/5/2012	4:19:04 PM	BCl3 valve closed
7/5/2012	4:19:04 PM	PH3 valve closed
7/5/2012	4:19:04 PM	SiCl4 pre valve closed
7/5/2012	4:19:04 PM	SiCl4 post valve closed
7/5/2012	4:19:04 PM	Main Vac valve closed
7/5/2012	4:19:04 PM	Bypass valve closed
7/5/2012	4:19:04 PM	Bubbler valve closed
7/5/2012	4:19:04 PM	Helium MFC set to  0.000000
7/5/2012	4:19:04 PM	H2 MFC set to  0.000000
7/5/2012	4:19:04 PM	BCl3 MFC set to  0.000000
7/5/2012	4:19:04 PM	PH3 MFC set to  0.000000
7/5/2012	4:19:04 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:19:04 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:19:04 PM	Tube furnace set to 0
7/5/2012	4:19:05 PM	Run finished at 4:19 PM
7/5/2012	4:19:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	4:21:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	4:21:28 PM	Recipe started at 4:21 PM
7/5/2012	4:21:28 PM	Helium valve closed
7/5/2012	4:21:28 PM	H2 valve closed
7/5/2012	4:21:28 PM	BCl3 valve closed
7/5/2012	4:21:28 PM	PH3 valve closed
7/5/2012	4:21:28 PM	SiCl4 pre valve closed
7/5/2012	4:21:28 PM	SiCl4 post valve closed
7/5/2012	4:21:28 PM	Main Vac valve closed
7/5/2012	4:21:28 PM	Bubbler valve closed
7/5/2012	4:21:28 PM	Bypass valve opened
7/5/2012	4:21:28 PM	Helium MFC set to  0.000000
7/5/2012	4:21:28 PM	H2 MFC set to  0.000000
7/5/2012	4:21:28 PM	BCl3 MFC set to  0.000000
7/5/2012	4:21:28 PM	PH3 MFC set to  0.000000
7/5/2012	4:21:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:21:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:21:29 PM	Tube furnace set to 0
7/5/2012	4:22:36 PM	Helium valve closed
7/5/2012	4:22:36 PM	H2 valve closed
7/5/2012	4:22:36 PM	BCl3 valve closed
7/5/2012	4:22:36 PM	PH3 valve closed
7/5/2012	4:22:36 PM	SiCl4 pre valve closed
7/5/2012	4:22:36 PM	SiCl4 post valve closed
7/5/2012	4:22:36 PM	Main Vac valve closed
7/5/2012	4:22:36 PM	Bubbler valve closed
7/5/2012	4:22:36 PM	Bypass valve opened
7/5/2012	4:22:36 PM	Helium MFC set to  0.000000
7/5/2012	4:22:36 PM	H2 MFC set to  0.000000
7/5/2012	4:22:36 PM	BCl3 MFC set to  0.000000
7/5/2012	4:22:36 PM	PH3 MFC set to  0.000000
7/5/2012	4:22:36 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:22:36 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:22:37 PM	Tube furnace set to 0
7/5/2012	4:23:37 PM	Helium valve closed
7/5/2012	4:23:37 PM	H2 valve closed
7/5/2012	4:23:37 PM	BCl3 valve closed
7/5/2012	4:23:37 PM	PH3 valve closed
7/5/2012	4:23:37 PM	SiCl4 pre valve closed
7/5/2012	4:23:37 PM	SiCl4 post valve closed
7/5/2012	4:23:37 PM	Bypass valve closed
7/5/2012	4:23:37 PM	Bubbler valve closed
7/5/2012	4:23:37 PM	Main Vac valve opened
7/5/2012	4:23:37 PM	Helium MFC set to  0.000000
7/5/2012	4:23:37 PM	H2 MFC set to  0.000000
7/5/2012	4:23:37 PM	BCl3 MFC set to  0.000000
7/5/2012	4:23:37 PM	PH3 MFC set to  0.000000
7/5/2012	4:23:37 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:23:37 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:23:37 PM	Tube furnace set to 0
7/5/2012	4:23:38 PM	Run finished at 4:23 PM
7/5/2012	4:23:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	4:26:26 PM	Recipe started at 4:26 PM
7/5/2012	4:26:26 PM	Helium valve closed
7/5/2012	4:26:26 PM	H2 valve closed
7/5/2012	4:26:26 PM	BCl3 valve closed
7/5/2012	4:26:26 PM	PH3 valve closed
7/5/2012	4:26:26 PM	SiCl4 pre valve closed
7/5/2012	4:26:26 PM	SiCl4 post valve closed
7/5/2012	4:26:26 PM	Bypass valve closed
7/5/2012	4:26:26 PM	Bubbler valve closed
7/5/2012	4:26:26 PM	Main Vac valve opened
7/5/2012	4:26:26 PM	Helium MFC set to  0.000000
7/5/2012	4:26:26 PM	H2 MFC set to  0.000000
7/5/2012	4:26:26 PM	BCl3 MFC set to  0.000000
7/5/2012	4:26:26 PM	PH3 MFC set to  0.000000
7/5/2012	4:26:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:26:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:26:26 PM	Tube furnace set to 150
7/5/2012	4:26:32 PM	H2 valve closed
7/5/2012	4:26:32 PM	BCl3 valve closed
7/5/2012	4:26:32 PM	PH3 valve closed
7/5/2012	4:26:32 PM	SiCl4 pre valve closed
7/5/2012	4:26:32 PM	SiCl4 post valve closed
7/5/2012	4:26:32 PM	Bypass valve closed
7/5/2012	4:26:32 PM	Bubbler valve closed
7/5/2012	4:26:32 PM	Helium valve opened
7/5/2012	4:26:32 PM	Main Vac valve opened
7/5/2012	4:26:32 PM	Helium MFC set to  20.000000
7/5/2012	4:26:32 PM	H2 MFC set to  0.000000
7/5/2012	4:26:32 PM	BCl3 MFC set to  0.000000
7/5/2012	4:26:32 PM	PH3 MFC set to  0.000000
7/5/2012	4:26:32 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:26:32 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:26:32 PM	Tube furnace set to 150
7/5/2012	4:27:02 PM	Helium valve closed
7/5/2012	4:27:02 PM	H2 valve closed
7/5/2012	4:27:02 PM	BCl3 valve closed
7/5/2012	4:27:02 PM	PH3 valve closed
7/5/2012	4:27:02 PM	SiCl4 pre valve closed
7/5/2012	4:27:02 PM	SiCl4 post valve closed
7/5/2012	4:27:02 PM	Bypass valve closed
7/5/2012	4:27:02 PM	Bubbler valve closed
7/5/2012	4:27:02 PM	Main Vac valve opened
7/5/2012	4:27:02 PM	Helium MFC set to  0.000000
7/5/2012	4:27:02 PM	H2 MFC set to  0.000000
7/5/2012	4:27:02 PM	BCl3 MFC set to  0.000000
7/5/2012	4:27:02 PM	PH3 MFC set to  0.000000
7/5/2012	4:27:02 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:27:02 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:27:02 PM	Tube furnace set to 150
7/5/2012	4:27:32 PM	H2 valve closed
7/5/2012	4:27:32 PM	BCl3 valve closed
7/5/2012	4:27:32 PM	PH3 valve closed
7/5/2012	4:27:32 PM	SiCl4 pre valve closed
7/5/2012	4:27:32 PM	SiCl4 post valve closed
7/5/2012	4:27:32 PM	Bypass valve closed
7/5/2012	4:27:32 PM	Bubbler valve closed
7/5/2012	4:27:32 PM	Helium valve opened
7/5/2012	4:27:32 PM	Main Vac valve opened
7/5/2012	4:27:32 PM	Helium MFC set to  20.000000
7/5/2012	4:27:32 PM	H2 MFC set to  0.000000
7/5/2012	4:27:32 PM	BCl3 MFC set to  0.000000
7/5/2012	4:27:32 PM	PH3 MFC set to  0.000000
7/5/2012	4:27:32 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:27:32 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:27:33 PM	Tube furnace set to 150
7/5/2012	4:28:03 PM	Helium valve closed
7/5/2012	4:28:03 PM	H2 valve closed
7/5/2012	4:28:03 PM	BCl3 valve closed
7/5/2012	4:28:03 PM	PH3 valve closed
7/5/2012	4:28:03 PM	SiCl4 pre valve closed
7/5/2012	4:28:03 PM	SiCl4 post valve closed
7/5/2012	4:28:03 PM	Bypass valve closed
7/5/2012	4:28:03 PM	Bubbler valve closed
7/5/2012	4:28:03 PM	Main Vac valve opened
7/5/2012	4:28:03 PM	Helium MFC set to  0.000000
7/5/2012	4:28:03 PM	H2 MFC set to  0.000000
7/5/2012	4:28:03 PM	BCl3 MFC set to  0.000000
7/5/2012	4:28:03 PM	PH3 MFC set to  0.000000
7/5/2012	4:28:03 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:28:03 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:28:03 PM	Tube furnace set to 150
7/5/2012	4:28:33 PM	H2 valve closed
7/5/2012	4:28:33 PM	BCl3 valve closed
7/5/2012	4:28:33 PM	PH3 valve closed
7/5/2012	4:28:33 PM	SiCl4 pre valve closed
7/5/2012	4:28:33 PM	SiCl4 post valve closed
7/5/2012	4:28:33 PM	Bypass valve closed
7/5/2012	4:28:33 PM	Bubbler valve closed
7/5/2012	4:28:33 PM	Helium valve opened
7/5/2012	4:28:33 PM	Main Vac valve opened
7/5/2012	4:28:33 PM	Helium MFC set to  20.000000
7/5/2012	4:28:33 PM	H2 MFC set to  0.000000
7/5/2012	4:28:33 PM	BCl3 MFC set to  0.000000
7/5/2012	4:28:33 PM	PH3 MFC set to  0.000000
7/5/2012	4:28:33 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:28:33 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:28:33 PM	Tube furnace set to 150
7/5/2012	4:29:03 PM	Helium valve closed
7/5/2012	4:29:03 PM	H2 valve closed
7/5/2012	4:29:03 PM	BCl3 valve closed
7/5/2012	4:29:03 PM	PH3 valve closed
7/5/2012	4:29:03 PM	SiCl4 pre valve closed
7/5/2012	4:29:03 PM	SiCl4 post valve closed
7/5/2012	4:29:03 PM	Bypass valve closed
7/5/2012	4:29:03 PM	Bubbler valve closed
7/5/2012	4:29:03 PM	Main Vac valve opened
7/5/2012	4:29:03 PM	Helium MFC set to  0.000000
7/5/2012	4:29:03 PM	H2 MFC set to  0.000000
7/5/2012	4:29:03 PM	BCl3 MFC set to  0.000000
7/5/2012	4:29:03 PM	PH3 MFC set to  0.000000
7/5/2012	4:29:03 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:29:03 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:29:03 PM	Tube furnace set to 150
7/5/2012	4:29:33 PM	H2 valve closed
7/5/2012	4:29:33 PM	BCl3 valve closed
7/5/2012	4:29:33 PM	PH3 valve closed
7/5/2012	4:29:33 PM	SiCl4 pre valve closed
7/5/2012	4:29:33 PM	SiCl4 post valve closed
7/5/2012	4:29:33 PM	Bypass valve closed
7/5/2012	4:29:33 PM	Bubbler valve closed
7/5/2012	4:29:33 PM	Helium valve opened
7/5/2012	4:29:33 PM	Main Vac valve opened
7/5/2012	4:29:33 PM	Helium MFC set to  20.000000
7/5/2012	4:29:33 PM	H2 MFC set to  0.000000
7/5/2012	4:29:33 PM	BCl3 MFC set to  0.000000
7/5/2012	4:29:33 PM	PH3 MFC set to  0.000000
7/5/2012	4:29:33 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:29:33 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:29:34 PM	Tube furnace set to 150
7/5/2012	4:30:04 PM	Helium valve closed
7/5/2012	4:30:04 PM	H2 valve closed
7/5/2012	4:30:04 PM	BCl3 valve closed
7/5/2012	4:30:04 PM	PH3 valve closed
7/5/2012	4:30:04 PM	SiCl4 pre valve closed
7/5/2012	4:30:04 PM	SiCl4 post valve closed
7/5/2012	4:30:04 PM	Bypass valve closed
7/5/2012	4:30:04 PM	Bubbler valve closed
7/5/2012	4:30:04 PM	Main Vac valve opened
7/5/2012	4:30:04 PM	Helium MFC set to  0.000000
7/5/2012	4:30:04 PM	H2 MFC set to  0.000000
7/5/2012	4:30:04 PM	BCl3 MFC set to  0.000000
7/5/2012	4:30:04 PM	PH3 MFC set to  0.000000
7/5/2012	4:30:04 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:30:04 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:30:04 PM	Tube furnace set to 150
7/5/2012	4:30:34 PM	H2 valve closed
7/5/2012	4:30:34 PM	BCl3 valve closed
7/5/2012	4:30:34 PM	PH3 valve closed
7/5/2012	4:30:34 PM	SiCl4 pre valve closed
7/5/2012	4:30:34 PM	SiCl4 post valve closed
7/5/2012	4:30:34 PM	Bypass valve closed
7/5/2012	4:30:34 PM	Bubbler valve closed
7/5/2012	4:30:34 PM	Helium valve opened
7/5/2012	4:30:34 PM	Main Vac valve opened
7/5/2012	4:30:34 PM	Helium MFC set to  20.000000
7/5/2012	4:30:34 PM	H2 MFC set to  0.000000
7/5/2012	4:30:34 PM	BCl3 MFC set to  0.000000
7/5/2012	4:30:34 PM	PH3 MFC set to  0.000000
7/5/2012	4:30:34 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:30:34 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:30:34 PM	Tube furnace set to 150
7/5/2012	4:31:04 PM	Helium valve closed
7/5/2012	4:31:04 PM	H2 valve closed
7/5/2012	4:31:04 PM	BCl3 valve closed
7/5/2012	4:31:04 PM	PH3 valve closed
7/5/2012	4:31:04 PM	SiCl4 pre valve closed
7/5/2012	4:31:04 PM	SiCl4 post valve closed
7/5/2012	4:31:04 PM	Bypass valve closed
7/5/2012	4:31:04 PM	Bubbler valve closed
7/5/2012	4:31:04 PM	Main Vac valve opened
7/5/2012	4:31:04 PM	Helium MFC set to  0.000000
7/5/2012	4:31:04 PM	H2 MFC set to  0.000000
7/5/2012	4:31:04 PM	BCl3 MFC set to  0.000000
7/5/2012	4:31:04 PM	PH3 MFC set to  0.000000
7/5/2012	4:31:04 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:31:04 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:31:04 PM	Tube furnace set to 150
7/5/2012	4:31:34 PM	H2 valve closed
7/5/2012	4:31:34 PM	BCl3 valve closed
7/5/2012	4:31:34 PM	PH3 valve closed
7/5/2012	4:31:34 PM	SiCl4 pre valve closed
7/5/2012	4:31:34 PM	SiCl4 post valve closed
7/5/2012	4:31:34 PM	Bypass valve closed
7/5/2012	4:31:34 PM	Bubbler valve closed
7/5/2012	4:31:34 PM	Helium valve opened
7/5/2012	4:31:34 PM	Main Vac valve opened
7/5/2012	4:31:34 PM	Helium MFC set to  20.000000
7/5/2012	4:31:34 PM	H2 MFC set to  0.000000
7/5/2012	4:31:34 PM	BCl3 MFC set to  0.000000
7/5/2012	4:31:34 PM	PH3 MFC set to  0.000000
7/5/2012	4:31:34 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:31:34 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:31:34 PM	Tube furnace set to 150
7/5/2012	4:32:04 PM	Helium valve closed
7/5/2012	4:32:04 PM	H2 valve closed
7/5/2012	4:32:05 PM	BCl3 valve closed
7/5/2012	4:32:05 PM	PH3 valve closed
7/5/2012	4:32:05 PM	SiCl4 pre valve closed
7/5/2012	4:32:05 PM	SiCl4 post valve closed
7/5/2012	4:32:05 PM	Bypass valve closed
7/5/2012	4:32:05 PM	Bubbler valve closed
7/5/2012	4:32:05 PM	Main Vac valve opened
7/5/2012	4:32:05 PM	Helium MFC set to  0.000000
7/5/2012	4:32:05 PM	H2 MFC set to  0.000000
7/5/2012	4:32:05 PM	BCl3 MFC set to  0.000000
7/5/2012	4:32:05 PM	PH3 MFC set to  0.000000
7/5/2012	4:32:05 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:32:05 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:32:05 PM	Tube furnace set to 150
7/5/2012	4:32:35 PM	H2 valve closed
7/5/2012	4:32:35 PM	BCl3 valve closed
7/5/2012	4:32:35 PM	PH3 valve closed
7/5/2012	4:32:35 PM	SiCl4 pre valve closed
7/5/2012	4:32:35 PM	SiCl4 post valve closed
7/5/2012	4:32:35 PM	Bypass valve closed
7/5/2012	4:32:35 PM	Bubbler valve closed
7/5/2012	4:32:35 PM	Helium valve opened
7/5/2012	4:32:35 PM	Main Vac valve opened
7/5/2012	4:32:35 PM	Helium MFC set to  20.000000
7/5/2012	4:32:35 PM	H2 MFC set to  0.000000
7/5/2012	4:32:35 PM	BCl3 MFC set to  0.000000
7/5/2012	4:32:35 PM	PH3 MFC set to  0.000000
7/5/2012	4:32:35 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:32:35 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:32:35 PM	Tube furnace set to 150
7/5/2012	4:33:05 PM	Helium valve closed
7/5/2012	4:33:05 PM	H2 valve closed
7/5/2012	4:33:05 PM	BCl3 valve closed
7/5/2012	4:33:05 PM	PH3 valve closed
7/5/2012	4:33:05 PM	SiCl4 pre valve closed
7/5/2012	4:33:05 PM	SiCl4 post valve closed
7/5/2012	4:33:05 PM	Bypass valve closed
7/5/2012	4:33:05 PM	Bubbler valve closed
7/5/2012	4:33:05 PM	Main Vac valve opened
7/5/2012	4:33:05 PM	Helium MFC set to  0.000000
7/5/2012	4:33:05 PM	H2 MFC set to  0.000000
7/5/2012	4:33:05 PM	BCl3 MFC set to  0.000000
7/5/2012	4:33:05 PM	PH3 MFC set to  0.000000
7/5/2012	4:33:05 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:33:05 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:33:05 PM	Tube furnace set to 150
7/5/2012	4:33:35 PM	H2 valve closed
7/5/2012	4:33:35 PM	BCl3 valve closed
7/5/2012	4:33:35 PM	PH3 valve closed
7/5/2012	4:33:35 PM	SiCl4 pre valve closed
7/5/2012	4:33:35 PM	SiCl4 post valve closed
7/5/2012	4:33:35 PM	Bypass valve closed
7/5/2012	4:33:35 PM	Bubbler valve closed
7/5/2012	4:33:35 PM	Helium valve opened
7/5/2012	4:33:35 PM	Main Vac valve opened
7/5/2012	4:33:35 PM	Helium MFC set to  20.000000
7/5/2012	4:33:35 PM	H2 MFC set to  0.000000
7/5/2012	4:33:35 PM	BCl3 MFC set to  0.000000
7/5/2012	4:33:35 PM	PH3 MFC set to  0.000000
7/5/2012	4:33:35 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:33:35 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:33:35 PM	Tube furnace set to 150
7/5/2012	4:34:05 PM	Helium valve closed
7/5/2012	4:34:05 PM	H2 valve closed
7/5/2012	4:34:05 PM	BCl3 valve closed
7/5/2012	4:34:05 PM	PH3 valve closed
7/5/2012	4:34:05 PM	SiCl4 pre valve closed
7/5/2012	4:34:05 PM	SiCl4 post valve closed
7/5/2012	4:34:05 PM	Bypass valve closed
7/5/2012	4:34:05 PM	Bubbler valve closed
7/5/2012	4:34:05 PM	Main Vac valve opened
7/5/2012	4:34:05 PM	Helium MFC set to  0.000000
7/5/2012	4:34:05 PM	H2 MFC set to  0.000000
7/5/2012	4:34:05 PM	BCl3 MFC set to  0.000000
7/5/2012	4:34:05 PM	PH3 MFC set to  0.000000
7/5/2012	4:34:05 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:34:06 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:34:06 PM	Tube furnace set to 150
7/5/2012	4:34:36 PM	H2 valve closed
7/5/2012	4:34:36 PM	BCl3 valve closed
7/5/2012	4:34:36 PM	PH3 valve closed
7/5/2012	4:34:36 PM	SiCl4 pre valve closed
7/5/2012	4:34:36 PM	SiCl4 post valve closed
7/5/2012	4:34:36 PM	Bypass valve closed
7/5/2012	4:34:36 PM	Bubbler valve closed
7/5/2012	4:34:36 PM	Helium valve opened
7/5/2012	4:34:36 PM	Main Vac valve opened
7/5/2012	4:34:36 PM	Helium MFC set to  20.000000
7/5/2012	4:34:36 PM	H2 MFC set to  0.000000
7/5/2012	4:34:36 PM	BCl3 MFC set to  0.000000
7/5/2012	4:34:36 PM	PH3 MFC set to  0.000000
7/5/2012	4:34:36 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:34:36 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:34:36 PM	Tube furnace set to 150
7/5/2012	4:35:06 PM	Helium valve closed
7/5/2012	4:35:06 PM	H2 valve closed
7/5/2012	4:35:06 PM	BCl3 valve closed
7/5/2012	4:35:06 PM	PH3 valve closed
7/5/2012	4:35:06 PM	SiCl4 pre valve closed
7/5/2012	4:35:06 PM	SiCl4 post valve closed
7/5/2012	4:35:06 PM	Bypass valve closed
7/5/2012	4:35:06 PM	Bubbler valve closed
7/5/2012	4:35:06 PM	Main Vac valve opened
7/5/2012	4:35:06 PM	Helium MFC set to  0.000000
7/5/2012	4:35:06 PM	H2 MFC set to  0.000000
7/5/2012	4:35:06 PM	BCl3 MFC set to  0.000000
7/5/2012	4:35:06 PM	PH3 MFC set to  0.000000
7/5/2012	4:35:06 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:35:06 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:35:06 PM	Tube furnace set to 150
7/5/2012	4:35:36 PM	H2 valve closed
7/5/2012	4:35:36 PM	BCl3 valve closed
7/5/2012	4:35:36 PM	PH3 valve closed
7/5/2012	4:35:36 PM	SiCl4 pre valve closed
7/5/2012	4:35:36 PM	SiCl4 post valve closed
7/5/2012	4:35:36 PM	Bypass valve closed
7/5/2012	4:35:36 PM	Bubbler valve closed
7/5/2012	4:35:36 PM	Helium valve opened
7/5/2012	4:35:36 PM	Main Vac valve opened
7/5/2012	4:35:36 PM	Helium MFC set to  20.000000
7/5/2012	4:35:36 PM	H2 MFC set to  0.000000
7/5/2012	4:35:36 PM	BCl3 MFC set to  0.000000
7/5/2012	4:35:36 PM	PH3 MFC set to  0.000000
7/5/2012	4:35:36 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:35:36 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:35:36 PM	Tube furnace set to 150
7/5/2012	4:36:06 PM	Helium valve closed
7/5/2012	4:36:06 PM	H2 valve closed
7/5/2012	4:36:06 PM	BCl3 valve closed
7/5/2012	4:36:06 PM	PH3 valve closed
7/5/2012	4:36:06 PM	SiCl4 pre valve closed
7/5/2012	4:36:06 PM	SiCl4 post valve closed
7/5/2012	4:36:06 PM	Bypass valve closed
7/5/2012	4:36:06 PM	Bubbler valve closed
7/5/2012	4:36:06 PM	Main Vac valve opened
7/5/2012	4:36:06 PM	Helium MFC set to  0.000000
7/5/2012	4:36:06 PM	H2 MFC set to  0.000000
7/5/2012	4:36:06 PM	BCl3 MFC set to  0.000000
7/5/2012	4:36:06 PM	PH3 MFC set to  0.000000
7/5/2012	4:36:06 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:36:06 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:36:07 PM	Tube furnace set to 150
7/5/2012	4:36:08 PM	Run finished at 4:36 PM
7/5/2012	4:37:53 PM	Recipe started at 4:37 PM
7/5/2012	4:37:53 PM	Helium valve closed
7/5/2012	4:37:53 PM	H2 valve closed
7/5/2012	4:37:53 PM	BCl3 valve closed
7/5/2012	4:37:53 PM	PH3 valve closed
7/5/2012	4:37:53 PM	SiCl4 pre valve closed
7/5/2012	4:37:53 PM	SiCl4 post valve closed
7/5/2012	4:37:53 PM	Bypass valve closed
7/5/2012	4:37:53 PM	Bubbler valve closed
7/5/2012	4:37:53 PM	Main Vac valve opened
7/5/2012	4:37:53 PM	Helium MFC set to  0.000000
7/5/2012	4:37:53 PM	H2 MFC set to  0.000000
7/5/2012	4:37:53 PM	BCl3 MFC set to  0.000000
7/5/2012	4:37:53 PM	PH3 MFC set to  0.000000
7/5/2012	4:37:53 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:37:53 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:37:53 PM	Tube furnace set to 150
7/5/2012	4:38:23 PM	H2 valve closed
7/5/2012	4:38:23 PM	BCl3 valve closed
7/5/2012	4:38:23 PM	PH3 valve closed
7/5/2012	4:38:23 PM	SiCl4 pre valve closed
7/5/2012	4:38:23 PM	SiCl4 post valve closed
7/5/2012	4:38:23 PM	Bypass valve closed
7/5/2012	4:38:23 PM	Bubbler valve closed
7/5/2012	4:38:23 PM	Helium valve opened
7/5/2012	4:38:23 PM	Main Vac valve opened
7/5/2012	4:38:23 PM	Helium MFC set to  20.000000
7/5/2012	4:38:23 PM	H2 MFC set to  0.000000
7/5/2012	4:38:23 PM	BCl3 MFC set to  0.000000
7/5/2012	4:38:23 PM	PH3 MFC set to  0.000000
7/5/2012	4:38:23 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:38:23 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:38:23 PM	Tube furnace set to 150
7/5/2012	4:38:53 PM	Helium valve closed
7/5/2012	4:38:53 PM	H2 valve closed
7/5/2012	4:38:53 PM	BCl3 valve closed
7/5/2012	4:38:53 PM	PH3 valve closed
7/5/2012	4:38:53 PM	SiCl4 pre valve closed
7/5/2012	4:38:53 PM	SiCl4 post valve closed
7/5/2012	4:38:53 PM	Bypass valve closed
7/5/2012	4:38:53 PM	Bubbler valve closed
7/5/2012	4:38:53 PM	Main Vac valve opened
7/5/2012	4:38:53 PM	Helium MFC set to  0.000000
7/5/2012	4:38:53 PM	H2 MFC set to  0.000000
7/5/2012	4:38:53 PM	BCl3 MFC set to  0.000000
7/5/2012	4:38:53 PM	PH3 MFC set to  0.000000
7/5/2012	4:38:53 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:38:53 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:38:53 PM	Tube furnace set to 150
7/5/2012	4:39:23 PM	H2 valve closed
7/5/2012	4:39:23 PM	BCl3 valve closed
7/5/2012	4:39:23 PM	PH3 valve closed
7/5/2012	4:39:23 PM	SiCl4 pre valve closed
7/5/2012	4:39:23 PM	SiCl4 post valve closed
7/5/2012	4:39:23 PM	Bypass valve closed
7/5/2012	4:39:23 PM	Bubbler valve closed
7/5/2012	4:39:23 PM	Helium valve opened
7/5/2012	4:39:23 PM	Main Vac valve opened
7/5/2012	4:39:23 PM	Helium MFC set to  20.000000
7/5/2012	4:39:23 PM	H2 MFC set to  0.000000
7/5/2012	4:39:23 PM	BCl3 MFC set to  0.000000
7/5/2012	4:39:23 PM	PH3 MFC set to  0.000000
7/5/2012	4:39:23 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:39:23 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:39:23 PM	Tube furnace set to 150
7/5/2012	4:39:53 PM	Helium valve closed
7/5/2012	4:39:53 PM	H2 valve closed
7/5/2012	4:39:53 PM	BCl3 valve closed
7/5/2012	4:39:53 PM	PH3 valve closed
7/5/2012	4:39:53 PM	SiCl4 pre valve closed
7/5/2012	4:39:53 PM	SiCl4 post valve closed
7/5/2012	4:39:54 PM	Bypass valve closed
7/5/2012	4:39:54 PM	Bubbler valve closed
7/5/2012	4:39:54 PM	Main Vac valve opened
7/5/2012	4:39:54 PM	Helium MFC set to  0.000000
7/5/2012	4:39:54 PM	H2 MFC set to  0.000000
7/5/2012	4:39:54 PM	BCl3 MFC set to  0.000000
7/5/2012	4:39:54 PM	PH3 MFC set to  0.000000
7/5/2012	4:39:54 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:39:54 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:39:54 PM	Tube furnace set to 150
7/5/2012	4:40:24 PM	H2 valve closed
7/5/2012	4:40:24 PM	BCl3 valve closed
7/5/2012	4:40:24 PM	PH3 valve closed
7/5/2012	4:40:24 PM	SiCl4 pre valve closed
7/5/2012	4:40:24 PM	SiCl4 post valve closed
7/5/2012	4:40:24 PM	Bypass valve closed
7/5/2012	4:40:24 PM	Bubbler valve closed
7/5/2012	4:40:24 PM	Helium valve opened
7/5/2012	4:40:24 PM	Main Vac valve opened
7/5/2012	4:40:24 PM	Helium MFC set to  20.000000
7/5/2012	4:40:24 PM	H2 MFC set to  0.000000
7/5/2012	4:40:24 PM	BCl3 MFC set to  0.000000
7/5/2012	4:40:24 PM	PH3 MFC set to  0.000000
7/5/2012	4:40:24 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:40:24 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:40:24 PM	Tube furnace set to 150
7/5/2012	4:40:54 PM	Helium valve closed
7/5/2012	4:40:54 PM	H2 valve closed
7/5/2012	4:40:54 PM	BCl3 valve closed
7/5/2012	4:40:54 PM	PH3 valve closed
7/5/2012	4:40:54 PM	SiCl4 pre valve closed
7/5/2012	4:40:54 PM	SiCl4 post valve closed
7/5/2012	4:40:54 PM	Bypass valve closed
7/5/2012	4:40:54 PM	Bubbler valve closed
7/5/2012	4:40:54 PM	Main Vac valve opened
7/5/2012	4:40:54 PM	Helium MFC set to  0.000000
7/5/2012	4:40:54 PM	H2 MFC set to  0.000000
7/5/2012	4:40:54 PM	BCl3 MFC set to  0.000000
7/5/2012	4:40:54 PM	PH3 MFC set to  0.000000
7/5/2012	4:40:54 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:40:54 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:40:54 PM	Tube furnace set to 150
7/5/2012	4:41:24 PM	H2 valve closed
7/5/2012	4:41:24 PM	BCl3 valve closed
7/5/2012	4:41:24 PM	PH3 valve closed
7/5/2012	4:41:24 PM	SiCl4 pre valve closed
7/5/2012	4:41:24 PM	SiCl4 post valve closed
7/5/2012	4:41:24 PM	Bypass valve closed
7/5/2012	4:41:24 PM	Bubbler valve closed
7/5/2012	4:41:24 PM	Helium valve opened
7/5/2012	4:41:24 PM	Main Vac valve opened
7/5/2012	4:41:24 PM	Helium MFC set to  20.000000
7/5/2012	4:41:24 PM	H2 MFC set to  0.000000
7/5/2012	4:41:24 PM	BCl3 MFC set to  0.000000
7/5/2012	4:41:24 PM	PH3 MFC set to  0.000000
7/5/2012	4:41:24 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:41:24 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:41:24 PM	Tube furnace set to 150
7/5/2012	4:41:54 PM	Helium valve closed
7/5/2012	4:41:54 PM	H2 valve closed
7/5/2012	4:41:54 PM	BCl3 valve closed
7/5/2012	4:41:54 PM	PH3 valve closed
7/5/2012	4:41:54 PM	SiCl4 pre valve closed
7/5/2012	4:41:54 PM	SiCl4 post valve closed
7/5/2012	4:41:54 PM	Bypass valve closed
7/5/2012	4:41:54 PM	Bubbler valve closed
7/5/2012	4:41:54 PM	Main Vac valve opened
7/5/2012	4:41:54 PM	Helium MFC set to  0.000000
7/5/2012	4:41:54 PM	H2 MFC set to  0.000000
7/5/2012	4:41:54 PM	BCl3 MFC set to  0.000000
7/5/2012	4:41:54 PM	PH3 MFC set to  0.000000
7/5/2012	4:41:54 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:41:54 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:41:55 PM	Tube furnace set to 150
7/5/2012	4:42:25 PM	H2 valve closed
7/5/2012	4:42:25 PM	BCl3 valve closed
7/5/2012	4:42:25 PM	PH3 valve closed
7/5/2012	4:42:25 PM	SiCl4 pre valve closed
7/5/2012	4:42:25 PM	SiCl4 post valve closed
7/5/2012	4:42:25 PM	Bypass valve closed
7/5/2012	4:42:25 PM	Bubbler valve closed
7/5/2012	4:42:25 PM	Helium valve opened
7/5/2012	4:42:25 PM	Main Vac valve opened
7/5/2012	4:42:25 PM	Helium MFC set to  20.000000
7/5/2012	4:42:25 PM	H2 MFC set to  0.000000
7/5/2012	4:42:25 PM	BCl3 MFC set to  0.000000
7/5/2012	4:42:25 PM	PH3 MFC set to  0.000000
7/5/2012	4:42:25 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:42:25 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:42:25 PM	Tube furnace set to 150
7/5/2012	4:42:55 PM	Helium valve closed
7/5/2012	4:42:55 PM	H2 valve closed
7/5/2012	4:42:55 PM	BCl3 valve closed
7/5/2012	4:42:55 PM	PH3 valve closed
7/5/2012	4:42:55 PM	SiCl4 pre valve closed
7/5/2012	4:42:55 PM	SiCl4 post valve closed
7/5/2012	4:42:55 PM	Bypass valve closed
7/5/2012	4:42:55 PM	Bubbler valve closed
7/5/2012	4:42:55 PM	Main Vac valve opened
7/5/2012	4:42:55 PM	Helium MFC set to  0.000000
7/5/2012	4:42:55 PM	H2 MFC set to  0.000000
7/5/2012	4:42:55 PM	BCl3 MFC set to  0.000000
7/5/2012	4:42:55 PM	PH3 MFC set to  0.000000
7/5/2012	4:42:55 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:42:55 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:42:55 PM	Tube furnace set to 150
7/5/2012	4:43:25 PM	H2 valve closed
7/5/2012	4:43:25 PM	BCl3 valve closed
7/5/2012	4:43:25 PM	PH3 valve closed
7/5/2012	4:43:25 PM	SiCl4 pre valve closed
7/5/2012	4:43:25 PM	SiCl4 post valve closed
7/5/2012	4:43:25 PM	Bypass valve closed
7/5/2012	4:43:25 PM	Bubbler valve closed
7/5/2012	4:43:25 PM	Helium valve opened
7/5/2012	4:43:25 PM	Main Vac valve opened
7/5/2012	4:43:25 PM	Helium MFC set to  20.000000
7/5/2012	4:43:25 PM	H2 MFC set to  0.000000
7/5/2012	4:43:25 PM	BCl3 MFC set to  0.000000
7/5/2012	4:43:25 PM	PH3 MFC set to  0.000000
7/5/2012	4:43:25 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:43:25 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:43:25 PM	Tube furnace set to 150
7/5/2012	4:43:55 PM	Helium valve closed
7/5/2012	4:43:55 PM	H2 valve closed
7/5/2012	4:43:55 PM	BCl3 valve closed
7/5/2012	4:43:55 PM	PH3 valve closed
7/5/2012	4:43:55 PM	SiCl4 pre valve closed
7/5/2012	4:43:55 PM	SiCl4 post valve closed
7/5/2012	4:43:55 PM	Bypass valve closed
7/5/2012	4:43:55 PM	Bubbler valve closed
7/5/2012	4:43:55 PM	Main Vac valve opened
7/5/2012	4:43:55 PM	Helium MFC set to  0.000000
7/5/2012	4:43:55 PM	H2 MFC set to  0.000000
7/5/2012	4:43:55 PM	BCl3 MFC set to  0.000000
7/5/2012	4:43:55 PM	PH3 MFC set to  0.000000
7/5/2012	4:43:55 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:43:55 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:43:56 PM	Tube furnace set to 150
7/5/2012	4:44:26 PM	H2 valve closed
7/5/2012	4:44:26 PM	BCl3 valve closed
7/5/2012	4:44:26 PM	PH3 valve closed
7/5/2012	4:44:26 PM	SiCl4 pre valve closed
7/5/2012	4:44:26 PM	SiCl4 post valve closed
7/5/2012	4:44:26 PM	Bypass valve closed
7/5/2012	4:44:26 PM	Bubbler valve closed
7/5/2012	4:44:26 PM	Helium valve opened
7/5/2012	4:44:26 PM	Main Vac valve opened
7/5/2012	4:44:26 PM	Helium MFC set to  20.000000
7/5/2012	4:44:26 PM	H2 MFC set to  0.000000
7/5/2012	4:44:26 PM	BCl3 MFC set to  0.000000
7/5/2012	4:44:26 PM	PH3 MFC set to  0.000000
7/5/2012	4:44:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:44:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:44:26 PM	Tube furnace set to 150
7/5/2012	4:44:56 PM	Helium valve closed
7/5/2012	4:44:56 PM	H2 valve closed
7/5/2012	4:44:56 PM	BCl3 valve closed
7/5/2012	4:44:56 PM	PH3 valve closed
7/5/2012	4:44:56 PM	SiCl4 pre valve closed
7/5/2012	4:44:56 PM	SiCl4 post valve closed
7/5/2012	4:44:56 PM	Bypass valve closed
7/5/2012	4:44:56 PM	Bubbler valve closed
7/5/2012	4:44:56 PM	Main Vac valve opened
7/5/2012	4:44:56 PM	Helium MFC set to  0.000000
7/5/2012	4:44:56 PM	H2 MFC set to  0.000000
7/5/2012	4:44:56 PM	BCl3 MFC set to  0.000000
7/5/2012	4:44:56 PM	PH3 MFC set to  0.000000
7/5/2012	4:44:56 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:44:56 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:44:56 PM	Tube furnace set to 150
7/5/2012	4:45:26 PM	H2 valve closed
7/5/2012	4:45:26 PM	BCl3 valve closed
7/5/2012	4:45:26 PM	PH3 valve closed
7/5/2012	4:45:26 PM	SiCl4 pre valve closed
7/5/2012	4:45:26 PM	SiCl4 post valve closed
7/5/2012	4:45:26 PM	Bypass valve closed
7/5/2012	4:45:26 PM	Bubbler valve closed
7/5/2012	4:45:26 PM	Helium valve opened
7/5/2012	4:45:26 PM	Main Vac valve opened
7/5/2012	4:45:26 PM	Helium MFC set to  20.000000
7/5/2012	4:45:26 PM	H2 MFC set to  0.000000
7/5/2012	4:45:26 PM	BCl3 MFC set to  0.000000
7/5/2012	4:45:26 PM	PH3 MFC set to  0.000000
7/5/2012	4:45:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:45:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:45:26 PM	Tube furnace set to 150
7/5/2012	4:45:56 PM	Helium valve closed
7/5/2012	4:45:56 PM	H2 valve closed
7/5/2012	4:45:56 PM	BCl3 valve closed
7/5/2012	4:45:56 PM	PH3 valve closed
7/5/2012	4:45:56 PM	SiCl4 pre valve closed
7/5/2012	4:45:56 PM	SiCl4 post valve closed
7/5/2012	4:45:56 PM	Bypass valve closed
7/5/2012	4:45:56 PM	Bubbler valve closed
7/5/2012	4:45:56 PM	Main Vac valve opened
7/5/2012	4:45:56 PM	Helium MFC set to  0.000000
7/5/2012	4:45:56 PM	H2 MFC set to  0.000000
7/5/2012	4:45:56 PM	BCl3 MFC set to  0.000000
7/5/2012	4:45:56 PM	PH3 MFC set to  0.000000
7/5/2012	4:45:56 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:45:56 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:45:57 PM	Tube furnace set to 150
7/5/2012	4:46:27 PM	H2 valve closed
7/5/2012	4:46:27 PM	BCl3 valve closed
7/5/2012	4:46:27 PM	PH3 valve closed
7/5/2012	4:46:27 PM	SiCl4 pre valve closed
7/5/2012	4:46:27 PM	SiCl4 post valve closed
7/5/2012	4:46:27 PM	Bypass valve closed
7/5/2012	4:46:27 PM	Bubbler valve closed
7/5/2012	4:46:27 PM	Helium valve opened
7/5/2012	4:46:27 PM	Main Vac valve opened
7/5/2012	4:46:27 PM	Helium MFC set to  20.000000
7/5/2012	4:46:27 PM	H2 MFC set to  0.000000
7/5/2012	4:46:27 PM	BCl3 MFC set to  0.000000
7/5/2012	4:46:27 PM	PH3 MFC set to  0.000000
7/5/2012	4:46:27 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:46:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:46:27 PM	Tube furnace set to 150
7/5/2012	4:46:57 PM	Helium valve closed
7/5/2012	4:46:57 PM	H2 valve closed
7/5/2012	4:46:57 PM	BCl3 valve closed
7/5/2012	4:46:57 PM	PH3 valve closed
7/5/2012	4:46:57 PM	SiCl4 pre valve closed
7/5/2012	4:46:57 PM	SiCl4 post valve closed
7/5/2012	4:46:57 PM	Bypass valve closed
7/5/2012	4:46:57 PM	Bubbler valve closed
7/5/2012	4:46:57 PM	Main Vac valve opened
7/5/2012	4:46:57 PM	Helium MFC set to  0.000000
7/5/2012	4:46:57 PM	H2 MFC set to  0.000000
7/5/2012	4:46:57 PM	BCl3 MFC set to  0.000000
7/5/2012	4:46:57 PM	PH3 MFC set to  0.000000
7/5/2012	4:46:57 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:46:57 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:46:57 PM	Tube furnace set to 150
7/5/2012	4:47:27 PM	H2 valve closed
7/5/2012	4:47:27 PM	BCl3 valve closed
7/5/2012	4:47:27 PM	PH3 valve closed
7/5/2012	4:47:27 PM	SiCl4 pre valve closed
7/5/2012	4:47:27 PM	SiCl4 post valve closed
7/5/2012	4:47:27 PM	Bypass valve closed
7/5/2012	4:47:27 PM	Bubbler valve closed
7/5/2012	4:47:27 PM	Helium valve opened
7/5/2012	4:47:27 PM	Main Vac valve opened
7/5/2012	4:47:27 PM	Helium MFC set to  20.000000
7/5/2012	4:47:27 PM	H2 MFC set to  0.000000
7/5/2012	4:47:27 PM	BCl3 MFC set to  0.000000
7/5/2012	4:47:27 PM	PH3 MFC set to  0.000000
7/5/2012	4:47:27 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:47:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:47:27 PM	Tube furnace set to 150
7/5/2012	4:47:57 PM	Helium valve closed
7/5/2012	4:47:57 PM	H2 valve closed
7/5/2012	4:47:57 PM	BCl3 valve closed
7/5/2012	4:47:57 PM	PH3 valve closed
7/5/2012	4:47:57 PM	SiCl4 pre valve closed
7/5/2012	4:47:57 PM	SiCl4 post valve closed
7/5/2012	4:47:57 PM	Bypass valve closed
7/5/2012	4:47:57 PM	Bubbler valve closed
7/5/2012	4:47:57 PM	Main Vac valve opened
7/5/2012	4:47:57 PM	Helium MFC set to  0.000000
7/5/2012	4:47:57 PM	H2 MFC set to  0.000000
7/5/2012	4:47:57 PM	BCl3 MFC set to  0.000000
7/5/2012	4:47:57 PM	PH3 MFC set to  0.000000
7/5/2012	4:47:57 PM	SiCl4 MFC set to  0.000000
7/5/2012	4:47:57 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	4:47:57 PM	Tube furnace set to 150
7/5/2012	4:47:58 PM	Run finished at 4:47 PM
7/5/2012	4:55:49 PM	Main Vac valve closed
7/5/2012	4:56:03 PM	Main Vac valve opened
7/5/2012	5:00:10 PM	Recipe started at 5:00 PM
7/5/2012	5:00:10 PM	Helium valve closed
7/5/2012	5:00:10 PM	H2 valve closed
7/5/2012	5:00:10 PM	BCl3 valve closed
7/5/2012	5:00:10 PM	PH3 valve closed
7/5/2012	5:00:10 PM	SiCl4 pre valve closed
7/5/2012	5:00:10 PM	SiCl4 post valve closed
7/5/2012	5:00:10 PM	Main Vac valve closed
7/5/2012	5:00:10 PM	Bypass valve closed
7/5/2012	5:00:10 PM	Bubbler valve closed
7/5/2012	5:00:10 PM	Helium MFC set to  0.000000
7/5/2012	5:00:10 PM	H2 MFC set to  0.000000
7/5/2012	5:00:10 PM	BCl3 MFC set to  0.000000
7/5/2012	5:00:10 PM	PH3 MFC set to  0.000000
7/5/2012	5:00:10 PM	SiCl4 MFC set to  0.000000
7/5/2012	5:00:10 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	5:00:10 PM	Tube furnace set to 0
7/5/2012	5:00:13 PM	Helium valve closed
7/5/2012	5:00:13 PM	BCl3 valve closed
7/5/2012	5:00:13 PM	PH3 valve closed
7/5/2012	5:00:13 PM	SiCl4 pre valve closed
7/5/2012	5:00:13 PM	SiCl4 post valve closed
7/5/2012	5:00:13 PM	Main Vac valve closed
7/5/2012	5:00:13 PM	Bypass valve closed
7/5/2012	5:00:13 PM	Bubbler valve closed
7/5/2012	5:00:13 PM	H2 valve opened
7/5/2012	5:00:13 PM	Helium MFC set to  0.000000
7/5/2012	5:00:13 PM	H2 MFC set to  500.000000
7/5/2012	5:00:13 PM	BCl3 MFC set to  0.000000
7/5/2012	5:00:13 PM	PH3 MFC set to  0.000000
7/5/2012	5:00:13 PM	SiCl4 MFC set to  0.000000
7/5/2012	5:00:13 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	5:00:14 PM	Tube furnace set to 0
7/5/2012	5:01:26 PM	Helium valve closed
7/5/2012	5:01:26 PM	BCl3 valve closed
7/5/2012	5:01:26 PM	PH3 valve closed
7/5/2012	5:01:26 PM	SiCl4 pre valve closed
7/5/2012	5:01:26 PM	SiCl4 post valve closed
7/5/2012	5:01:26 PM	Main Vac valve closed
7/5/2012	5:01:26 PM	Bypass valve closed
7/5/2012	5:01:26 PM	H2 valve opened
7/5/2012	5:01:26 PM	Bubbler valve opened
7/5/2012	5:01:26 PM	Helium MFC set to  0.000000
7/5/2012	5:01:26 PM	H2 MFC set to  500.000000
7/5/2012	5:01:26 PM	BCl3 MFC set to  0.000000
7/5/2012	5:01:26 PM	PH3 MFC set to  0.000000
7/5/2012	5:01:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	5:01:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	5:01:26 PM	Tube furnace set to 0
7/5/2012	5:01:27 PM	Helium valve closed
7/5/2012	5:01:27 PM	BCl3 valve closed
7/5/2012	5:01:27 PM	PH3 valve closed
7/5/2012	5:01:27 PM	SiCl4 pre valve closed
7/5/2012	5:01:27 PM	SiCl4 post valve closed
7/5/2012	5:01:27 PM	Main Vac valve closed
7/5/2012	5:01:27 PM	Bypass valve closed
7/5/2012	5:01:27 PM	H2 valve opened
7/5/2012	5:01:27 PM	Bubbler valve opened
7/5/2012	5:01:27 PM	Helium MFC set to  0.000000
7/5/2012	5:01:27 PM	H2 MFC set to  500.000000
7/5/2012	5:01:27 PM	BCl3 MFC set to  0.000000
7/5/2012	5:01:27 PM	PH3 MFC set to  0.000000
7/5/2012	5:01:27 PM	SiCl4 MFC set to  0.000000
7/5/2012	5:01:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	5:01:27 PM	Tube furnace set to 1000
7/5/2012	5:41:27 PM	Helium valve closed
7/5/2012	5:41:27 PM	PH3 valve closed
7/5/2012	5:41:27 PM	Main Vac valve closed
7/5/2012	5:41:27 PM	Bypass valve closed
7/5/2012	5:41:27 PM	H2 valve opened
7/5/2012	5:41:27 PM	BCl3 valve opened
7/5/2012	5:41:27 PM	SiCl4 pre valve opened
7/5/2012	5:41:27 PM	SiCl4 post valve opened
7/5/2012	5:41:27 PM	Bubbler valve opened
7/5/2012	5:41:27 PM	Helium MFC set to  0.000000
7/5/2012	5:41:27 PM	H2 MFC set to  500.000000
7/5/2012	5:41:27 PM	BCl3 MFC set to  1.000000
7/5/2012	5:41:27 PM	PH3 MFC set to  0.000000
7/5/2012	5:41:27 PM	SiCl4 MFC set to  50.000000
7/5/2012	5:41:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	5:41:28 PM	Tube furnace set to 1000
7/5/2012	6:01:28 PM	Helium valve closed
7/5/2012	6:01:28 PM	BCl3 valve closed
7/5/2012	6:01:28 PM	PH3 valve closed
7/5/2012	6:01:28 PM	SiCl4 pre valve closed
7/5/2012	6:01:28 PM	SiCl4 post valve closed
7/5/2012	6:01:28 PM	Main Vac valve closed
7/5/2012	6:01:28 PM	Bypass valve closed
7/5/2012	6:01:28 PM	H2 valve opened
7/5/2012	6:01:28 PM	Bubbler valve opened
7/5/2012	6:01:28 PM	Helium MFC set to  0.000000
7/5/2012	6:01:28 PM	H2 MFC set to  500.000000
7/5/2012	6:01:28 PM	BCl3 MFC set to  0.000000
7/5/2012	6:01:28 PM	PH3 MFC set to  0.000000
7/5/2012	6:01:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:01:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:01:28 PM	Tube furnace set to 750
7/5/2012	6:06:28 PM	H2 valve closed
7/5/2012	6:06:28 PM	BCl3 valve closed
7/5/2012	6:06:28 PM	PH3 valve closed
7/5/2012	6:06:28 PM	SiCl4 pre valve closed
7/5/2012	6:06:28 PM	SiCl4 post valve closed
7/5/2012	6:06:28 PM	Main Vac valve closed
7/5/2012	6:06:28 PM	Bypass valve closed
7/5/2012	6:06:28 PM	Helium valve opened
7/5/2012	6:06:28 PM	Bubbler valve opened
7/5/2012	6:06:28 PM	Helium MFC set to  500.000000
7/5/2012	6:06:28 PM	H2 MFC set to  0.000000
7/5/2012	6:06:28 PM	BCl3 MFC set to  0.000000
7/5/2012	6:06:28 PM	PH3 MFC set to  0.000000
7/5/2012	6:06:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:06:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:06:28 PM	Tube furnace set to 0
7/5/2012	6:26:28 PM	Helium valve closed
7/5/2012	6:26:28 PM	H2 valve closed
7/5/2012	6:26:28 PM	BCl3 valve closed
7/5/2012	6:26:28 PM	PH3 valve closed
7/5/2012	6:26:28 PM	SiCl4 pre valve closed
7/5/2012	6:26:28 PM	SiCl4 post valve closed
7/5/2012	6:26:28 PM	Main Vac valve closed
7/5/2012	6:26:28 PM	Bypass valve closed
7/5/2012	6:26:28 PM	Bubbler valve closed
7/5/2012	6:26:28 PM	Helium MFC set to  0.000000
7/5/2012	6:26:28 PM	H2 MFC set to  0.000000
7/5/2012	6:26:28 PM	BCl3 MFC set to  0.000000
7/5/2012	6:26:28 PM	PH3 MFC set to  0.000000
7/5/2012	6:26:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:26:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:26:28 PM	Tube furnace set to 0
7/5/2012	6:26:29 PM	Run finished at 6:26 PM
7/5/2012	6:45:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	6:46:00 PM	Recipe started at 6:46 PM
7/5/2012	6:46:00 PM	Helium valve closed
7/5/2012	6:46:00 PM	H2 valve closed
7/5/2012	6:46:00 PM	BCl3 valve closed
7/5/2012	6:46:00 PM	PH3 valve closed
7/5/2012	6:46:00 PM	SiCl4 pre valve closed
7/5/2012	6:46:00 PM	SiCl4 post valve closed
7/5/2012	6:46:00 PM	Main Vac valve closed
7/5/2012	6:46:00 PM	Bypass valve closed
7/5/2012	6:46:00 PM	Bubbler valve closed
7/5/2012	6:46:00 PM	Helium MFC set to  0.000000
7/5/2012	6:46:00 PM	H2 MFC set to  0.000000
7/5/2012	6:46:00 PM	BCl3 MFC set to  0.000000
7/5/2012	6:46:00 PM	PH3 MFC set to  0.000000
7/5/2012	6:46:00 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:46:00 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:46:00 PM	Tube furnace set to 0
7/5/2012	6:46:03 PM	H2 valve closed
7/5/2012	6:46:03 PM	BCl3 valve closed
7/5/2012	6:46:03 PM	PH3 valve closed
7/5/2012	6:46:03 PM	SiCl4 pre valve closed
7/5/2012	6:46:03 PM	SiCl4 post valve closed
7/5/2012	6:46:03 PM	Main Vac valve closed
7/5/2012	6:46:03 PM	Bypass valve closed
7/5/2012	6:46:04 PM	Bubbler valve closed
7/5/2012	6:46:04 PM	Helium valve opened
7/5/2012	6:46:04 PM	Helium MFC set to  500.000000
7/5/2012	6:46:04 PM	H2 MFC set to  0.000000
7/5/2012	6:46:04 PM	BCl3 MFC set to  0.000000
7/5/2012	6:46:04 PM	PH3 MFC set to  0.000000
7/5/2012	6:46:04 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:46:04 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:46:04 PM	Tube furnace set to 0
7/5/2012	6:46:08 PM	Helium valve closed
7/5/2012	6:46:08 PM	H2 valve closed
7/5/2012	6:46:08 PM	BCl3 valve closed
7/5/2012	6:46:08 PM	PH3 valve closed
7/5/2012	6:46:08 PM	SiCl4 pre valve closed
7/5/2012	6:46:08 PM	SiCl4 post valve closed
7/5/2012	6:46:08 PM	Main Vac valve closed
7/5/2012	6:46:08 PM	Bypass valve closed
7/5/2012	6:46:08 PM	Bubbler valve closed
7/5/2012	6:46:08 PM	Helium MFC set to  0.000000
7/5/2012	6:46:08 PM	H2 MFC set to  0.000000
7/5/2012	6:46:08 PM	BCl3 MFC set to  0.000000
7/5/2012	6:46:08 PM	PH3 MFC set to  0.000000
7/5/2012	6:46:08 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:46:08 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:46:08 PM	Tube furnace set to 0
7/5/2012	6:46:09 PM	Run finished at 6:46 PM
7/5/2012	6:46:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/5/2012	6:48:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	6:48:34 PM	Recipe started at 6:48 PM
7/5/2012	6:48:34 PM	Helium valve closed
7/5/2012	6:48:34 PM	H2 valve closed
7/5/2012	6:48:34 PM	BCl3 valve closed
7/5/2012	6:48:34 PM	PH3 valve closed
7/5/2012	6:48:34 PM	SiCl4 pre valve closed
7/5/2012	6:48:34 PM	SiCl4 post valve closed
7/5/2012	6:48:34 PM	Main Vac valve closed
7/5/2012	6:48:34 PM	Bubbler valve closed
7/5/2012	6:48:34 PM	Bypass valve opened
7/5/2012	6:48:34 PM	Helium MFC set to  0.000000
7/5/2012	6:48:34 PM	H2 MFC set to  0.000000
7/5/2012	6:48:34 PM	BCl3 MFC set to  0.000000
7/5/2012	6:48:34 PM	PH3 MFC set to  0.000000
7/5/2012	6:48:34 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:48:34 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:48:34 PM	Tube furnace set to 0
7/5/2012	6:49:40 PM	Helium valve closed
7/5/2012	6:49:40 PM	H2 valve closed
7/5/2012	6:49:40 PM	BCl3 valve closed
7/5/2012	6:49:40 PM	PH3 valve closed
7/5/2012	6:49:40 PM	SiCl4 pre valve closed
7/5/2012	6:49:40 PM	SiCl4 post valve closed
7/5/2012	6:49:40 PM	Main Vac valve closed
7/5/2012	6:49:40 PM	Bubbler valve closed
7/5/2012	6:49:40 PM	Bypass valve opened
7/5/2012	6:49:40 PM	Helium MFC set to  0.000000
7/5/2012	6:49:40 PM	H2 MFC set to  0.000000
7/5/2012	6:49:40 PM	BCl3 MFC set to  0.000000
7/5/2012	6:49:40 PM	PH3 MFC set to  0.000000
7/5/2012	6:49:40 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:49:40 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:49:40 PM	Tube furnace set to 0
7/5/2012	6:50:40 PM	Helium valve closed
7/5/2012	6:50:40 PM	H2 valve closed
7/5/2012	6:50:40 PM	BCl3 valve closed
7/5/2012	6:50:40 PM	PH3 valve closed
7/5/2012	6:50:40 PM	SiCl4 pre valve closed
7/5/2012	6:50:40 PM	SiCl4 post valve closed
7/5/2012	6:50:40 PM	Bypass valve closed
7/5/2012	6:50:40 PM	Bubbler valve closed
7/5/2012	6:50:40 PM	Main Vac valve opened
7/5/2012	6:50:40 PM	Helium MFC set to  0.000000
7/5/2012	6:50:40 PM	H2 MFC set to  0.000000
7/5/2012	6:50:40 PM	BCl3 MFC set to  0.000000
7/5/2012	6:50:40 PM	PH3 MFC set to  0.000000
7/5/2012	6:50:40 PM	SiCl4 MFC set to  0.000000
7/5/2012	6:50:40 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	6:50:41 PM	Tube furnace set to 0
7/5/2012	6:50:42 PM	Run finished at 6:50 PM
7/5/2012	6:50:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	7:04:14 PM	Recipe started at 7:04 PM
7/5/2012	7:04:14 PM	Helium valve closed
7/5/2012	7:04:14 PM	H2 valve closed
7/5/2012	7:04:14 PM	BCl3 valve closed
7/5/2012	7:04:14 PM	PH3 valve closed
7/5/2012	7:04:14 PM	SiCl4 pre valve closed
7/5/2012	7:04:14 PM	SiCl4 post valve closed
7/5/2012	7:04:14 PM	Bypass valve closed
7/5/2012	7:04:14 PM	Bubbler valve closed
7/5/2012	7:04:14 PM	Main Vac valve opened
7/5/2012	7:04:14 PM	Helium MFC set to  0.000000
7/5/2012	7:04:14 PM	H2 MFC set to  0.000000
7/5/2012	7:04:14 PM	BCl3 MFC set to  0.000000
7/5/2012	7:04:14 PM	PH3 MFC set to  0.000000
7/5/2012	7:04:14 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:04:14 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:04:14 PM	Tube furnace set to 150
7/5/2012	7:04:44 PM	H2 valve closed
7/5/2012	7:04:44 PM	BCl3 valve closed
7/5/2012	7:04:44 PM	PH3 valve closed
7/5/2012	7:04:44 PM	SiCl4 pre valve closed
7/5/2012	7:04:44 PM	SiCl4 post valve closed
7/5/2012	7:04:44 PM	Bypass valve closed
7/5/2012	7:04:44 PM	Bubbler valve closed
7/5/2012	7:04:44 PM	Helium valve opened
7/5/2012	7:04:44 PM	Main Vac valve opened
7/5/2012	7:04:44 PM	Helium MFC set to  20.000000
7/5/2012	7:04:44 PM	H2 MFC set to  0.000000
7/5/2012	7:04:44 PM	BCl3 MFC set to  0.000000
7/5/2012	7:04:44 PM	PH3 MFC set to  0.000000
7/5/2012	7:04:44 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:04:44 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:04:44 PM	Tube furnace set to 150
7/5/2012	7:05:14 PM	Helium valve closed
7/5/2012	7:05:14 PM	H2 valve closed
7/5/2012	7:05:14 PM	BCl3 valve closed
7/5/2012	7:05:14 PM	PH3 valve closed
7/5/2012	7:05:14 PM	SiCl4 pre valve closed
7/5/2012	7:05:14 PM	SiCl4 post valve closed
7/5/2012	7:05:14 PM	Bypass valve closed
7/5/2012	7:05:14 PM	Bubbler valve closed
7/5/2012	7:05:14 PM	Main Vac valve opened
7/5/2012	7:05:14 PM	Helium MFC set to  0.000000
7/5/2012	7:05:14 PM	H2 MFC set to  0.000000
7/5/2012	7:05:14 PM	BCl3 MFC set to  0.000000
7/5/2012	7:05:14 PM	PH3 MFC set to  0.000000
7/5/2012	7:05:14 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:05:14 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:05:15 PM	Tube furnace set to 150
7/5/2012	7:05:45 PM	H2 valve closed
7/5/2012	7:05:45 PM	BCl3 valve closed
7/5/2012	7:05:45 PM	PH3 valve closed
7/5/2012	7:05:45 PM	SiCl4 pre valve closed
7/5/2012	7:05:45 PM	SiCl4 post valve closed
7/5/2012	7:05:45 PM	Bypass valve closed
7/5/2012	7:05:45 PM	Bubbler valve closed
7/5/2012	7:05:45 PM	Helium valve opened
7/5/2012	7:05:45 PM	Main Vac valve opened
7/5/2012	7:05:45 PM	Helium MFC set to  20.000000
7/5/2012	7:05:45 PM	H2 MFC set to  0.000000
7/5/2012	7:05:45 PM	BCl3 MFC set to  0.000000
7/5/2012	7:05:45 PM	PH3 MFC set to  0.000000
7/5/2012	7:05:45 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:05:45 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:05:45 PM	Tube furnace set to 150
7/5/2012	7:06:15 PM	Helium valve closed
7/5/2012	7:06:15 PM	H2 valve closed
7/5/2012	7:06:15 PM	BCl3 valve closed
7/5/2012	7:06:15 PM	PH3 valve closed
7/5/2012	7:06:15 PM	SiCl4 pre valve closed
7/5/2012	7:06:15 PM	SiCl4 post valve closed
7/5/2012	7:06:15 PM	Bypass valve closed
7/5/2012	7:06:15 PM	Bubbler valve closed
7/5/2012	7:06:15 PM	Main Vac valve opened
7/5/2012	7:06:15 PM	Helium MFC set to  0.000000
7/5/2012	7:06:15 PM	H2 MFC set to  0.000000
7/5/2012	7:06:15 PM	BCl3 MFC set to  0.000000
7/5/2012	7:06:15 PM	PH3 MFC set to  0.000000
7/5/2012	7:06:15 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:06:15 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:06:15 PM	Tube furnace set to 150
7/5/2012	7:06:45 PM	H2 valve closed
7/5/2012	7:06:45 PM	BCl3 valve closed
7/5/2012	7:06:45 PM	PH3 valve closed
7/5/2012	7:06:45 PM	SiCl4 pre valve closed
7/5/2012	7:06:45 PM	SiCl4 post valve closed
7/5/2012	7:06:45 PM	Bypass valve closed
7/5/2012	7:06:45 PM	Bubbler valve closed
7/5/2012	7:06:45 PM	Helium valve opened
7/5/2012	7:06:45 PM	Main Vac valve opened
7/5/2012	7:06:45 PM	Helium MFC set to  20.000000
7/5/2012	7:06:45 PM	H2 MFC set to  0.000000
7/5/2012	7:06:45 PM	BCl3 MFC set to  0.000000
7/5/2012	7:06:45 PM	PH3 MFC set to  0.000000
7/5/2012	7:06:45 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:06:45 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:06:45 PM	Tube furnace set to 150
7/5/2012	7:07:15 PM	Helium valve closed
7/5/2012	7:07:15 PM	H2 valve closed
7/5/2012	7:07:15 PM	BCl3 valve closed
7/5/2012	7:07:15 PM	PH3 valve closed
7/5/2012	7:07:15 PM	SiCl4 pre valve closed
7/5/2012	7:07:15 PM	SiCl4 post valve closed
7/5/2012	7:07:15 PM	Bypass valve closed
7/5/2012	7:07:15 PM	Bubbler valve closed
7/5/2012	7:07:15 PM	Main Vac valve opened
7/5/2012	7:07:15 PM	Helium MFC set to  0.000000
7/5/2012	7:07:15 PM	H2 MFC set to  0.000000
7/5/2012	7:07:15 PM	BCl3 MFC set to  0.000000
7/5/2012	7:07:15 PM	PH3 MFC set to  0.000000
7/5/2012	7:07:15 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:07:15 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:07:16 PM	Tube furnace set to 150
7/5/2012	7:07:46 PM	H2 valve closed
7/5/2012	7:07:46 PM	BCl3 valve closed
7/5/2012	7:07:46 PM	PH3 valve closed
7/5/2012	7:07:46 PM	SiCl4 pre valve closed
7/5/2012	7:07:46 PM	SiCl4 post valve closed
7/5/2012	7:07:46 PM	Bypass valve closed
7/5/2012	7:07:46 PM	Bubbler valve closed
7/5/2012	7:07:46 PM	Helium valve opened
7/5/2012	7:07:46 PM	Main Vac valve opened
7/5/2012	7:07:46 PM	Helium MFC set to  20.000000
7/5/2012	7:07:46 PM	H2 MFC set to  0.000000
7/5/2012	7:07:46 PM	BCl3 MFC set to  0.000000
7/5/2012	7:07:46 PM	PH3 MFC set to  0.000000
7/5/2012	7:07:46 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:07:46 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:07:46 PM	Tube furnace set to 150
7/5/2012	7:08:16 PM	Helium valve closed
7/5/2012	7:08:16 PM	H2 valve closed
7/5/2012	7:08:16 PM	BCl3 valve closed
7/5/2012	7:08:16 PM	PH3 valve closed
7/5/2012	7:08:16 PM	SiCl4 pre valve closed
7/5/2012	7:08:16 PM	SiCl4 post valve closed
7/5/2012	7:08:16 PM	Bypass valve closed
7/5/2012	7:08:16 PM	Bubbler valve closed
7/5/2012	7:08:16 PM	Main Vac valve opened
7/5/2012	7:08:16 PM	Helium MFC set to  0.000000
7/5/2012	7:08:16 PM	H2 MFC set to  0.000000
7/5/2012	7:08:16 PM	BCl3 MFC set to  0.000000
7/5/2012	7:08:16 PM	PH3 MFC set to  0.000000
7/5/2012	7:08:16 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:08:16 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:08:16 PM	Tube furnace set to 150
7/5/2012	7:08:46 PM	H2 valve closed
7/5/2012	7:08:46 PM	BCl3 valve closed
7/5/2012	7:08:46 PM	PH3 valve closed
7/5/2012	7:08:46 PM	SiCl4 pre valve closed
7/5/2012	7:08:46 PM	SiCl4 post valve closed
7/5/2012	7:08:46 PM	Bypass valve closed
7/5/2012	7:08:46 PM	Bubbler valve closed
7/5/2012	7:08:46 PM	Helium valve opened
7/5/2012	7:08:46 PM	Main Vac valve opened
7/5/2012	7:08:46 PM	Helium MFC set to  20.000000
7/5/2012	7:08:46 PM	H2 MFC set to  0.000000
7/5/2012	7:08:46 PM	BCl3 MFC set to  0.000000
7/5/2012	7:08:46 PM	PH3 MFC set to  0.000000
7/5/2012	7:08:46 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:08:46 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:08:46 PM	Tube furnace set to 150
7/5/2012	7:09:16 PM	Helium valve closed
7/5/2012	7:09:16 PM	H2 valve closed
7/5/2012	7:09:16 PM	BCl3 valve closed
7/5/2012	7:09:16 PM	PH3 valve closed
7/5/2012	7:09:16 PM	SiCl4 pre valve closed
7/5/2012	7:09:16 PM	SiCl4 post valve closed
7/5/2012	7:09:16 PM	Bypass valve closed
7/5/2012	7:09:16 PM	Bubbler valve closed
7/5/2012	7:09:16 PM	Main Vac valve opened
7/5/2012	7:09:16 PM	Helium MFC set to  0.000000
7/5/2012	7:09:16 PM	H2 MFC set to  0.000000
7/5/2012	7:09:16 PM	BCl3 MFC set to  0.000000
7/5/2012	7:09:16 PM	PH3 MFC set to  0.000000
7/5/2012	7:09:16 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:09:16 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:09:16 PM	Tube furnace set to 150
7/5/2012	7:09:46 PM	H2 valve closed
7/5/2012	7:09:46 PM	BCl3 valve closed
7/5/2012	7:09:46 PM	PH3 valve closed
7/5/2012	7:09:46 PM	SiCl4 pre valve closed
7/5/2012	7:09:46 PM	SiCl4 post valve closed
7/5/2012	7:09:46 PM	Bypass valve closed
7/5/2012	7:09:47 PM	Bubbler valve closed
7/5/2012	7:09:47 PM	Helium valve opened
7/5/2012	7:09:47 PM	Main Vac valve opened
7/5/2012	7:09:47 PM	Helium MFC set to  20.000000
7/5/2012	7:09:47 PM	H2 MFC set to  0.000000
7/5/2012	7:09:47 PM	BCl3 MFC set to  0.000000
7/5/2012	7:09:47 PM	PH3 MFC set to  0.000000
7/5/2012	7:09:47 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:09:47 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:09:47 PM	Tube furnace set to 150
7/5/2012	7:10:17 PM	Helium valve closed
7/5/2012	7:10:17 PM	H2 valve closed
7/5/2012	7:10:17 PM	BCl3 valve closed
7/5/2012	7:10:17 PM	PH3 valve closed
7/5/2012	7:10:17 PM	SiCl4 pre valve closed
7/5/2012	7:10:17 PM	SiCl4 post valve closed
7/5/2012	7:10:17 PM	Bypass valve closed
7/5/2012	7:10:17 PM	Bubbler valve closed
7/5/2012	7:10:17 PM	Main Vac valve opened
7/5/2012	7:10:17 PM	Helium MFC set to  0.000000
7/5/2012	7:10:17 PM	H2 MFC set to  0.000000
7/5/2012	7:10:17 PM	BCl3 MFC set to  0.000000
7/5/2012	7:10:17 PM	PH3 MFC set to  0.000000
7/5/2012	7:10:17 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:10:17 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:10:17 PM	Tube furnace set to 150
7/5/2012	7:10:47 PM	H2 valve closed
7/5/2012	7:10:47 PM	BCl3 valve closed
7/5/2012	7:10:47 PM	PH3 valve closed
7/5/2012	7:10:47 PM	SiCl4 pre valve closed
7/5/2012	7:10:47 PM	SiCl4 post valve closed
7/5/2012	7:10:47 PM	Bypass valve closed
7/5/2012	7:10:47 PM	Bubbler valve closed
7/5/2012	7:10:47 PM	Helium valve opened
7/5/2012	7:10:47 PM	Main Vac valve opened
7/5/2012	7:10:47 PM	Helium MFC set to  20.000000
7/5/2012	7:10:47 PM	H2 MFC set to  0.000000
7/5/2012	7:10:47 PM	BCl3 MFC set to  0.000000
7/5/2012	7:10:47 PM	PH3 MFC set to  0.000000
7/5/2012	7:10:47 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:10:47 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:10:47 PM	Tube furnace set to 150
7/5/2012	7:11:17 PM	Helium valve closed
7/5/2012	7:11:17 PM	H2 valve closed
7/5/2012	7:11:17 PM	BCl3 valve closed
7/5/2012	7:11:17 PM	PH3 valve closed
7/5/2012	7:11:17 PM	SiCl4 pre valve closed
7/5/2012	7:11:17 PM	SiCl4 post valve closed
7/5/2012	7:11:17 PM	Bypass valve closed
7/5/2012	7:11:17 PM	Bubbler valve closed
7/5/2012	7:11:17 PM	Main Vac valve opened
7/5/2012	7:11:17 PM	Helium MFC set to  0.000000
7/5/2012	7:11:17 PM	H2 MFC set to  0.000000
7/5/2012	7:11:17 PM	BCl3 MFC set to  0.000000
7/5/2012	7:11:17 PM	PH3 MFC set to  0.000000
7/5/2012	7:11:17 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:11:17 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:11:17 PM	Tube furnace set to 150
7/5/2012	7:11:47 PM	H2 valve closed
7/5/2012	7:11:47 PM	BCl3 valve closed
7/5/2012	7:11:47 PM	PH3 valve closed
7/5/2012	7:11:47 PM	SiCl4 pre valve closed
7/5/2012	7:11:47 PM	SiCl4 post valve closed
7/5/2012	7:11:47 PM	Bypass valve closed
7/5/2012	7:11:47 PM	Bubbler valve closed
7/5/2012	7:11:47 PM	Helium valve opened
7/5/2012	7:11:47 PM	Main Vac valve opened
7/5/2012	7:11:47 PM	Helium MFC set to  20.000000
7/5/2012	7:11:47 PM	H2 MFC set to  0.000000
7/5/2012	7:11:47 PM	BCl3 MFC set to  0.000000
7/5/2012	7:11:47 PM	PH3 MFC set to  0.000000
7/5/2012	7:11:47 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:11:47 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:11:48 PM	Tube furnace set to 150
7/5/2012	7:12:18 PM	Helium valve closed
7/5/2012	7:12:18 PM	H2 valve closed
7/5/2012	7:12:18 PM	BCl3 valve closed
7/5/2012	7:12:18 PM	PH3 valve closed
7/5/2012	7:12:18 PM	SiCl4 pre valve closed
7/5/2012	7:12:18 PM	SiCl4 post valve closed
7/5/2012	7:12:18 PM	Bypass valve closed
7/5/2012	7:12:18 PM	Bubbler valve closed
7/5/2012	7:12:18 PM	Main Vac valve opened
7/5/2012	7:12:18 PM	Helium MFC set to  0.000000
7/5/2012	7:12:18 PM	H2 MFC set to  0.000000
7/5/2012	7:12:18 PM	BCl3 MFC set to  0.000000
7/5/2012	7:12:18 PM	PH3 MFC set to  0.000000
7/5/2012	7:12:18 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:12:18 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:12:18 PM	Tube furnace set to 150
7/5/2012	7:12:48 PM	H2 valve closed
7/5/2012	7:12:48 PM	BCl3 valve closed
7/5/2012	7:12:48 PM	PH3 valve closed
7/5/2012	7:12:48 PM	SiCl4 pre valve closed
7/5/2012	7:12:48 PM	SiCl4 post valve closed
7/5/2012	7:12:48 PM	Bypass valve closed
7/5/2012	7:12:48 PM	Bubbler valve closed
7/5/2012	7:12:48 PM	Helium valve opened
7/5/2012	7:12:48 PM	Main Vac valve opened
7/5/2012	7:12:48 PM	Helium MFC set to  20.000000
7/5/2012	7:12:48 PM	H2 MFC set to  0.000000
7/5/2012	7:12:48 PM	BCl3 MFC set to  0.000000
7/5/2012	7:12:48 PM	PH3 MFC set to  0.000000
7/5/2012	7:12:48 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:12:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:12:48 PM	Tube furnace set to 150
7/5/2012	7:13:18 PM	Helium valve closed
7/5/2012	7:13:18 PM	H2 valve closed
7/5/2012	7:13:18 PM	BCl3 valve closed
7/5/2012	7:13:18 PM	PH3 valve closed
7/5/2012	7:13:18 PM	SiCl4 pre valve closed
7/5/2012	7:13:18 PM	SiCl4 post valve closed
7/5/2012	7:13:18 PM	Bypass valve closed
7/5/2012	7:13:18 PM	Bubbler valve closed
7/5/2012	7:13:18 PM	Main Vac valve opened
7/5/2012	7:13:18 PM	Helium MFC set to  0.000000
7/5/2012	7:13:18 PM	H2 MFC set to  0.000000
7/5/2012	7:13:18 PM	BCl3 MFC set to  0.000000
7/5/2012	7:13:18 PM	PH3 MFC set to  0.000000
7/5/2012	7:13:18 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:13:18 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:13:18 PM	Tube furnace set to 150
7/5/2012	7:13:48 PM	H2 valve closed
7/5/2012	7:13:48 PM	BCl3 valve closed
7/5/2012	7:13:48 PM	PH3 valve closed
7/5/2012	7:13:48 PM	SiCl4 pre valve closed
7/5/2012	7:13:48 PM	SiCl4 post valve closed
7/5/2012	7:13:48 PM	Bypass valve closed
7/5/2012	7:13:48 PM	Bubbler valve closed
7/5/2012	7:13:48 PM	Helium valve opened
7/5/2012	7:13:48 PM	Main Vac valve opened
7/5/2012	7:13:48 PM	Helium MFC set to  20.000000
7/5/2012	7:13:48 PM	H2 MFC set to  0.000000
7/5/2012	7:13:48 PM	BCl3 MFC set to  0.000000
7/5/2012	7:13:48 PM	PH3 MFC set to  0.000000
7/5/2012	7:13:48 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:13:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:13:49 PM	Tube furnace set to 150
7/5/2012	7:14:19 PM	Helium valve closed
7/5/2012	7:14:19 PM	H2 valve closed
7/5/2012	7:14:19 PM	BCl3 valve closed
7/5/2012	7:14:19 PM	PH3 valve closed
7/5/2012	7:14:19 PM	SiCl4 pre valve closed
7/5/2012	7:14:19 PM	SiCl4 post valve closed
7/5/2012	7:14:19 PM	Bypass valve closed
7/5/2012	7:14:19 PM	Bubbler valve closed
7/5/2012	7:14:19 PM	Main Vac valve opened
7/5/2012	7:14:19 PM	Helium MFC set to  0.000000
7/5/2012	7:14:19 PM	H2 MFC set to  0.000000
7/5/2012	7:14:19 PM	BCl3 MFC set to  0.000000
7/5/2012	7:14:19 PM	PH3 MFC set to  0.000000
7/5/2012	7:14:19 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:14:19 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:14:19 PM	Tube furnace set to 150
7/5/2012	7:14:20 PM	Run finished at 7:14 PM
7/5/2012	7:37:39 PM	Main Vac valve closed
7/5/2012	7:38:04 PM	Main Vac valve opened
7/5/2012	7:44:30 PM	Recipe started at 7:44 PM
7/5/2012	7:44:30 PM	Helium valve closed
7/5/2012	7:44:30 PM	H2 valve closed
7/5/2012	7:44:30 PM	BCl3 valve closed
7/5/2012	7:44:30 PM	PH3 valve closed
7/5/2012	7:44:30 PM	SiCl4 pre valve closed
7/5/2012	7:44:30 PM	SiCl4 post valve closed
7/5/2012	7:44:30 PM	Main Vac valve closed
7/5/2012	7:44:30 PM	Bypass valve closed
7/5/2012	7:44:30 PM	Bubbler valve closed
7/5/2012	7:44:30 PM	Helium MFC set to  0.000000
7/5/2012	7:44:30 PM	H2 MFC set to  0.000000
7/5/2012	7:44:30 PM	BCl3 MFC set to  0.000000
7/5/2012	7:44:30 PM	PH3 MFC set to  0.000000
7/5/2012	7:44:30 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:44:30 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:44:31 PM	Tube furnace set to 0
7/5/2012	7:44:34 PM	Helium valve closed
7/5/2012	7:44:34 PM	BCl3 valve closed
7/5/2012	7:44:34 PM	PH3 valve closed
7/5/2012	7:44:34 PM	SiCl4 pre valve closed
7/5/2012	7:44:34 PM	SiCl4 post valve closed
7/5/2012	7:44:34 PM	Main Vac valve closed
7/5/2012	7:44:34 PM	Bypass valve closed
7/5/2012	7:44:34 PM	Bubbler valve closed
7/5/2012	7:44:34 PM	H2 valve opened
7/5/2012	7:44:34 PM	Helium MFC set to  0.000000
7/5/2012	7:44:34 PM	H2 MFC set to  500.000000
7/5/2012	7:44:34 PM	BCl3 MFC set to  0.000000
7/5/2012	7:44:34 PM	PH3 MFC set to  0.000000
7/5/2012	7:44:34 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:44:34 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:44:34 PM	Tube furnace set to 0
7/5/2012	7:45:47 PM	Helium valve closed
7/5/2012	7:45:47 PM	BCl3 valve closed
7/5/2012	7:45:47 PM	PH3 valve closed
7/5/2012	7:45:47 PM	SiCl4 pre valve closed
7/5/2012	7:45:47 PM	SiCl4 post valve closed
7/5/2012	7:45:47 PM	Main Vac valve closed
7/5/2012	7:45:47 PM	Bypass valve closed
7/5/2012	7:45:47 PM	H2 valve opened
7/5/2012	7:45:47 PM	Bubbler valve opened
7/5/2012	7:45:47 PM	Helium MFC set to  0.000000
7/5/2012	7:45:47 PM	H2 MFC set to  500.000000
7/5/2012	7:45:47 PM	BCl3 MFC set to  0.000000
7/5/2012	7:45:47 PM	PH3 MFC set to  0.000000
7/5/2012	7:45:47 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:45:47 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:45:47 PM	Tube furnace set to 0
7/5/2012	7:45:48 PM	Helium valve closed
7/5/2012	7:45:48 PM	BCl3 valve closed
7/5/2012	7:45:48 PM	PH3 valve closed
7/5/2012	7:45:48 PM	SiCl4 pre valve closed
7/5/2012	7:45:48 PM	SiCl4 post valve closed
7/5/2012	7:45:48 PM	Main Vac valve closed
7/5/2012	7:45:48 PM	Bypass valve closed
7/5/2012	7:45:48 PM	H2 valve opened
7/5/2012	7:45:48 PM	Bubbler valve opened
7/5/2012	7:45:48 PM	Helium MFC set to  0.000000
7/5/2012	7:45:48 PM	H2 MFC set to  500.000000
7/5/2012	7:45:48 PM	BCl3 MFC set to  0.000000
7/5/2012	7:45:48 PM	PH3 MFC set to  0.000000
7/5/2012	7:45:48 PM	SiCl4 MFC set to  0.000000
7/5/2012	7:45:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	7:45:48 PM	Tube furnace set to 1000
7/5/2012	8:15:48 PM	Helium valve closed
7/5/2012	8:15:48 PM	PH3 valve closed
7/5/2012	8:15:48 PM	Main Vac valve closed
7/5/2012	8:15:48 PM	Bypass valve closed
7/5/2012	8:15:48 PM	H2 valve opened
7/5/2012	8:15:48 PM	BCl3 valve opened
7/5/2012	8:15:48 PM	SiCl4 pre valve opened
7/5/2012	8:15:48 PM	SiCl4 post valve opened
7/5/2012	8:15:48 PM	Bubbler valve opened
7/5/2012	8:15:48 PM	Helium MFC set to  0.000000
7/5/2012	8:15:48 PM	H2 MFC set to  500.000000
7/5/2012	8:15:48 PM	BCl3 MFC set to  1.000000
7/5/2012	8:15:48 PM	PH3 MFC set to  0.000000
7/5/2012	8:15:48 PM	SiCl4 MFC set to  50.000000
7/5/2012	8:15:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:15:48 PM	Tube furnace set to 1000
7/5/2012	8:25:48 PM	Helium valve closed
7/5/2012	8:25:48 PM	BCl3 valve closed
7/5/2012	8:25:48 PM	PH3 valve closed
7/5/2012	8:25:48 PM	SiCl4 pre valve closed
7/5/2012	8:25:48 PM	SiCl4 post valve closed
7/5/2012	8:25:48 PM	Main Vac valve closed
7/5/2012	8:25:48 PM	Bypass valve closed
7/5/2012	8:25:48 PM	H2 valve opened
7/5/2012	8:25:48 PM	Bubbler valve opened
7/5/2012	8:25:48 PM	Helium MFC set to  0.000000
7/5/2012	8:25:48 PM	H2 MFC set to  500.000000
7/5/2012	8:25:48 PM	BCl3 MFC set to  0.000000
7/5/2012	8:25:48 PM	PH3 MFC set to  0.000000
7/5/2012	8:25:48 PM	SiCl4 MFC set to  0.000000
7/5/2012	8:25:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:25:48 PM	Tube furnace set to 750
7/5/2012	8:30:48 PM	H2 valve closed
7/5/2012	8:30:48 PM	BCl3 valve closed
7/5/2012	8:30:48 PM	PH3 valve closed
7/5/2012	8:30:48 PM	SiCl4 pre valve closed
7/5/2012	8:30:48 PM	SiCl4 post valve closed
7/5/2012	8:30:48 PM	Main Vac valve closed
7/5/2012	8:30:48 PM	Bypass valve closed
7/5/2012	8:30:48 PM	Helium valve opened
7/5/2012	8:30:48 PM	Bubbler valve opened
7/5/2012	8:30:48 PM	Helium MFC set to  500.000000
7/5/2012	8:30:48 PM	H2 MFC set to  0.000000
7/5/2012	8:30:48 PM	BCl3 MFC set to  0.000000
7/5/2012	8:30:48 PM	PH3 MFC set to  0.000000
7/5/2012	8:30:48 PM	SiCl4 MFC set to  0.000000
7/5/2012	8:30:48 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:30:48 PM	Tube furnace set to 0
7/5/2012	8:43:47 PM	Helium valve closed
7/5/2012	8:43:47 PM	H2 valve closed
7/5/2012	8:43:47 PM	BCl3 valve closed
7/5/2012	8:43:47 PM	PH3 valve closed
7/5/2012	8:43:47 PM	SiCl4 pre valve closed
7/5/2012	8:43:47 PM	SiCl4 post valve closed
7/5/2012	8:43:47 PM	Main Vac valve closed
7/5/2012	8:43:47 PM	Bypass valve closed
7/5/2012	8:43:47 PM	Bubbler valve closed
7/5/2012	8:43:47 PM	Helium MFC set to  0.000000
7/5/2012	8:43:47 PM	H2 MFC set to  0.000000
7/5/2012	8:43:47 PM	BCl3 MFC set to  0.000000
7/5/2012	8:43:47 PM	PH3 MFC set to  0.000000
7/5/2012	8:43:47 PM	SiCl4 MFC set to  0.000000
7/5/2012	8:43:47 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:43:47 PM	Tube furnace set to 0
7/5/2012	8:43:48 PM	Run finished at 8:43 PM
7/5/2012	8:47:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	8:47:18 PM	Recipe started at 8:47 PM
7/5/2012	8:47:18 PM	Helium valve closed
7/5/2012	8:47:18 PM	H2 valve closed
7/5/2012	8:47:18 PM	BCl3 valve closed
7/5/2012	8:47:18 PM	PH3 valve closed
7/5/2012	8:47:18 PM	SiCl4 pre valve closed
7/5/2012	8:47:18 PM	SiCl4 post valve closed
7/5/2012	8:47:18 PM	Main Vac valve closed
7/5/2012	8:47:18 PM	Bubbler valve closed
7/5/2012	8:47:18 PM	Bypass valve opened
7/5/2012	8:47:18 PM	Helium MFC set to  0.000000
7/5/2012	8:47:18 PM	H2 MFC set to  0.000000
7/5/2012	8:47:18 PM	BCl3 MFC set to  0.000000
7/5/2012	8:47:18 PM	PH3 MFC set to  0.000000
7/5/2012	8:47:18 PM	SiCl4 MFC set to  0.000000
7/5/2012	8:47:18 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:47:18 PM	Tube furnace set to 0
7/5/2012	8:48:26 PM	Helium valve closed
7/5/2012	8:48:26 PM	H2 valve closed
7/5/2012	8:48:26 PM	BCl3 valve closed
7/5/2012	8:48:26 PM	PH3 valve closed
7/5/2012	8:48:26 PM	SiCl4 pre valve closed
7/5/2012	8:48:26 PM	SiCl4 post valve closed
7/5/2012	8:48:26 PM	Main Vac valve closed
7/5/2012	8:48:26 PM	Bubbler valve closed
7/5/2012	8:48:26 PM	Bypass valve opened
7/5/2012	8:48:26 PM	Helium MFC set to  0.000000
7/5/2012	8:48:26 PM	H2 MFC set to  0.000000
7/5/2012	8:48:26 PM	BCl3 MFC set to  0.000000
7/5/2012	8:48:26 PM	PH3 MFC set to  0.000000
7/5/2012	8:48:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	8:48:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:48:26 PM	Tube furnace set to 0
7/5/2012	8:49:26 PM	Helium valve closed
7/5/2012	8:49:26 PM	H2 valve closed
7/5/2012	8:49:26 PM	BCl3 valve closed
7/5/2012	8:49:26 PM	PH3 valve closed
7/5/2012	8:49:26 PM	SiCl4 pre valve closed
7/5/2012	8:49:26 PM	SiCl4 post valve closed
7/5/2012	8:49:26 PM	Bypass valve closed
7/5/2012	8:49:26 PM	Bubbler valve closed
7/5/2012	8:49:26 PM	Main Vac valve opened
7/5/2012	8:49:26 PM	Helium MFC set to  0.000000
7/5/2012	8:49:26 PM	H2 MFC set to  0.000000
7/5/2012	8:49:26 PM	BCl3 MFC set to  0.000000
7/5/2012	8:49:26 PM	PH3 MFC set to  0.000000
7/5/2012	8:49:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	8:49:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	8:49:26 PM	Tube furnace set to 0
7/5/2012	8:49:27 PM	Run finished at 8:49 PM
7/5/2012	8:49:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	9:00:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/5/2012	9:00:25 PM	Recipe started at 9:00 PM
7/5/2012	9:00:26 PM	Helium valve closed
7/5/2012	9:00:26 PM	H2 valve closed
7/5/2012	9:00:26 PM	BCl3 valve closed
7/5/2012	9:00:26 PM	PH3 valve closed
7/5/2012	9:00:26 PM	SiCl4 pre valve closed
7/5/2012	9:00:26 PM	SiCl4 post valve closed
7/5/2012	9:00:26 PM	Main Vac valve closed
7/5/2012	9:00:26 PM	Bubbler valve closed
7/5/2012	9:00:26 PM	Bypass valve opened
7/5/2012	9:00:26 PM	Helium MFC set to  0.000000
7/5/2012	9:00:26 PM	H2 MFC set to  0.000000
7/5/2012	9:00:26 PM	BCl3 MFC set to  0.000000
7/5/2012	9:00:26 PM	PH3 MFC set to  0.000000
7/5/2012	9:00:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:00:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:00:26 PM	Tube furnace set to 0
7/5/2012	9:00:26 PM	Helium valve closed
7/5/2012	9:00:26 PM	H2 valve closed
7/5/2012	9:00:26 PM	BCl3 valve closed
7/5/2012	9:00:26 PM	PH3 valve closed
7/5/2012	9:00:26 PM	SiCl4 pre valve closed
7/5/2012	9:00:26 PM	SiCl4 post valve closed
7/5/2012	9:00:26 PM	Main Vac valve closed
7/5/2012	9:00:26 PM	Bubbler valve closed
7/5/2012	9:00:26 PM	Bypass valve opened
7/5/2012	9:00:26 PM	Helium MFC set to  0.000000
7/5/2012	9:00:26 PM	H2 MFC set to  0.000000
7/5/2012	9:00:26 PM	BCl3 MFC set to  0.000000
7/5/2012	9:00:26 PM	PH3 MFC set to  0.000000
7/5/2012	9:00:26 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:00:26 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:00:26 PM	Tube furnace set to 0
7/5/2012	9:00:56 PM	Helium valve closed
7/5/2012	9:00:56 PM	H2 valve closed
7/5/2012	9:00:56 PM	BCl3 valve closed
7/5/2012	9:00:56 PM	PH3 valve closed
7/5/2012	9:00:56 PM	SiCl4 pre valve closed
7/5/2012	9:00:56 PM	SiCl4 post valve closed
7/5/2012	9:00:56 PM	Bypass valve closed
7/5/2012	9:00:56 PM	Bubbler valve closed
7/5/2012	9:00:56 PM	Main Vac valve opened
7/5/2012	9:00:56 PM	Helium MFC set to  0.000000
7/5/2012	9:00:56 PM	H2 MFC set to  0.000000
7/5/2012	9:00:56 PM	BCl3 MFC set to  0.000000
7/5/2012	9:00:56 PM	PH3 MFC set to  0.000000
7/5/2012	9:00:56 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:00:56 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:00:56 PM	Tube furnace set to 0
7/5/2012	9:01:26 PM	H2 valve closed
7/5/2012	9:01:26 PM	BCl3 valve closed
7/5/2012	9:01:26 PM	PH3 valve closed
7/5/2012	9:01:26 PM	SiCl4 pre valve closed
7/5/2012	9:01:26 PM	SiCl4 post valve closed
7/5/2012	9:01:26 PM	Bypass valve closed
7/5/2012	9:01:26 PM	Bubbler valve closed
7/5/2012	9:01:26 PM	Helium valve opened
7/5/2012	9:01:27 PM	Main Vac valve opened
7/5/2012	9:01:27 PM	Helium MFC set to  20.000000
7/5/2012	9:01:27 PM	H2 MFC set to  0.000000
7/5/2012	9:01:27 PM	BCl3 MFC set to  0.000000
7/5/2012	9:01:27 PM	PH3 MFC set to  0.000000
7/5/2012	9:01:27 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:01:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:01:27 PM	Tube furnace set to 0
7/5/2012	9:01:57 PM	Helium valve closed
7/5/2012	9:01:57 PM	H2 valve closed
7/5/2012	9:01:57 PM	BCl3 valve closed
7/5/2012	9:01:57 PM	PH3 valve closed
7/5/2012	9:01:57 PM	SiCl4 pre valve closed
7/5/2012	9:01:57 PM	SiCl4 post valve closed
7/5/2012	9:01:57 PM	Bypass valve closed
7/5/2012	9:01:57 PM	Bubbler valve closed
7/5/2012	9:01:57 PM	Main Vac valve opened
7/5/2012	9:01:57 PM	Helium MFC set to  0.000000
7/5/2012	9:01:57 PM	H2 MFC set to  0.000000
7/5/2012	9:01:57 PM	BCl3 MFC set to  0.000000
7/5/2012	9:01:57 PM	PH3 MFC set to  0.000000
7/5/2012	9:01:57 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:01:57 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:01:57 PM	Tube furnace set to 0
7/5/2012	9:02:27 PM	H2 valve closed
7/5/2012	9:02:27 PM	BCl3 valve closed
7/5/2012	9:02:27 PM	PH3 valve closed
7/5/2012	9:02:27 PM	SiCl4 pre valve closed
7/5/2012	9:02:27 PM	SiCl4 post valve closed
7/5/2012	9:02:27 PM	Bypass valve closed
7/5/2012	9:02:27 PM	Bubbler valve closed
7/5/2012	9:02:27 PM	Helium valve opened
7/5/2012	9:02:27 PM	Main Vac valve opened
7/5/2012	9:02:27 PM	Helium MFC set to  20.000000
7/5/2012	9:02:27 PM	H2 MFC set to  0.000000
7/5/2012	9:02:27 PM	BCl3 MFC set to  0.000000
7/5/2012	9:02:27 PM	PH3 MFC set to  0.000000
7/5/2012	9:02:27 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:02:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:02:27 PM	Tube furnace set to 0
7/5/2012	9:02:57 PM	Helium valve closed
7/5/2012	9:02:57 PM	H2 valve closed
7/5/2012	9:02:57 PM	BCl3 valve closed
7/5/2012	9:02:57 PM	PH3 valve closed
7/5/2012	9:02:57 PM	SiCl4 pre valve closed
7/5/2012	9:02:57 PM	SiCl4 post valve closed
7/5/2012	9:02:57 PM	Bypass valve closed
7/5/2012	9:02:57 PM	Bubbler valve closed
7/5/2012	9:02:57 PM	Main Vac valve opened
7/5/2012	9:02:57 PM	Helium MFC set to  0.000000
7/5/2012	9:02:57 PM	H2 MFC set to  0.000000
7/5/2012	9:02:57 PM	BCl3 MFC set to  0.000000
7/5/2012	9:02:57 PM	PH3 MFC set to  0.000000
7/5/2012	9:02:57 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:02:57 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:02:57 PM	Tube furnace set to 0
7/5/2012	9:03:27 PM	H2 valve closed
7/5/2012	9:03:27 PM	BCl3 valve closed
7/5/2012	9:03:27 PM	PH3 valve closed
7/5/2012	9:03:27 PM	SiCl4 pre valve closed
7/5/2012	9:03:27 PM	SiCl4 post valve closed
7/5/2012	9:03:27 PM	Bypass valve closed
7/5/2012	9:03:27 PM	Bubbler valve closed
7/5/2012	9:03:27 PM	Helium valve opened
7/5/2012	9:03:27 PM	Main Vac valve opened
7/5/2012	9:03:27 PM	Helium MFC set to  20.000000
7/5/2012	9:03:27 PM	H2 MFC set to  0.000000
7/5/2012	9:03:27 PM	BCl3 MFC set to  0.000000
7/5/2012	9:03:27 PM	PH3 MFC set to  0.000000
7/5/2012	9:03:27 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:03:27 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:03:28 PM	Tube furnace set to 0
7/5/2012	9:03:58 PM	Helium valve closed
7/5/2012	9:03:58 PM	H2 valve closed
7/5/2012	9:03:58 PM	BCl3 valve closed
7/5/2012	9:03:58 PM	PH3 valve closed
7/5/2012	9:03:58 PM	SiCl4 pre valve closed
7/5/2012	9:03:58 PM	SiCl4 post valve closed
7/5/2012	9:03:58 PM	Bypass valve closed
7/5/2012	9:03:58 PM	Bubbler valve closed
7/5/2012	9:03:58 PM	Main Vac valve opened
7/5/2012	9:03:58 PM	Helium MFC set to  0.000000
7/5/2012	9:03:58 PM	H2 MFC set to  0.000000
7/5/2012	9:03:58 PM	BCl3 MFC set to  0.000000
7/5/2012	9:03:58 PM	PH3 MFC set to  0.000000
7/5/2012	9:03:58 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:03:58 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:03:58 PM	Tube furnace set to 0
7/5/2012	9:04:28 PM	H2 valve closed
7/5/2012	9:04:28 PM	BCl3 valve closed
7/5/2012	9:04:28 PM	PH3 valve closed
7/5/2012	9:04:28 PM	SiCl4 pre valve closed
7/5/2012	9:04:28 PM	SiCl4 post valve closed
7/5/2012	9:04:28 PM	Bypass valve closed
7/5/2012	9:04:28 PM	Bubbler valve closed
7/5/2012	9:04:28 PM	Helium valve opened
7/5/2012	9:04:28 PM	Main Vac valve opened
7/5/2012	9:04:28 PM	Helium MFC set to  20.000000
7/5/2012	9:04:28 PM	H2 MFC set to  0.000000
7/5/2012	9:04:28 PM	BCl3 MFC set to  0.000000
7/5/2012	9:04:28 PM	PH3 MFC set to  0.000000
7/5/2012	9:04:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:04:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:04:28 PM	Tube furnace set to 0
7/5/2012	9:04:58 PM	Helium valve closed
7/5/2012	9:04:58 PM	H2 valve closed
7/5/2012	9:04:58 PM	BCl3 valve closed
7/5/2012	9:04:58 PM	PH3 valve closed
7/5/2012	9:04:58 PM	SiCl4 pre valve closed
7/5/2012	9:04:58 PM	SiCl4 post valve closed
7/5/2012	9:04:58 PM	Bypass valve closed
7/5/2012	9:04:58 PM	Bubbler valve closed
7/5/2012	9:04:58 PM	Main Vac valve opened
7/5/2012	9:04:58 PM	Helium MFC set to  0.000000
7/5/2012	9:04:58 PM	H2 MFC set to  0.000000
7/5/2012	9:04:58 PM	BCl3 MFC set to  0.000000
7/5/2012	9:04:58 PM	PH3 MFC set to  0.000000
7/5/2012	9:04:58 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:04:58 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:04:58 PM	Tube furnace set to 0
7/5/2012	9:05:28 PM	H2 valve closed
7/5/2012	9:05:28 PM	BCl3 valve closed
7/5/2012	9:05:28 PM	PH3 valve closed
7/5/2012	9:05:28 PM	SiCl4 pre valve closed
7/5/2012	9:05:28 PM	SiCl4 post valve closed
7/5/2012	9:05:28 PM	Bypass valve closed
7/5/2012	9:05:28 PM	Bubbler valve closed
7/5/2012	9:05:28 PM	Helium valve opened
7/5/2012	9:05:28 PM	Main Vac valve opened
7/5/2012	9:05:28 PM	Helium MFC set to  20.000000
7/5/2012	9:05:28 PM	H2 MFC set to  0.000000
7/5/2012	9:05:28 PM	BCl3 MFC set to  0.000000
7/5/2012	9:05:28 PM	PH3 MFC set to  0.000000
7/5/2012	9:05:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:05:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:05:29 PM	Tube furnace set to 0
7/5/2012	9:05:59 PM	Helium valve closed
7/5/2012	9:05:59 PM	H2 valve closed
7/5/2012	9:05:59 PM	BCl3 valve closed
7/5/2012	9:05:59 PM	PH3 valve closed
7/5/2012	9:05:59 PM	SiCl4 pre valve closed
7/5/2012	9:05:59 PM	SiCl4 post valve closed
7/5/2012	9:05:59 PM	Bypass valve closed
7/5/2012	9:05:59 PM	Bubbler valve closed
7/5/2012	9:05:59 PM	Main Vac valve opened
7/5/2012	9:05:59 PM	Helium MFC set to  0.000000
7/5/2012	9:05:59 PM	H2 MFC set to  0.000000
7/5/2012	9:05:59 PM	BCl3 MFC set to  0.000000
7/5/2012	9:05:59 PM	PH3 MFC set to  0.000000
7/5/2012	9:05:59 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:05:59 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:05:59 PM	Tube furnace set to 0
7/5/2012	9:06:29 PM	H2 valve closed
7/5/2012	9:06:29 PM	BCl3 valve closed
7/5/2012	9:06:29 PM	PH3 valve closed
7/5/2012	9:06:29 PM	SiCl4 pre valve closed
7/5/2012	9:06:29 PM	SiCl4 post valve closed
7/5/2012	9:06:29 PM	Bypass valve closed
7/5/2012	9:06:29 PM	Bubbler valve closed
7/5/2012	9:06:29 PM	Helium valve opened
7/5/2012	9:06:29 PM	Main Vac valve opened
7/5/2012	9:06:29 PM	Helium MFC set to  20.000000
7/5/2012	9:06:29 PM	H2 MFC set to  0.000000
7/5/2012	9:06:29 PM	BCl3 MFC set to  0.000000
7/5/2012	9:06:29 PM	PH3 MFC set to  0.000000
7/5/2012	9:06:29 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:06:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:06:29 PM	Tube furnace set to 0
7/5/2012	9:06:59 PM	Helium valve closed
7/5/2012	9:06:59 PM	H2 valve closed
7/5/2012	9:06:59 PM	BCl3 valve closed
7/5/2012	9:06:59 PM	PH3 valve closed
7/5/2012	9:06:59 PM	SiCl4 pre valve closed
7/5/2012	9:06:59 PM	SiCl4 post valve closed
7/5/2012	9:06:59 PM	Bypass valve closed
7/5/2012	9:06:59 PM	Bubbler valve closed
7/5/2012	9:06:59 PM	Main Vac valve opened
7/5/2012	9:06:59 PM	Helium MFC set to  0.000000
7/5/2012	9:06:59 PM	H2 MFC set to  0.000000
7/5/2012	9:06:59 PM	BCl3 MFC set to  0.000000
7/5/2012	9:06:59 PM	PH3 MFC set to  0.000000
7/5/2012	9:06:59 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:06:59 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:06:59 PM	Tube furnace set to 0
7/5/2012	9:07:29 PM	H2 valve closed
7/5/2012	9:07:29 PM	BCl3 valve closed
7/5/2012	9:07:29 PM	PH3 valve closed
7/5/2012	9:07:29 PM	SiCl4 pre valve closed
7/5/2012	9:07:29 PM	SiCl4 post valve closed
7/5/2012	9:07:29 PM	Bypass valve closed
7/5/2012	9:07:29 PM	Bubbler valve closed
7/5/2012	9:07:29 PM	Helium valve opened
7/5/2012	9:07:29 PM	Main Vac valve opened
7/5/2012	9:07:29 PM	Helium MFC set to  20.000000
7/5/2012	9:07:29 PM	H2 MFC set to  0.000000
7/5/2012	9:07:29 PM	BCl3 MFC set to  0.000000
7/5/2012	9:07:29 PM	PH3 MFC set to  0.000000
7/5/2012	9:07:29 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:07:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:07:29 PM	Tube furnace set to 0
7/5/2012	9:08:00 PM	Helium valve closed
7/5/2012	9:08:00 PM	H2 valve closed
7/5/2012	9:08:00 PM	BCl3 valve closed
7/5/2012	9:08:00 PM	PH3 valve closed
7/5/2012	9:08:00 PM	SiCl4 pre valve closed
7/5/2012	9:08:00 PM	SiCl4 post valve closed
7/5/2012	9:08:00 PM	Bypass valve closed
7/5/2012	9:08:00 PM	Bubbler valve closed
7/5/2012	9:08:00 PM	Main Vac valve opened
7/5/2012	9:08:00 PM	Helium MFC set to  0.000000
7/5/2012	9:08:00 PM	H2 MFC set to  0.000000
7/5/2012	9:08:00 PM	BCl3 MFC set to  0.000000
7/5/2012	9:08:00 PM	PH3 MFC set to  0.000000
7/5/2012	9:08:00 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:08:00 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:08:00 PM	Tube furnace set to 0
7/5/2012	9:08:30 PM	H2 valve closed
7/5/2012	9:08:30 PM	BCl3 valve closed
7/5/2012	9:08:30 PM	PH3 valve closed
7/5/2012	9:08:30 PM	SiCl4 pre valve closed
7/5/2012	9:08:30 PM	SiCl4 post valve closed
7/5/2012	9:08:30 PM	Bypass valve closed
7/5/2012	9:08:30 PM	Bubbler valve closed
7/5/2012	9:08:30 PM	Helium valve opened
7/5/2012	9:08:30 PM	Main Vac valve opened
7/5/2012	9:08:30 PM	Helium MFC set to  20.000000
7/5/2012	9:08:30 PM	H2 MFC set to  0.000000
7/5/2012	9:08:30 PM	BCl3 MFC set to  0.000000
7/5/2012	9:08:30 PM	PH3 MFC set to  0.000000
7/5/2012	9:08:30 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:08:30 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:08:30 PM	Tube furnace set to 0
7/5/2012	9:09:00 PM	Helium valve closed
7/5/2012	9:09:00 PM	H2 valve closed
7/5/2012	9:09:00 PM	BCl3 valve closed
7/5/2012	9:09:00 PM	PH3 valve closed
7/5/2012	9:09:00 PM	SiCl4 pre valve closed
7/5/2012	9:09:00 PM	SiCl4 post valve closed
7/5/2012	9:09:00 PM	Bypass valve closed
7/5/2012	9:09:00 PM	Bubbler valve closed
7/5/2012	9:09:00 PM	Main Vac valve opened
7/5/2012	9:09:00 PM	Helium MFC set to  0.000000
7/5/2012	9:09:00 PM	H2 MFC set to  0.000000
7/5/2012	9:09:00 PM	BCl3 MFC set to  0.000000
7/5/2012	9:09:00 PM	PH3 MFC set to  0.000000
7/5/2012	9:09:00 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:09:00 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:09:00 PM	Tube furnace set to 0
7/5/2012	9:09:30 PM	H2 valve closed
7/5/2012	9:09:30 PM	BCl3 valve closed
7/5/2012	9:09:30 PM	PH3 valve closed
7/5/2012	9:09:30 PM	SiCl4 pre valve closed
7/5/2012	9:09:30 PM	SiCl4 post valve closed
7/5/2012	9:09:30 PM	Bypass valve closed
7/5/2012	9:09:30 PM	Bubbler valve closed
7/5/2012	9:09:30 PM	Helium valve opened
7/5/2012	9:09:30 PM	Main Vac valve opened
7/5/2012	9:09:30 PM	Helium MFC set to  20.000000
7/5/2012	9:09:30 PM	H2 MFC set to  0.000000
7/5/2012	9:09:30 PM	BCl3 MFC set to  0.000000
7/5/2012	9:09:30 PM	PH3 MFC set to  0.000000
7/5/2012	9:09:30 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:09:30 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:09:30 PM	Tube furnace set to 0
7/5/2012	9:10:00 PM	Helium valve closed
7/5/2012	9:10:00 PM	H2 valve closed
7/5/2012	9:10:00 PM	BCl3 valve closed
7/5/2012	9:10:00 PM	PH3 valve closed
7/5/2012	9:10:00 PM	SiCl4 pre valve closed
7/5/2012	9:10:00 PM	SiCl4 post valve closed
7/5/2012	9:10:00 PM	Bypass valve closed
7/5/2012	9:10:00 PM	Bubbler valve closed
7/5/2012	9:10:01 PM	Main Vac valve opened
7/5/2012	9:10:01 PM	Helium MFC set to  0.000000
7/5/2012	9:10:01 PM	H2 MFC set to  0.000000
7/5/2012	9:10:01 PM	BCl3 MFC set to  0.000000
7/5/2012	9:10:01 PM	PH3 MFC set to  0.000000
7/5/2012	9:10:01 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:10:01 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:10:01 PM	Tube furnace set to 0
7/5/2012	9:10:31 PM	H2 valve closed
7/5/2012	9:10:31 PM	BCl3 valve closed
7/5/2012	9:10:31 PM	PH3 valve closed
7/5/2012	9:10:31 PM	SiCl4 pre valve closed
7/5/2012	9:10:31 PM	SiCl4 post valve closed
7/5/2012	9:10:31 PM	Bypass valve closed
7/5/2012	9:10:31 PM	Bubbler valve closed
7/5/2012	9:10:31 PM	Helium valve opened
7/5/2012	9:10:31 PM	Main Vac valve opened
7/5/2012	9:10:31 PM	Helium MFC set to  20.000000
7/5/2012	9:10:31 PM	H2 MFC set to  0.000000
7/5/2012	9:10:31 PM	BCl3 MFC set to  0.000000
7/5/2012	9:10:31 PM	PH3 MFC set to  0.000000
7/5/2012	9:10:31 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:10:31 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:10:31 PM	Tube furnace set to 0
7/5/2012	9:11:01 PM	Helium valve closed
7/5/2012	9:11:01 PM	H2 valve closed
7/5/2012	9:11:01 PM	BCl3 valve closed
7/5/2012	9:11:01 PM	PH3 valve closed
7/5/2012	9:11:01 PM	SiCl4 pre valve closed
7/5/2012	9:11:01 PM	SiCl4 post valve closed
7/5/2012	9:11:01 PM	Bypass valve closed
7/5/2012	9:11:01 PM	Bubbler valve closed
7/5/2012	9:11:01 PM	Main Vac valve opened
7/5/2012	9:11:01 PM	Helium MFC set to  0.000000
7/5/2012	9:11:01 PM	H2 MFC set to  0.000000
7/5/2012	9:11:01 PM	BCl3 MFC set to  0.000000
7/5/2012	9:11:01 PM	PH3 MFC set to  0.000000
7/5/2012	9:11:01 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:11:01 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:11:01 PM	Tube furnace set to 0
7/5/2012	9:11:02 PM	Run finished at 9:11 PM
7/5/2012	9:11:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/5/2012	9:26:39 PM	Main Vac valve closed
7/5/2012	9:26:52 PM	Main Vac valve opened
7/5/2012	9:28:13 PM	Recipe started at 9:28 PM
7/5/2012	9:28:13 PM	Helium valve closed
7/5/2012	9:28:13 PM	H2 valve closed
7/5/2012	9:28:13 PM	BCl3 valve closed
7/5/2012	9:28:13 PM	PH3 valve closed
7/5/2012	9:28:13 PM	SiCl4 pre valve closed
7/5/2012	9:28:13 PM	SiCl4 post valve closed
7/5/2012	9:28:13 PM	Main Vac valve closed
7/5/2012	9:28:13 PM	Bypass valve closed
7/5/2012	9:28:13 PM	Bubbler valve closed
7/5/2012	9:28:13 PM	Helium MFC set to  0.000000
7/5/2012	9:28:13 PM	H2 MFC set to  0.000000
7/5/2012	9:28:13 PM	BCl3 MFC set to  0.000000
7/5/2012	9:28:13 PM	PH3 MFC set to  0.000000
7/5/2012	9:28:13 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:28:13 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:28:13 PM	Tube furnace set to 0
7/5/2012	9:28:16 PM	Helium valve closed
7/5/2012	9:28:16 PM	BCl3 valve closed
7/5/2012	9:28:16 PM	PH3 valve closed
7/5/2012	9:28:16 PM	SiCl4 pre valve closed
7/5/2012	9:28:16 PM	SiCl4 post valve closed
7/5/2012	9:28:16 PM	Main Vac valve closed
7/5/2012	9:28:16 PM	Bypass valve closed
7/5/2012	9:28:16 PM	Bubbler valve closed
7/5/2012	9:28:16 PM	H2 valve opened
7/5/2012	9:28:16 PM	Helium MFC set to  0.000000
7/5/2012	9:28:16 PM	H2 MFC set to  500.000000
7/5/2012	9:28:16 PM	BCl3 MFC set to  0.000000
7/5/2012	9:28:16 PM	PH3 MFC set to  0.000000
7/5/2012	9:28:16 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:28:16 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:28:16 PM	Tube furnace set to 0
7/5/2012	9:29:28 PM	Helium valve closed
7/5/2012	9:29:28 PM	BCl3 valve closed
7/5/2012	9:29:28 PM	PH3 valve closed
7/5/2012	9:29:28 PM	SiCl4 pre valve closed
7/5/2012	9:29:28 PM	SiCl4 post valve closed
7/5/2012	9:29:28 PM	Main Vac valve closed
7/5/2012	9:29:28 PM	Bypass valve closed
7/5/2012	9:29:28 PM	H2 valve opened
7/5/2012	9:29:28 PM	Bubbler valve opened
7/5/2012	9:29:28 PM	Helium MFC set to  0.000000
7/5/2012	9:29:28 PM	H2 MFC set to  500.000000
7/5/2012	9:29:28 PM	BCl3 MFC set to  0.000000
7/5/2012	9:29:28 PM	PH3 MFC set to  0.000000
7/5/2012	9:29:28 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:29:28 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:29:28 PM	Tube furnace set to 0
7/5/2012	9:29:29 PM	Helium valve closed
7/5/2012	9:29:29 PM	BCl3 valve closed
7/5/2012	9:29:29 PM	PH3 valve closed
7/5/2012	9:29:29 PM	SiCl4 pre valve closed
7/5/2012	9:29:29 PM	SiCl4 post valve closed
7/5/2012	9:29:29 PM	Main Vac valve closed
7/5/2012	9:29:29 PM	Bypass valve closed
7/5/2012	9:29:29 PM	H2 valve opened
7/5/2012	9:29:29 PM	Bubbler valve opened
7/5/2012	9:29:29 PM	Helium MFC set to  0.000000
7/5/2012	9:29:29 PM	H2 MFC set to  500.000000
7/5/2012	9:29:29 PM	BCl3 MFC set to  0.000000
7/5/2012	9:29:29 PM	PH3 MFC set to  0.000000
7/5/2012	9:29:29 PM	SiCl4 MFC set to  0.000000
7/5/2012	9:29:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:29:29 PM	Tube furnace set to 1000
7/5/2012	9:59:29 PM	Helium valve closed
7/5/2012	9:59:29 PM	PH3 valve closed
7/5/2012	9:59:29 PM	Main Vac valve closed
7/5/2012	9:59:29 PM	Bypass valve closed
7/5/2012	9:59:29 PM	H2 valve opened
7/5/2012	9:59:29 PM	BCl3 valve opened
7/5/2012	9:59:29 PM	SiCl4 pre valve opened
7/5/2012	9:59:29 PM	SiCl4 post valve opened
7/5/2012	9:59:29 PM	Bubbler valve opened
7/5/2012	9:59:29 PM	Helium MFC set to  0.000000
7/5/2012	9:59:29 PM	H2 MFC set to  500.000000
7/5/2012	9:59:29 PM	BCl3 MFC set to  1.000000
7/5/2012	9:59:29 PM	PH3 MFC set to  0.000000
7/5/2012	9:59:29 PM	SiCl4 MFC set to  50.000000
7/5/2012	9:59:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	9:59:29 PM	Tube furnace set to 1000
7/5/2012	10:07:29 PM	Helium valve closed
7/5/2012	10:07:29 PM	BCl3 valve closed
7/5/2012	10:07:29 PM	PH3 valve closed
7/5/2012	10:07:29 PM	SiCl4 pre valve closed
7/5/2012	10:07:29 PM	SiCl4 post valve closed
7/5/2012	10:07:29 PM	Main Vac valve closed
7/5/2012	10:07:29 PM	Bypass valve closed
7/5/2012	10:07:29 PM	H2 valve opened
7/5/2012	10:07:29 PM	Bubbler valve opened
7/5/2012	10:07:29 PM	Helium MFC set to  0.000000
7/5/2012	10:07:29 PM	H2 MFC set to  500.000000
7/5/2012	10:07:29 PM	BCl3 MFC set to  0.000000
7/5/2012	10:07:29 PM	PH3 MFC set to  0.000000
7/5/2012	10:07:29 PM	SiCl4 MFC set to  0.000000
7/5/2012	10:07:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:07:30 PM	Tube furnace set to 750
7/5/2012	10:12:30 PM	H2 valve closed
7/5/2012	10:12:30 PM	BCl3 valve closed
7/5/2012	10:12:30 PM	PH3 valve closed
7/5/2012	10:12:30 PM	SiCl4 pre valve closed
7/5/2012	10:12:30 PM	SiCl4 post valve closed
7/5/2012	10:12:30 PM	Main Vac valve closed
7/5/2012	10:12:30 PM	Bypass valve closed
7/5/2012	10:12:30 PM	Helium valve opened
7/5/2012	10:12:30 PM	Bubbler valve opened
7/5/2012	10:12:30 PM	Helium MFC set to  500.000000
7/5/2012	10:12:30 PM	H2 MFC set to  0.000000
7/5/2012	10:12:30 PM	BCl3 MFC set to  0.000000
7/5/2012	10:12:30 PM	PH3 MFC set to  0.000000
7/5/2012	10:12:30 PM	SiCl4 MFC set to  0.000000
7/5/2012	10:12:30 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:12:30 PM	Tube furnace set to 0
7/5/2012	10:28:14 PM	Helium valve closed
7/5/2012	10:28:14 PM	H2 valve closed
7/5/2012	10:28:14 PM	BCl3 valve closed
7/5/2012	10:28:14 PM	PH3 valve closed
7/5/2012	10:28:14 PM	SiCl4 pre valve closed
7/5/2012	10:28:14 PM	SiCl4 post valve closed
7/5/2012	10:28:14 PM	Main Vac valve closed
7/5/2012	10:28:14 PM	Bypass valve closed
7/5/2012	10:28:14 PM	Bubbler valve closed
7/5/2012	10:28:14 PM	Helium MFC set to  0.000000
7/5/2012	10:28:14 PM	H2 MFC set to  0.000000
7/5/2012	10:28:14 PM	BCl3 MFC set to  0.000000
7/5/2012	10:28:14 PM	PH3 MFC set to  0.000000
7/5/2012	10:28:14 PM	SiCl4 MFC set to  0.000000
7/5/2012	10:28:14 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:28:15 PM	Tube furnace set to 0
7/5/2012	10:28:16 PM	Run finished at 10:28 PM
7/5/2012	10:31:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/5/2012	10:31:22 PM	Recipe started at 10:31 PM
7/5/2012	10:31:22 PM	Helium valve closed
7/5/2012	10:31:22 PM	H2 valve closed
7/5/2012	10:31:22 PM	BCl3 valve closed
7/5/2012	10:31:22 PM	PH3 valve closed
7/5/2012	10:31:22 PM	SiCl4 pre valve closed
7/5/2012	10:31:22 PM	SiCl4 post valve closed
7/5/2012	10:31:22 PM	Main Vac valve closed
7/5/2012	10:31:22 PM	Bubbler valve closed
7/5/2012	10:31:22 PM	Bypass valve opened
7/5/2012	10:31:22 PM	Helium MFC set to  0.000000
7/5/2012	10:31:22 PM	H2 MFC set to  0.000000
7/5/2012	10:31:22 PM	BCl3 MFC set to  0.000000
7/5/2012	10:31:22 PM	PH3 MFC set to  0.000000
7/5/2012	10:31:22 PM	SiCl4 MFC set to  0.000000
7/5/2012	10:31:22 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:31:23 PM	Tube furnace set to 0
7/5/2012	10:32:29 PM	Helium valve closed
7/5/2012	10:32:29 PM	H2 valve closed
7/5/2012	10:32:29 PM	BCl3 valve closed
7/5/2012	10:32:29 PM	PH3 valve closed
7/5/2012	10:32:29 PM	SiCl4 pre valve closed
7/5/2012	10:32:29 PM	SiCl4 post valve closed
7/5/2012	10:32:29 PM	Main Vac valve closed
7/5/2012	10:32:29 PM	Bubbler valve closed
7/5/2012	10:32:29 PM	Bypass valve opened
7/5/2012	10:32:29 PM	Helium MFC set to  0.000000
7/5/2012	10:32:29 PM	H2 MFC set to  0.000000
7/5/2012	10:32:29 PM	BCl3 MFC set to  0.000000
7/5/2012	10:32:29 PM	PH3 MFC set to  0.000000
7/5/2012	10:32:29 PM	SiCl4 MFC set to  0.000000
7/5/2012	10:32:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:32:29 PM	Tube furnace set to 0
7/5/2012	10:33:29 PM	Helium valve closed
7/5/2012	10:33:29 PM	H2 valve closed
7/5/2012	10:33:29 PM	BCl3 valve closed
7/5/2012	10:33:29 PM	PH3 valve closed
7/5/2012	10:33:29 PM	SiCl4 pre valve closed
7/5/2012	10:33:29 PM	SiCl4 post valve closed
7/5/2012	10:33:29 PM	Bypass valve closed
7/5/2012	10:33:29 PM	Bubbler valve closed
7/5/2012	10:33:29 PM	Main Vac valve opened
7/5/2012	10:33:29 PM	Helium MFC set to  0.000000
7/5/2012	10:33:29 PM	H2 MFC set to  0.000000
7/5/2012	10:33:29 PM	BCl3 MFC set to  0.000000
7/5/2012	10:33:29 PM	PH3 MFC set to  0.000000
7/5/2012	10:33:29 PM	SiCl4 MFC set to  0.000000
7/5/2012	10:33:29 PM	Bypass solenoid MFC set to  0.000000
7/5/2012	10:33:29 PM	Tube furnace set to 0
7/5/2012	10:33:30 PM	Run finished at 10:33 PM
7/5/2012	10:33:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
